| Patent | Date |
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Semiconductor devices having ruthenium phosphorus thin films
Grant 10,658,487 - Clendenning , et al. | 2020-05-19 |
Microelectronic Devices And Methods For Enhancing Interconnect Reliability Performance Using Tungsten Containing Adhesion Layers
App 20200066645 - FARMER; Jason A. ; et al. | 2020-02-27 |
Semiconductor Devices Having Ruthenium Phosphorus Thin Films
App 20190252511 - CLENDENNING; Scott B. ; et al. | 2019-08-15 |
Depositing titanium silicon nitride films for forming phase change memories
Grant 8,633,463 - Lee , et al. January 21, 2 | 2014-01-21 |
Depositing Titanium Silicon Nitride Films For Forming Phase Change Memories
App 20130299767 - Lee; Jong-Won ; et al. | 2013-11-14 |
Depositing titanium silicon nitride films for forming phase change memories
Grant 8,501,523 - Lee , et al. August 6, 2 | 2013-08-06 |
Forming a copper diffusion barrier
Grant 8,227,335 - Johnston , et al. July 24, 2 | 2012-07-24 |
Methods For The Deposition Of Ternary Oxide Gate Dielectrics And Structures Formed Thereby
App 20120091542 - Brazier; Mark R. ; et al. | 2012-04-19 |
Pixelated photoresists
Grant 8,003,293 - Meagley , et al. August 23, 2 | 2011-08-23 |
Methods of forming nickel silicide layers with low carbon content
Grant 7,704,858 - McSwiney , et al. April 27, 2 | 2010-04-27 |
Method for manufacturing a silicon-on-insulator (SOI) wafer with an etch stop layer
App 20090096025 - Tolchinsky; Peter G. ; et al. | 2009-04-16 |
Methods For The Deposition Of Ternary Oxide Gate Dielectrics And Structures Formed Thereby
App 20090087623 - Brazier; Mark R. ; et al. | 2009-04-02 |
Method for manufacturing a silicon-on-insulator (SOI) wafer with an etch stop layer
Grant 7,473,614 - Tolchinsky , et al. January 6, 2 | 2009-01-06 |
Forming a silicon nitride film
Grant 7,470,450 - McSwiney , et al. December 30, 2 | 2008-12-30 |
Noble metal barrier and seed layer for semiconductors
Grant 7,459,392 - Johnston , et al. December 2, 2 | 2008-12-02 |
Metal ion separation from aqueous solutions using photoswitchable ionophores
Grant 7,452,728 - Leet , et al. November 18, 2 | 2008-11-18 |
Methods of forming nickel silicide layers with low carbon content
App 20080242059 - McSwiney; Michael L. ; et al. | 2008-10-02 |
Integrating n-type and p-type metal gate transistors
Grant 7,316,949 - Doczy , et al. January 8, 2 | 2008-01-08 |
Forming a copper diffusion barrier
App 20070298608 - Johnston; Steven W. ; et al. | 2007-12-27 |
Forming a copper diffusion barrier
Grant 7,279,423 - Johnston , et al. October 9, 2 | 2007-10-09 |
Layered films formed by controlled phase segregation
Grant 7,241,707 - Meagley , et al. July 10, 2 | 2007-07-10 |
Energy harvesting molecules and photoresist technology
Grant 7,235,344 - Meagley , et al. June 26, 2 | 2007-06-26 |
Forming a dielectric layer using a hydrocarbon-containing precursor
App 20070032675 - Meagley; Robert P. ; et al. | 2007-02-08 |
Method for adhesion and deposition of metal films which provide a barrier and permit direct plating
App 20060286800 - Dominguez; Juan E. ; et al. | 2006-12-21 |
Forming a dielectric layer using a hydrocarbon-containing precursor
Grant 7,138,158 - Meagley , et al. November 21, 2 | 2006-11-21 |
Low-temperature silicon nitride deposition
Grant 7,125,582 - McSwiney , et al. October 24, 2 | 2006-10-24 |
Precursors for the deposition of carbon-doped silicon nitride or silicon oxynitride films
App 20060228903 - McSwiney; Michael L. ; et al. | 2006-10-12 |
Nobel metal barrier and seed layer for semiconductors
App 20060220249 - Johnston; Steven W. ; et al. | 2006-10-05 |
Layered films formed by controlled phase segregation
App 20060183348 - Meagley; Robert P. ; et al. | 2006-08-17 |
Precursors for film formation
Grant 7,071,125 - McSwiney , et al. July 4, 2 | 2006-07-04 |
Method for manufacturing a silicon-on-Insulator (SOI) wafer with an etch stop layer
App 20060102988 - Tolchinsky; Peter G. ; et al. | 2006-05-18 |
Depositing titanium silicon nitride films for forming phase change memories
App 20060091492 - Lee; Jong-Won ; et al. | 2006-05-04 |
Electronic devices with molecular sieve layers
App 20060068190 - Goodner; Michael D. ; et al. | 2006-03-30 |
Pixelated photoresists
App 20060068318 - Meagley; Robert P. ; et al. | 2006-03-30 |
Precursors for film formation
App 20060063394 - McSwiney; Michael L. ; et al. | 2006-03-23 |
Integrating n-type and p-type metal gate transistors
App 20060030104 - Doczy; Mark ; et al. | 2006-02-09 |
Energy harvesting molecules and photoresist technology
App 20060003253 - Meagley; Robert P. ; et al. | 2006-01-05 |
integrating n-type and P-type metal gate transistors
Grant 6,972,225 - Doczy , et al. December 6, 2 | 2005-12-06 |
Metal ion separation from aqueous solutions using photoswitchable ionophores
App 20050258107 - Leet, Bob E. ; et al. | 2005-11-24 |
Integrating n-type and p-type metal gate transistors
Grant 6,953,719 - Doczy , et al. October 11, 2 | 2005-10-11 |
Forming a silicon nitride film
App 20050163927 - McSwiney, Michael L. ; et al. | 2005-07-28 |
Integrating N-type and P-type metal gate transistors
App 20050040469 - Doczy, Mark ; et al. | 2005-02-24 |
Integrating n-type and p-type metal gate transistors
Grant 6,858,483 - Doczy , et al. February 22, 2 | 2005-02-22 |
Low-temperature silicon nitride deposition
App 20050025885 - McSwiney, Michael L. ; et al. | 2005-02-03 |
Integrating n-type and p-type metal gate transistors
App 20040214385 - Doczy, Mark ; et al. | 2004-10-28 |
Forming a dielectric layer using a hydrocarbon-containing precursor
App 20040170760 - Meagley, Robert P. ; et al. | 2004-09-02 |
Integrating n-type and p-type metal gate transistors
App 20040121541 - Doczy, Mark ; et al. | 2004-06-24 |
Forming a copper diffusion barrier
App 20040084773 - Johnston, Steven W. ; et al. | 2004-05-06 |
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