McIntosh; John Martin
Patent Applications and Registrations
Patent applications and USPTO patent grants for McIntosh; John Martin.The latest application filed is for "method for metal patterning and improved linewidth control".
- McIntosh; John Martin - Orlando FL
| Patent | Date |
|---|---|
| Overlay metrology using scatterometry profiling Grant 6,985,229 - Lee , et al. January 10, 2 | 2006-01-10 |
| Substrate topography compensation at mask design: 3D OPC topography anchored Grant 6,893,800 - Jessen , et al. May 17, 2 | 2005-05-17 |
| Calibration standard for high resolution electron microscopy Grant 6,750,447 - Houge , et al. June 15, 2 | 2004-06-15 |
| Three dimensional reconstruction metrology Grant 6,714,892 - Houge , et al. March 30, 2 | 2004-03-30 |
| Abnormal photoresist line/space profile detection through signal processing of metrology waveform Grant 6,708,574 - Houge , et al. March 23, 2 | 2004-03-23 |
| Method for metal patterning and improved linewidth control App 20030228755 - Esry, Thomas Craig ; et al. | 2003-12-11 |
| Overlay metrology using scatterometry profiling App 20030223066 - Lee, Cynthia C. ; et al. | 2003-12-04 |
| Process control using three dimensional reconstruction metrology Grant 6,651,226 - Houge , et al. November 18, 2 | 2003-11-18 |
| Control of semiconductor processing Grant 6,641,746 - Houge , et al. November 4, 2 | 2003-11-04 |
| Mass spectrometer particle counter Grant 6,633,032 - Houge , et al. October 14, 2 | 2003-10-14 |
| Patterned implant metrology App 20030184769 - Houge, Erik Cho ; et al. | 2003-10-02 |
| X-ray system Grant 6,606,371 - Antonell , et al. August 12, 2 | 2003-08-12 |
| Monitoring system for determining progress in a fabrication activity Grant 6,569,690 - Houge , et al. May 27, 2 | 2003-05-27 |
| Scanning electron microscope system and method of manufacturing an integrated circuit Grant 6,556,703 - Kane , et al. April 29, 2 | 2003-04-29 |
| Control of semiconductor processing App 20030062339 - Houge, Erik Cho ; et al. | 2003-04-03 |
| Three dimensional reconstruction metrology App 20020156594 - Houge, Erik Cho ; et al. | 2002-10-24 |
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