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Method To Form Air Gap Structure With Dual Dielectric Layer App 20210358840 - McGahay; Vincent J. ;   et al. | 2021-11-18 |
Dual dielectric layer for closing seam in air gap structure Grant 11,127,678 - McGahay , et al. September 21, 2 | 2021-09-21 |
Dual Dielectric Layer For Closing Seam In Air Gap Structure App 20210175166 - McGahay; Vincent J. ;   et al. | 2021-06-10 |
Artificially Oriented Piezoelectric Film For Integrated Filters App 20200036363 - McGahay; Vincent J. ;   et al. | 2020-01-30 |
Seal ring structure of integrated circuit and method of forming same Grant 10,546,822 - Polomoff , et al. Ja | 2020-01-28 |
Time temperature monitoring system Grant 10,504,807 - Davis , et al. Dec | 2019-12-10 |
Artificially oriented piezoelectric film for integrated filters Grant 10,483,943 - McGahay , et al. Nov | 2019-11-19 |
Arc-resistant crackstop Grant 10,438,902 - McGahay , et al. O | 2019-10-08 |
Arc-resistant Crackstop App 20190074253 - MCGAHAY; Vincent J. ;   et al. | 2019-03-07 |
Seal Ring Structure Of Integrated Circuit And Method Of Forming Same App 20190067210 - Polomoff; Nicholas A. ;   et al. | 2019-02-28 |
Time temperature monitoring system Grant 10,217,682 - Davis , et al. Feb | 2019-02-26 |
Multiple-depth trench interconnect technology at advanced semiconductor nodes Grant 10,169,525 - Greco , et al. J | 2019-01-01 |
Artificially Oriented Piezoelectric Film For Integrated Filters App 20180375494 - McGahay; Vincent J. ;   et al. | 2018-12-27 |
Time Temperature Monitoring System App 20180350702 - Davis; Taryn J. ;   et al. | 2018-12-06 |
Crackstop structures Grant 10,109,600 - McGahay , et al. October 23, 2 | 2018-10-23 |
Segmented Guard-ring And Chip Edge Seals App 20180248001 - STAMPER; Anthony K. ;   et al. | 2018-08-30 |
Electrical circuit odometer sensor array Grant 10,060,974 - Fry , et al. August 28, 2 | 2018-08-28 |
Segmented guard-ring and chip edge seals Grant 10,062,748 - Stamper , et al. August 28, 2 | 2018-08-28 |
Time Temperature Monitoring System App 20180226308 - Davis; Taryn J. ;   et al. | 2018-08-09 |
Time temperature monitoring system Grant 10,032,683 - Davis , et al. July 24, 2 | 2018-07-24 |
Multiple-depth Trench Interconnect Technology At Advanced Semiconductor Nodes App 20170277823 - Greco; Stephen E. ;   et al. | 2017-09-28 |
Multiple-depth trench interconnect technology at advanced semiconductor nodes Grant 9,710,592 - Greco , et al. July 18, 2 | 2017-07-18 |
Time Temperature Monitoring System App 20160372391 - Davis; Taryn J. ;   et al. | 2016-12-22 |
Integrated circuit barrierless microfluidic channel Grant 9,502,325 - Clevenger , et al. November 22, 2 | 2016-11-22 |
Stitch-derived via structures and methods of generating the same Grant 9,454,631 - Greco , et al. September 27, 2 | 2016-09-27 |
Method and structure for determining thermal cycle reliability Grant 9,443,776 - Filippi , et al. September 13, 2 | 2016-09-13 |
Integrated Circuit Barrierless Microfluidic Channel App 20160254208 - Clevenger; Lawrence A. ;   et al. | 2016-09-01 |
Integrated circuit barrierless microfluidic channel Grant 9,385,062 - Clevenger , et al. July 5, 2 | 2016-07-05 |
Electrical Circuit Odometer Sensor Array App 20160178694 - Fry; Jonathan R. ;   et al. | 2016-06-23 |
Integrated Circuit Barrierless Microfluidic Channel App 20160181153 - Clevenger; Lawrence A. ;   et al. | 2016-06-23 |
Integrated Circuit Barrierless Microfluidic Channel App 20160181173 - Clevenger; Lawrence A. ;   et al. | 2016-06-23 |
Integrated circuit barrierless microfluidic channel Grant 9,373,561 - Clevenger , et al. June 21, 2 | 2016-06-21 |
Methods to form conductive thin film structures Grant 9,362,230 - Clevenger , et al. June 7, 2 | 2016-06-07 |
Method and structure for determining thermal cycle reliability Grant 9,287,186 - Filippi , et al. March 15, 2 | 2016-03-15 |
Multiple-depth Trench Interconnect Technology At Advancedsemiconductor Nodes App 20160042114 - Greco; Stephen E. ;   et al. | 2016-02-11 |
Stitch-derived Via Structures And Methods Of Generating The Same App 20150339422 - Greco; Stephen E. ;   et al. | 2015-11-26 |
Method And Structure For Determining Thermal Cycle Reliability App 20150262899 - FILIPPI; RONALD G. ;   et al. | 2015-09-17 |
Device and methodology for reducing effective dielectric constant in semiconductor devices Grant 8,343,868 - Edelstein , et al. January 1, 2 | 2013-01-01 |
Deep trench crackstops under contacts Grant 8,237,246 - Angyal , et al. August 7, 2 | 2012-08-07 |
Semiconductor article having a through silicon via and guard ring Grant 8,232,648 - McGahay , et al. July 31, 2 | 2012-07-31 |
Reducing effective dielectric constant in semiconductor devices Grant 8,129,286 - Edelstein , et al. March 6, 2 | 2012-03-06 |
Semiconductor Article Having A Through Silicon Via And Guard Ring App 20110291279 - McGahay; Vincent J. ;   et al. | 2011-12-01 |
Integrated circuit having resistor between BEOL interconnect and FEOL structure and related method Grant 8,013,394 - Chinthakindi , et al. September 6, 2 | 2011-09-06 |
Run-time dispatch system for enhanced product characterization capability Grant 7,979,151 - McGahay July 12, 2 | 2011-07-12 |
Method to create region specific exposure in a layer Grant 7,977,032 - Dimitrakopoulos , et al. July 12, 2 | 2011-07-12 |
Reliable BEOL integration process with direct CMP of porous SiCOH dielectric Grant 7,948,083 - Dimitrakopoulos , et al. May 24, 2 | 2011-05-24 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices App 20110111590 - Edelstein; Daniel C. ;   et al. | 2011-05-12 |
Device and methodology for reducing effective dielectric constant in semiconductor devices Grant 7,892,940 - Edelstein , et al. February 22, 2 | 2011-02-22 |
Deep Trench Crackstops Under Contacts App 20100200960 - Angyal; Matthew S. ;   et al. | 2010-08-12 |
Device and methodology for reducing effective dielectric constant in semiconductor devices Grant 7,592,685 - Edelstein , et al. September 22, 2 | 2009-09-22 |
Run-time Dispatch System For Enhanced Product Characterization Capability App 20090149979 - McGahay; Vincent J. | 2009-06-11 |
Method to create air gaps using non-plasma processes to damage ILD materials Grant 7,531,444 - Dimitrakopoulos , et al. May 12, 2 | 2009-05-12 |
Hardmask for improved reliability of silicon based dielectrics Grant 7,485,582 - Nguyen , et al. February 3, 2 | 2009-02-03 |
Method to improve time dependent dielectric breakdown Grant 7,473,636 - Chanda , et al. January 6, 2 | 2009-01-06 |
Building metal pillars in a chip for structure support Grant 7,456,098 - Hichri , et al. November 25, 2 | 2008-11-25 |
Method and structure for integrating MIM capacitors within dual damascene processing techniques Grant 7,439,151 - Coolbaugh , et al. October 21, 2 | 2008-10-21 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices App 20080254630 - EDELSTEIN; Daniel C. ;   et al. | 2008-10-16 |
Integrated Circuit Having Resistor Between Beol Interconnect And Feol Structure And Related Method App 20080237800 - CHINTHAKINDI; ANIL K. ;   et al. | 2008-10-02 |
Method And Structure For Determining Thermal Cycle Reliability App 20080224135 - Filippi; Ronald Gene ;   et al. | 2008-09-18 |
Method And Structure For Integrating Mim Capacitors Within Dual Damascene Processing Techniques App 20080185684 - Coolbaugh; Douglas D. ;   et al. | 2008-08-07 |
Device and methodology for reducing effective dielectric constant in semiconductor devices Grant 7,405,147 - Edelstein , et al. July 29, 2 | 2008-07-29 |
Structure for determining thermal cycle reliability Grant 7,388,224 - Filippi , et al. June 17, 2 | 2008-06-17 |
Hardmask For Improved Reliability Of Silicon Based Dielectrics App 20080132055 - Nguyen; Son Van ;   et al. | 2008-06-05 |
Hardmask For Improved Reliability Of Silicon Based Dielectrics App 20080118717 - Nguyen; Son Van ;   et al. | 2008-05-22 |
Control of liner thickness for improving thermal cycle reliability Grant 7,345,305 - Filippi , et al. March 18, 2 | 2008-03-18 |
Method And Structure For Integrating Mim Capacitors Within Dual Damascene Processing Techniques App 20080064163 - Coolbaugh; Douglas D. ;   et al. | 2008-03-13 |
Hardmask for reliability of silicon based dielectrics Grant 7,335,980 - Nguyen , et al. February 26, 2 | 2008-02-26 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices App 20080038915 - EDELSTEIN; Daniel C. ;   et al. | 2008-02-14 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices App 20080038923 - EDELSTEIN; Daniel C. ;   et al. | 2008-02-14 |
Full Removal Of Dual Damascene Metal Level App 20070275565 - Cooney; Edward C. III ;   et al. | 2007-11-29 |
RELIABLE BEOL INTEGRATION PROCESS WITH DIRECT CMP OF POROUS SiCOH DIELECTRIC App 20070228570 - Dimitrakopoulos; Christos D. ;   et al. | 2007-10-04 |
Reducing damage to ulk dielectric during cross-linked polymer removal Grant 7,253,100 - DellaGuardia , et al. August 7, 2 | 2007-08-07 |
Reliable BEOL integration process with direct CMP of porous SiCOH dielectric Grant 7,253,105 - Dimitrakopoulos , et al. August 7, 2 | 2007-08-07 |
Method to Improve Time Dependent Dielectric Breakdown App 20070158851 - Chanda; Kaushik ;   et al. | 2007-07-12 |
Single Or Dual Damascene Via Level Wirings And/or Devices, And Methods Of Fabricating Same App 20070152332 - Chinthakindi; Anil K. ;   et al. | 2007-07-05 |
Reducing Damage To Ulk Dielectric During Cross-linked Polymer Removal App 20070111466 - DellaGuardia; Ronald A. ;   et al. | 2007-05-17 |
Interlevel dielectric layer and metal layer sealing Grant 7,214,608 - Angyal , et al. May 8, 2 | 2007-05-08 |
Preventing Damage To Interlevel Dielectric App 20070072412 - Dunn; Derren N. ;   et al. | 2007-03-29 |
Method and structure for determining thermal cycle reliability App 20060273460 - Filippi; Ronald Gene ;   et al. | 2006-12-07 |
Crackstop with release layer for crack control in semiconductors Grant 7,109,093 - Fitzsimmons , et al. September 19, 2 | 2006-09-19 |
Method and structure for determining thermal cycle reliability Grant 7,098,054 - Filippi , et al. August 29, 2 | 2006-08-29 |
Multi-functional structure for enhanced chip manufacturibility and reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor Grant 7,098,676 - Landers , et al. August 29, 2 | 2006-08-29 |
Reliable BEOL integration process with direct CMP of porous SiCOH dielectric App 20060189133 - Dimitrakopoulos; Christos D. ;   et al. | 2006-08-24 |
Building metal pillars in a chip for structure support App 20060190846 - Hichri; Habib ;   et al. | 2006-08-24 |
Method To Create Air Gaps Using Non-plasma Processes To Damage Ild Materials App 20060183315 - Dimitrakopoulos; Christos D. ;   et al. | 2006-08-17 |
Method To Create Region Specific Exposure In A Layer App 20060183062 - Dimitrakopoulos; Christos D. ;   et al. | 2006-08-17 |
Building metal pillars in a chip for structure support Grant 7,067,902 - Hichri , et al. June 27, 2 | 2006-06-27 |
Hardmask for improved reliability of silicon based dielectrics App 20060091559 - Nguyen; Son Van ;   et al. | 2006-05-04 |
Control of liner thickness for improving thermal cycle reliability App 20060027842 - Filippi; Ronald Gene ;   et al. | 2006-02-09 |
Interlevel Dielectric Layer And Metal Layer Sealing App 20060024961 - Angyal; Matthew S. ;   et al. | 2006-02-02 |
Control of liner thickness for improving thermal cycle reliability Grant 6,989,282 - Filippi , et al. January 24, 2 | 2006-01-24 |
Single and multilevel rework Grant 6,982,227 - Cooney, III , et al. January 3, 2 | 2006-01-03 |
Control of liner thickness for improving thermal cycle reliability App 20050227380 - Filippi, Ronald Gene ;   et al. | 2005-10-13 |
Crackstop With Release Layer For Crack Control In Semiconductors App 20050208781 - Fitzsimmons, John A. ;   et al. | 2005-09-22 |
Method and structure for determining thermal cycle reliability App 20050186689 - Filippi, Ronald Gene ;   et al. | 2005-08-25 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices App 20050167838 - Edelstein, Daniel C. ;   et al. | 2005-08-04 |
Building metal pillars in a chip for structure support App 20050118803 - Hichri, Habib ;   et al. | 2005-06-02 |
Plasma Processing Material Reclamation And Reuse App 20050011442 - Chen, Bomy A. ;   et al. | 2005-01-20 |
Structure and method for reducing thermo-mechanical stress in stacked vias Grant 6,831,363 - Dalton , et al. December 14, 2 | 2004-12-14 |
Full Removal Of Dual Damascene Metal Level App 20040245636 - Cooney, Edward C III ;   et al. | 2004-12-09 |
Method for improving adhesion to copper Grant 6,821,890 - McGahay , et al. November 23, 2 | 2004-11-23 |
Single and multilevel rework App 20040142565 - Cooney, Edward C. III ;   et al. | 2004-07-22 |
Multi-functional structure for enhanced chip manufacturibility & reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor App 20040129938 - Landers, William F. ;   et al. | 2004-07-08 |
Structure and method for reducing thermo-mechanical stress in stacked vias App 20040113278 - Dalton, Timothy J. ;   et al. | 2004-06-17 |
Dual damascene flowable oxide insulation structure and metallic barrier Grant 6,727,589 - Greco , et al. April 27, 2 | 2004-04-27 |
Single and multilevel rework Grant 6,674,168 - Cooney, III , et al. January 6, 2 | 2004-01-06 |
Integrated, active, moisture and oxygen getter layers App 20030155655 - Fitzsimmons, John A. ;   et al. | 2003-08-21 |
High modulus film structure for enhanced electromigration resistance App 20020132471 - Engel, Brett H. ;   et al. | 2002-09-19 |
Method of forming an on-chip decoupling capacitor with bottom hardmask Grant 6,387,754 - Dalton , et al. May 14, 2 | 2002-05-14 |
Damascene etchback for low .epsilon. dielectric Grant 6,331,481 - Stamper , et al. December 18, 2 | 2001-12-18 |
Method of forming an on-chip decoupling capacitor with bottom hardmask App 20010036753 - Dalton, Timothy J. ;   et al. | 2001-11-01 |
Interim oxidation of silsesquioxane dielectric for dual damascene process App 20010036739 - Cook, Robert ;   et al. | 2001-11-01 |
Method for improving adhesion to copper App 20010023987 - Mcgahay, Vincent J. ;   et al. | 2001-09-27 |
Crackstop and oxygen barrier for low-K dielectric integrated circuits Grant 6,261,945 - Nye, III , et al. July 17, 2 | 2001-07-17 |
Dual damascene flowable oxide insulation structure and metallic barrier App 20010000115 - Greco, Stephen E. ;   et al. | 2001-04-05 |
Carbon-free hydrogen silsesquioxane with dielectric constant less than 3.2 annealed in hydrogen for integrated circuits Grant 5,530,293 - Cohen , et al. June 25, 1 | 1996-06-25 |