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Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing Grant 9,847,221 - McLaughlin , et al. December 19, 2 | 2017-12-19 |
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Clean Resistant Windows For Ultraviolet Thermal Processing App 20160258057 - Lee; James ;   et al. | 2016-09-08 |
Multi-station Sequential Curing Of Dielectric Films App 20150114292 - Haverkamp; Jason Dirk ;   et al. | 2015-04-30 |
Carbon containing low-k dielectric constant recovery using UV treatment Grant 8,465,991 - Varadarajan , et al. June 18, 2 | 2013-06-18 |
Carbon Containing Low-k Dielectric Constant Recovery Using Uv Treatment App 20110117678 - Varadarajan; Bhadri N. ;   et al. | 2011-05-19 |
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