McIntyre; Edward K.

Patent Applications and Registrations

Patent applications and USPTO patent grants for McIntyre; Edward K..The latest application filed is for "method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrost".

Company Profile

3.7.4

McIntyre; Edward K. - Franklin MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck Grant 10,692,749 - McIntyre , et al.	2020-06-23
Charge integration based electrostatic clamp health monitor Grant 10,324,121 - McIntyre , et al.	2019-06-18
Method To Provide Consistent Electrostatic Clamping Through Real Time Control Of Electrostatic Charge Deposition In An Electrost App 20190172743 - McIntyre; Edward K. ; et al.	2019-06-06
System and method for electrostatic clamping of workpieces Grant 9,871,473 - McIntyre , et al. January 16, 2	2018-01-16
System And Method For Electrostatic Clamping Of Workpieces App 20160087557 - McIntyre; Edward K. ; et al.	2016-03-24
Charge Integration Based Electrostatic Clamp Health Monitor App 20140188416 - McIntyre; Edward K. ; et al.	2014-07-03
Method for extending equipment uptime in ion implantation Grant 7,875,125 - Cook , et al. January 25, 2	2011-01-25
Method For Extending Equipment Uptime In Ion Implantation App 20090081874 - Cook; Kevin S. ; et al.	2009-03-26
Mechanism for prevention of neutron radiation in ion implanter beamline Grant 6,608,315 - Saadatmand , et al. August 19, 2	2003-08-19
Continuously variable aperture for high-energy ion implanter Grant 6,207,964 - McIntyre , et al. March 27, 2	2001-03-27
Time of flight energy measurement apparatus for an ion beam implanter Grant 6,137,112 - McIntyre , et al. October 24, 2	2000-10-24

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