Medvedev; Viacheslav
Patent Applications and Registrations
Patent applications and USPTO patent grants for Medvedev; Viacheslav.The latest application filed is for "reflective optical element".
- Medvedev; Viacheslav - Moscow RU
| Patent | Date |
|---|---|
| Reflective optical element Grant 10,916,356 - Kuznetsov , et al. February 9, 2 | 2021-02-09 |
| Reflective Optical Element App 20200027623 - Kuznetsov; Dmitry ; et al. | 2020-01-23 |
| Source-collector device, lithographic apparatus, and device manufacturing method Grant 9,411,238 - Yakunin , et al. August 9, 2 | 2016-08-09 |
| Radiation source Grant 9,366,967 - Yakunin , et al. June 14, 2 | 2016-06-14 |
| Spectral purity filter Grant 9,007,565 - Yakunin , et al. April 14, 2 | 2015-04-14 |
| Source-collector Device, Lithographic Apparatus, And Device Manufacturing Method App 20140375974 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-25 |
| Radiation Source App 20140368802 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-18 |
| Lithographic Apparatus And Spectral Purity Filter App 20130010275 - Medvedev; Viacheslav ; et al. | 2013-01-10 |
| Spectral Purity Filter App 20120307224 - Yakunin; Andrei Mikhailovich ; et al. | 2012-12-06 |
| Multilayer Mirror, Lithograpic Apparatus, And Methods For Manufacturing A Multilayer Mirror And A Product App 20120229785 - Krivtsun; Vladimir Mihailovitch ; et al. | 2012-09-13 |
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