McCafferty; Diane
Patent Applications and Registrations
Patent applications and USPTO patent grants for McCafferty; Diane.The latest application filed is for "fluid handling device, an immersion lithographic apparatus and a device manufacturing method".
- McCafferty; Diane - Sandy Hook CT US
- McCafferty; Diane - Sandyhook CT US
| Patent | Date |
|---|---|
| Immersion lithographic apparatus with immersion fluid re-circulating system Grant 8,629,970 - Sewell , et al. January 14, 2 | 2014-01-14 |
| Re-flow and buffer system for immersion lithography Grant 8,451,422 - Sewell , et al. May 28, 2 | 2013-05-28 |
| Fluid Handling Device, An Immersion Lithographic Apparatus And A Device Manufacturing Method App 20100214544 - Sewell; Harry ; et al. | 2010-08-26 |
| Lithographic apparatus and device manufacturing method Grant 7,684,014 - Sewell , et al. March 23, 2 | 2010-03-23 |
| Re-flow And Buffer System For Immersion Lithography App 20090213343 - Sewell; Harry ; et al. | 2009-08-27 |
| Immersion Lithographic Apparatus With Immersion Fluid Re-circulating System App 20090185149 - SEWELL; Harry ; et al. | 2009-07-23 |
| Systems and methods for thermally-induced aberration correction in immersion lithography App 20080137044 - Sewell; Harry ; et al. | 2008-06-12 |
| Lithographic apparatus and device manufacturing method App 20080129973 - McCafferty; Diane ; et al. | 2008-06-05 |
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