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Method And Apparatus Of Low Temperature Plasma Enhanced Chemical Vapor Deposition Of Graphene App 20220254641 - Chua; Thai Cheng ;   et al. | 2022-08-11 |
Metal Cap For Contact Resistance Reduction App 20220231137 - Mebarki; Bencherki ;   et al. | 2022-07-21 |
Overhang Reduction Using Pulsed Bias App 20210391176 - Mebarki; Bencherki ;   et al. | 2021-12-16 |
Method of forming a bottom isolation dielectric by directional sputtering of a capping layer over a pair of stacks Grant 11,189,710 - Lee , et al. November 30, 2 | 2021-11-30 |
Methods and apparatus for producing low angle depositions Grant 11,170,982 - Subramani , et al. November 9, 2 | 2021-11-09 |
Selective Oxidation And Simplified Pre-clean App 20210287898 - Mebarki; Bencherki ;   et al. | 2021-09-16 |
Film quality control in a linear scan physical vapor deposition process Grant 10,950,448 - Mebarki , et al. March 16, 2 | 2021-03-16 |
Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Grant 10,927,451 - Mebarki , et al. February 23, 2 | 2021-02-23 |
Methods for forming a metal silicide interconnection nanowire structure Grant 10,930,472 - Mebarki , et al. February 23, 2 | 2021-02-23 |
Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Grant 10,927,450 - Mebarki , et al. February 23, 2 | 2021-02-23 |
Methods of forming metal silicide layers and metal silicide layers formed therefrom Grant 10,916,433 - Ren , et al. February 9, 2 | 2021-02-09 |
Bottom Isolation By Selective Top Deposition In Gaa Transistors App 20200373411 - Lee; Byeong Chan ;   et al. | 2020-11-26 |
Method and apparatus for asymmetric selective physical vapor deposition Grant 10,815,561 - Lee , et al. October 27, 2 | 2020-10-27 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200255937 - MEBARKI; BENCHERKI ;   et al. | 2020-08-13 |
Apparatus And Methods For Asymmetric Deposition Of Metal On High Aspect Ratio Nanostructures App 20200219720 - SHEU; BEN-LI ;   et al. | 2020-07-09 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200199741 - MEBARKI; BENCHERKI ;   et al. | 2020-06-25 |
Pvd Directional Deposition For Encapsulation App 20200192108 - GODET; Ludovic ;   et al. | 2020-06-18 |
Self-aligned interconnects formed using subtractive techniques Grant 10,643,895 - Mebarki , et al. | 2020-05-05 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200135464 - KESAPRAGADA; SREE RANGASAI V. ;   et al. | 2020-04-30 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient Grant 10,636,704 - Mebarki , et al. | 2020-04-28 |
Methods for asymmetric deposition of metal on high aspect ratio nanostructures Grant 10,636,655 - Sheu , et al. | 2020-04-28 |
Laminate and core shell formation of silicide nanowire Grant 10,593,592 - Mebarki , et al. | 2020-03-17 |
Collimator For Selective Pvd Without Scanning App 20200051798 - MEBARKI; BENCHERKI ;   et al. | 2020-02-13 |
Methods And Apparatus For Producing Low Angle Depositions App 20200051794 - SUBRAMANI; ANANTHA K. ;   et al. | 2020-02-13 |
Multi-zone Collimator For Selective Pvd App 20190353919 - MEBARKI; BENCHERKI ;   et al. | 2019-11-21 |
Film Quality Control In A Linear Scan Physical Vapor Deposition Process App 20190311905 - Mebarki; Bencherki ;   et al. | 2019-10-10 |
Methods Of Forming Metal Silicide Layers And Metal Silicide Layers Formed Therefrom App 20190311908 - REN; He ;   et al. | 2019-10-10 |
Microwave anneal to improve CVD metal gap-fill and throughput Grant 10,438,849 - Ren , et al. O | 2019-10-08 |
Method And Apparatus Of Forming Structures By Symmetric Selective Physical Vapor Deposition App 20190287772 - LEE; JOUNG JOO ;   et al. | 2019-09-19 |
Apparatus And Methods For Asymmetric Deposition Of Metal On High Aspect Ratio Nanostructures App 20190287791 - SHEU; BEN-LI ;   et al. | 2019-09-19 |
Methods And Apparatus For Physical Vapor Deposition Using Directional Linear Scanning App 20190276931 - Mebarki; Bencherki ;   et al. | 2019-09-12 |
Methods And Apparatus For Physical Vapor Deposition Via Linear Scanning With Ambient Control App 20190276929 - Mebarki; Bencherki ;   et al. | 2019-09-12 |
Method And Apparatus For Asymmetric Selective Physical Vapor Deposition App 20190276926 - Lee; Joung Joo ;   et al. | 2019-09-12 |
Low thermal budget crystallization of amorphous metal silicides Grant 10,354,882 - Mebarki , et al. July 16, 2 | 2019-07-16 |
Methods And Apparatus For Physical Vapor Deposition App 20190189465 - MILLER; KEITH A. ;   et al. | 2019-06-20 |
Methods For Forming A Metal Silicide Interconnection Nanowire Structure App 20190172686 - MEBARKI; Bencherki ;   et al. | 2019-06-06 |
Seam-healing Method Upon Supra-atmospheric Process In Diffusion Promoting Ambient App 20190051557 - MEBARKI; Bencherki ;   et al. | 2019-02-14 |
Methods for forming a metal silicide interconnection nanowire structure Grant 10,204,764 - Mebarki , et al. Feb | 2019-02-12 |
Low Thermal Budget Crystallization Of Amorphous Metal Silicides App 20180315609 - Mebarki; Bencherki ;   et al. | 2018-11-01 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient Grant 10,049,927 - Mebarki , et al. August 14, 2 | 2018-08-14 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning Grant 10,014,174 - Mebarki , et al. July 3, 2 | 2018-07-03 |
Silicide phase control by confinement Grant 9,865,466 - Mebarki , et al. January 9, 2 | 2018-01-09 |
Self-aligned Interconnects Formed Using Subtractive Techniques App 20170372960 - Mebarki; Bencherki ;   et al. | 2017-12-28 |
Methods for forming 2-dimensional self-aligned vias Grant 9,847,252 - Mebarki , et al. December 19, 2 | 2017-12-19 |
Seam-healing Method Upon Supra-atmospheric Process In Diffusion Promoting Ambient App 20170358490 - MEBARKI; Bencherki ;   et al. | 2017-12-14 |
Microwave Anneal To Improve Cvd Metal Gap-fill And Throughput App 20170309515 - Ren; He ;   et al. | 2017-10-26 |
Methods For Forming 2-dimensional Self-aligned Vias App 20170294348 - MEBARKI; Bencherki ;   et al. | 2017-10-12 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning App 20170278709 - MEBARKI; Bencherki ;   et al. | 2017-09-28 |
Self-aligned interconnects formed using substractive techniques Grant 9,761,489 - Mebarki , et al. September 12, 2 | 2017-09-12 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning Grant 9,659,771 - Mebarki , et al. May 23, 2 | 2017-05-23 |
Metal silicide formation through an intermediate metal halogen compound Grant 9,631,278 - Mebarki , et al. April 25, 2 | 2017-04-25 |
Direct deposition of nickel silicide nanowire Grant 9,613,859 - Lakshmanan , et al. April 4, 2 | 2017-04-04 |
Silicide Phase Control By Confinement App 20170092502 - MEBARKI; Bencherki ;   et al. | 2017-03-30 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning App 20160365248 - MEBARKI; Bencherki ;   et al. | 2016-12-15 |
Metal Silicide Formation Through An Intermediate Metal Halogen Compound App 20160222505 - Mebarki; Bencherki ;   et al. | 2016-08-04 |
Laminate And Core Shell Formation Of Silicide Nanowire App 20160204029 - MEBARKI; Bencherki ;   et al. | 2016-07-14 |
Direct Deposition Of Nickel Silicide Nanowire App 20160204027 - LAKSHMANAN; Annamalai ;   et al. | 2016-07-14 |
Method for critical dimension reduction using conformal carbon films Grant 9,337,051 - Mebarki , et al. May 10, 2 | 2016-05-10 |
Methods For Forming A Metal Silicide Interconnection Nanowire Structure App 20160118260 - MEBARKI; Bencherki ;   et al. | 2016-04-28 |
Method For Critical Dimension Reduction Using Conformal Carbon Films App 20160049305 - MEBARKI; Bencherki ;   et al. | 2016-02-18 |
Self-aligned interconnects formed using substractive techniques App 20150056800 - Mebarki; Bencherki ;   et al. | 2015-02-26 |
Ammonia-based plasma treatment for metal fill in narrow features Grant 8,551,880 - Mebarki , et al. October 8, 2 | 2013-10-08 |
High mobility monolithic p-i-n diodes Grant 8,298,887 - Han , et al. October 30, 2 | 2012-10-30 |
Self Aligned Triple Patterning App 20120085733 - Mebarki; Bencherki ;   et al. | 2012-04-12 |
Self-aligned multi-patterning for advanced critical dimension contacts Grant 8,084,310 - Mebarki , et al. December 27, 2 | 2011-12-27 |
Self aligned double patterning flow with non-sacrificial features Grant 7,972,959 - Mebarki , et al. July 5, 2 | 2011-07-05 |
High Mobility Monolithic P-i-n Diodes App 20110136327 - Han; Xinhai ;   et al. | 2011-06-09 |
Self-aligned Multi-patterning For Advanced Critical Dimension Contacts App 20100136792 - Mebarki; Bencherki ;   et al. | 2010-06-03 |
Self Aligned Double Patterning Flow With Non-sacrificial Features App 20100136784 - Mebarki; Bencherki ;   et al. | 2010-06-03 |
Ammonia-based Plasma Treatment For Metal Fill In Narrow Features App 20090117736 - Mebarki; Bencherki ;   et al. | 2009-05-07 |
Object processing apparatus and plasma facility comprising the same Grant 7,378,062 - Itatani , et al. May 27, 2 | 2008-05-27 |
Object processing apparatus and plasma facility comprising the same App 20040020598 - Itatani, Ryohei ;   et al. | 2004-02-05 |