Patent | Date |
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Method to fabricate copper wiring structures and structures formed thereby Grant 9,343,407 - McFeely , et al. May 17, 2 | 2016-05-17 |
Method To Fabricate Copper Wiring Structures And Structures Formed Thereby App 20150194385 - McFeely; Fenton Read ;   et al. | 2015-07-09 |
Method to fabricate copper wiring structures and structures formed thereby Grant 9,048,296 - McFeely , et al. June 2, 2 | 2015-06-02 |
Techniques for forming narrow copper filled vias having improved conductivity Grant 8,661,664 - McFeely , et al. March 4, 2 | 2014-03-04 |
Method To Fabricate Copper Wiring Structures And Structures Formed Tehreby App 20120205804 - McFeely; Fenton Read ;   et al. | 2012-08-16 |
Method and Structure to Improve the Conductivity of Narrow Copper Filled Vias App 20120012372 - McFeely; Fenton Read ;   et al. | 2012-01-19 |
Low Temperature Plasma-Free Method for the Nitridation of Copper App 20110052797 - McFeely; Fenton Read ;   et al. | 2011-03-03 |
Multi-Step Method to Selectively Deposit Ruthenium Layers of Arbitrary Thickness on Copper App 20110045171 - McFeely; Fenton Read ;   et al. | 2011-02-24 |
Ultra thin, single phase, diffusion barrier for metal conductors Grant 7,172,968 - Cohen , et al. February 6, 2 | 2007-02-06 |
Constant emissivity deposition member Grant 7,037,834 - McFeely , et al. May 2, 2 | 2006-05-02 |
Method for electroplating on resistive substrates Grant 6,974,531 - Andricacos , et al. December 13, 2 | 2005-12-13 |
Tungsten encapsulated copper interconnections using electroplating App 20050269708 - Andricacos, Panayotis C. ;   et al. | 2005-12-08 |
Constant emissivity deposition member App 20050260833 - McFeely, Fenton Read ;   et al. | 2005-11-24 |
Method for electroplating on resistive substrates App 20050199502 - Andricacos, Panayotis ;   et al. | 2005-09-15 |
Structure comprising an interlayer of palladium and/or platinum and method for fabrication thereof Grant 6,911,229 - Andricacos , et al. June 28, 2 | 2005-06-28 |
Structure comprising an interlayer of palladium and/or platinum and method for fabrication thereof App 20050006777 - Andricacos, Panayotis C. ;   et al. | 2005-01-13 |
Process of forming copper structures Grant 6,812,143 - Lane , et al. November 2, 2 | 2004-11-02 |
Barrier material for copper structures Grant 6,787,912 - Lane , et al. September 7, 2 | 2004-09-07 |
Process of passivating a metal-gated complementary metal oxide semiconductor Grant 6,770,500 - Callegari , et al. August 3, 2 | 2004-08-03 |
CMOS-compatible metal-semiconductor-metal photodetector Grant 6,756,651 - Bozso , et al. June 29, 2 | 2004-06-29 |
Method for electroplating on resistive substrates App 20040069648 - Andricacos, Panayotis ;   et al. | 2004-04-15 |
Structure comprising an interlayer of palladium and/or platinum and method for fabrication thereof App 20040028882 - Andricacos, Panayotis C. ;   et al. | 2004-02-12 |
Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support Grant 6,660,330 - Locke , et al. December 9, 2 | 2003-12-09 |
Nitrogen-rich barrier layer and structures formed App 20030203653 - Buchanan, Douglas Andrew ;   et al. | 2003-10-30 |
Nitrogen-rich barrier layer and structures formed App 20030190821 - Buchanan, Douglas Andrew ;   et al. | 2003-10-09 |
Process of passivating a metal-gated complementary metal oxide semiconductor App 20030186518 - Callegari, Alessandro Cesare ;   et al. | 2003-10-02 |
Nitrogen-rich barrier layer and structures formed Grant 6,566,281 - Buchanan , et al. May 20, 2 | 2003-05-20 |
CMOS-compatible metal-semiconductor-metal photodetector App 20030057507 - Bozso, Ferenc M. ;   et al. | 2003-03-27 |
Ultra thin, single phase, diffusion barrier for metal conductors App 20020175418 - Cohen, Stephan Alan ;   et al. | 2002-11-28 |
Deformation-susceptible substrate holder for low-pressure MOCVD and process for use thereof App 20020146903 - Locke, Peter S. ;   et al. | 2002-10-10 |
Interfacial oxidation process for high-k gate dielectric process integration Grant 6,444,592 - Ballantine , et al. September 3, 2 | 2002-09-03 |
Tungsten encapsulated copper interconnections using electroplating App 20020092673 - Andricacos, Panayotis C. ;   et al. | 2002-07-18 |
Method for depositing copper onto a barrier layer Grant 6,416,812 - Andricacos , et al. July 9, 2 | 2002-07-09 |
Actively cooled dispenser system for improved resistivity and phase control in metal CVD from organometallic precursors App 20020086529 - McFeely, Fenton Read ;   et al. | 2002-07-04 |
Fabrication of mid-cap metal gates compatible with ultra-thin dielectrics Grant 6,091,122 - Buchanan , et al. July 18, 2 | 2000-07-18 |
Method of fabricating mid-gap metal gates compatible with ultra-thin dielectrics Grant 5,789,312 - Buchanan , et al. August 4, 1 | 1998-08-04 |