| Patent | Date |
|---|
Systems and methods for imaging using mechanical scanning mechanisms
Grant 11,374,041 - Pei , et al. June 28, 2 | 2022-06-28 |
Scanning lidar systems for three-dimensional sensing
Grant 11,300,684 - Pei , et al. April 12, 2 | 2022-04-12 |
Techniques For Detecting And Mitigating Interference Among Multiple Lidar Sensors
App 20220091236 - McCord; Mark A. | 2022-03-24 |
Techniques For Detecting Cross-talk Interferences In Lidar Imaging Sensors With Multiple Light Sources
App 20210405191 - Allen; Jon Day ; et al. | 2021-12-30 |
Techniques For Detecting Cross-talk Interferences In Lidar Imaging Sensors
App 20210405190 - Allen; Jon Day ; et al. | 2021-12-30 |
Scanning Lidar Systems With Scanning Fiber
App 20210382151 - McCord; Mark A. | 2021-12-09 |
Half And Quarter Lissajous Scan Patterns For Lidar
App 20210199778 - Liao; Dongyi ; et al. | 2021-07-01 |
Methods For Scanning A Lidar System In Two Dimensions
App 20210141065 - Pei; Jun ; et al. | 2021-05-13 |
Hydrodynamic human-powered propulsion mechanism
Grant 10,987,546 - McCord April 27, 2 | 2021-04-27 |
Calibration Of Lidar Sensors
App 20210109204 - Liao; Dongyi ; et al. | 2021-04-15 |
Dynamic Calibration Of Lidar Sensors
App 20210109205 - Liao; Dongyi ; et al. | 2021-04-15 |
Lidar system including a transceiver array
Grant 10,935,637 - Cullumber , et al. March 2, 2 | 2021-03-02 |
Apparatuses for scanning a lidar system in two dimensions
Grant 10,921,431 - Pei , et al. February 16, 2 | 2021-02-16 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
Grant 10,861,671 - Masnaghetti , et al. December 8, 2 | 2020-12-08 |
Systems And Methods For Light Projection
App 20200241399 - Wei; Wei ; et al. | 2020-07-30 |
Lidar System Including A Transceiver Array
App 20200241113 - Cullumber; Roger David ; et al. | 2020-07-30 |
Systems And Methods For Imaging Using Mechanical Scanning Mechanisms
App 20200243577 - Pei; Jun ; et al. | 2020-07-30 |
Hydrodynamic Human-Powered Propulsion Mechanism
App 20200108295 - McCord; Mark A. | 2020-04-09 |
Scanning Lidar Systems For Three-dimensional Sensing
App 20200096642 - Pei; Jun ; et al. | 2020-03-26 |
Scanning Lidar Systems With Moving Lens Assembly
App 20200018835 - Pei; Jun ; et al. | 2020-01-16 |
Multi-range three-dimensional imaging systems
Grant 10,481,266 - Pei , et al. Nov | 2019-11-19 |
Backscattered electrons (BSE) imaging using multi-beam tools
Grant 10,460,905 - McCord , et al. Oc | 2019-10-29 |
Systems For Incorporating Lidar Sensors In A Headlamp Module Of A Vehicle
App 20190257922 - McCord; Mark A. ; et al. | 2019-08-22 |
Method and system for noise mitigation in a multi-beam scanning electron microscopy system
Grant 10,366,862 - Masnaghetti , et al. July 30, 2 | 2019-07-30 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
Grant 10,325,753 - Masnaghetti , et al. | 2019-06-18 |
Method and System for Focus Adjustment of a Multi-Beam Scanning Electron Microscopy System
App 20190172675 - Masnaghetti; Doug K. ; et al. | 2019-06-06 |
Detector Designs For Improved Resolution In Lidar Systems
App 20190162858 - McCord; Mark A. ; et al. | 2019-05-30 |
Optical Designs Using Cylindrical Lenses For Improved Resolution In Lidar Systems
App 20190162857 - McCord; Mark A. ; et al. | 2019-05-30 |
Methods And Apparatuses For Scanning A Lidar System In Two Dimensions
App 20190120940 - Pei; Jun ; et al. | 2019-04-25 |
Multi-beam dark field imaging
Grant 10,192,716 - Masnaghetti , et al. Ja | 2019-01-29 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system
Grant 10186396 - | 2019-01-22 |
Virtual ground for target substrate using floodgun and feedback control
Grant 9,666,411 - McCord , et al. May 30, 2 | 2017-05-30 |
Backscattered Electrons (BSE) Imaging Using Multi-Beam Tools
App 20170084421 - McCord; Mark A. ; et al. | 2017-03-23 |
Method and System for Focus Adjustment of a Multi-Beam Scanning Electron Microscopy System
App 20170084424 - Masnaghetti; Doug K. ; et al. | 2017-03-23 |
Method and System for Noise Mitigation in a Multi-Beam Scanning Electron Microscopy System
App 20170084423 - Masnaghetti; Doug K. ; et al. | 2017-03-23 |
Multi-Beam Dark Field Imaging
App 20170084422 - Masnaghetti; Doug K. ; et al. | 2017-03-23 |
Alignment sensor and height sensor
Grant 9,366,524 - McCord , et al. June 14, 2 | 2016-06-14 |
Light collection optics for measuring flux and spectrum from light-emitting devices
Grant 9,347,824 - McCord , et al. May 24, 2 | 2016-05-24 |
Light Collection Optics for Measuring Flux and Spectrum from Light-Emitting Devices
App 20150124253 - McCord; Mark A. ; et al. | 2015-05-07 |
Alignment Sensor And Height Sensor
App 20150097126 - McCORD; Mark A. ; et al. | 2015-04-09 |
Compact high-voltage electron gun
Grant 8,957,394 - Brodie , et al. February 17, 2 | 2015-02-17 |
Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool
Grant 8,642,981 - Petric , et al. February 4, 2 | 2014-02-04 |
Suspended membrane calibration sample
Grant 8,614,427 - McCord , et al. December 24, 2 | 2013-12-24 |
Compact High-voltage Electron Gun
App 20130134324 - BRODIE; Alan D. ; et al. | 2013-05-30 |
Quasi-annular reflective electron patterning device
Grant 8,373,144 - McCord , et al. February 12, 2 | 2013-02-12 |
Well-based dynamic pattern generator
Grant 8,253,119 - Brodie , et al. August 28, 2 | 2012-08-28 |
Automated inspection using cell-cell subtraction perpendicular to stage motion direction
Grant 8,106,355 - Lauber , et al. January 31, 2 | 2012-01-31 |
Electron reflector with multiple reflective modes
Grant 8,089,051 - Grella , et al. January 3, 2 | 2012-01-03 |
Electron Reflector With Multiple Reflective Modes
App 20110204251 - GRELLA; Luca ; et al. | 2011-08-25 |
High-speed high-efficiency solid-state electron detector
Grant 7,714,300 - McCord , et al. May 11, 2 | 2010-05-11 |
Inspection system
Grant 7,710,556 - McCord May 4, 2 | 2010-05-04 |
Robust measurement of parameters
Grant 7,660,687 - De , et al. February 9, 2 | 2010-02-09 |
Electrical process monitoring using mirror-mode electron microscopy
Grant 7,514,681 - Marella , et al. April 7, 2 | 2009-04-07 |
Method for charging substrate to a potential
Grant 7,507,959 - Bertsche , et al. March 24, 2 | 2009-03-24 |
Accelerating electrostatic lens gun for high-speed electron beam inspection
Grant 7,465,922 - McCord December 16, 2 | 2008-12-16 |
Electronically-variable immersion electrostatic lens
Grant 7,446,320 - McCord , et al. November 4, 2 | 2008-11-04 |
High-speed electron beam inspection
Grant 7,315,022 - Adler , et al. January 1, 2 | 2008-01-01 |
Method for charging substrate to a potential
App 20070158589 - Bertsche; Kirk J. ; et al. | 2007-07-12 |
Portable scanning electron microscope
App 20070145267 - Adler; David L. ; et al. | 2007-06-28 |
Method for charging substrate to a potential
Grant 7,176,468 - Bertsche , et al. February 13, 2 | 2007-02-13 |
Method and apparatus for beam current fluctuation correction
Grant 7,091,486 - McCord , et al. August 15, 2 | 2006-08-15 |
Method for charging substrate to a potential
App 20060054815 - Bertsche; Kirk J. ; et al. | 2006-03-16 |
Apparatus and methods of controlling surface charge and focus
Grant 6,828,571 - McCord , et al. December 7, 2 | 2004-12-07 |
Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanisms
Grant 6,774,646 - Han , et al. August 10, 2 | 2004-08-10 |
In-situ probe for optimizing electron beam inspection and metrology based on surface potential
Grant 6,664,546 - McCord , et al. December 16, 2 | 2003-12-16 |
Simultaneous flooding and inspection for charge control in an electron beam inspection machine
Grant 6,627,884 - McCord , et al. September 30, 2 | 2003-09-30 |
Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample
Grant 6,586,736 - McCord July 1, 2 | 2003-07-01 |
Simultaneous flooding and inspection for charge control in an electron beam inspection machine
App 20020130260 - McCord, Mark A. ; et al. | 2002-09-19 |
Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals
Grant 6,064,486 - Chen , et al. May 16, 2 | 2000-05-16 |
X-ray mask containing a cantilevered tip for gap control and alignment
Grant 5,150,392 - Hohn , et al. September 22, 1 | 1992-09-22 |
Electrical probe incorporating scanning proximity microscope
Grant 4,992,728 - McCord , et al. February 12, 1 | 1991-02-12 |
Mechanical stage support for a scanning tunneling microscope
Grant 4,925,139 - McCord May 15, 1 | 1990-05-15 |
| 