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Patent applications and USPTO patent grants for McIntosh; Monique.The latest application filed is for "plasma abatement of compounds containing heavy atoms".
Patent | Date |
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Plasma abatement of compounds containing heavy atoms Grant 11,185,815 - Cox , et al. November 30, 2 | 2021-11-30 |
Plasma abatement of compounds containing heavy atoms Grant 10,449,486 - Cox , et al. Oc | 2019-10-22 |
Plasma Abatement Of Compounds Containing Heavy Atoms App 20190022577 - COX; Michael S. ;   et al. | 2019-01-24 |
Plasma Abatement Of Compounds Containing Heavy Atoms App 20180318758 - COX; Michael S. ;   et al. | 2018-11-08 |
Plasma Abatement Of Compounds Containing Heavy Atoms App 20170216767 - COX; Michael S. ;   et al. | 2017-08-03 |
Plasma abatement of compounds containing heavy atoms Grant 9,649,592 - Cox , et al. May 16, 2 | 2017-05-16 |
Nitrogen Oxide Abatement In Semiconductor Fabrication App 20160276179 - Fisher; Paul E. ;   et al. | 2016-09-22 |
Vacuum Foreline Reagent Addition For Fluorine Abatement App 20160089630 - DICKINSON; Colin John ;   et al. | 2016-03-31 |
Plasma Abatement Of Compounds Containing Heavy Atoms App 20150251133 - COX; Michael S. ;   et al. | 2015-09-10 |
Methods And Apparatus For Pfc Abatement Using A Cdo Chamber App 20080014134 - Raoux; Sebastien ;   et al. | 2008-01-17 |
Methods And Apparatus For Pfc Abatement Using A Cdo Chamber App 20080003151 - Raoux; Sebastien ;   et al. | 2008-01-03 |
Methods And Apparatus For Pfc Abatement Using A Cdo Chamber App 20080003158 - Raoux; Sebastien ;   et al. | 2008-01-03 |
Methods And Apparatus For Pfc Abatement Using A Cdo Chamber App 20080003157 - Raoux; Sebastien ;   et al. | 2008-01-03 |
Methods And Apparatus For Pfc Abatement Using A Cdo Chamber App 20080003150 - Raoux; Sebastien ;   et al. | 2008-01-03 |
Methods and apparatus for process abatement App 20070086931 - Raoux; Sebastien ;   et al. | 2007-04-19 |
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