Patent | Date |
---|
Method and apparatus for self-referenced wafer stage positional error mapping Grant 7,871,002 - Smith , et al. January 18, 2 | 2011-01-18 |
Method and apparatus for registration with integral alignment optics Grant 7,337,552 - Smith , et al. March 4, 2 | 2008-03-04 |
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion Grant 7,268,360 - Smith , et al. September 11, 2 | 2007-09-11 |
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion Grant 7,136,144 - Smith , et al. November 14, 2 | 2006-11-14 |
Method and apparatus for self-referenced wafer stage positional error mapping App 20060209276 - Smith; Adlai H. ;   et al. | 2006-09-21 |
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion App 20060109438 - Smith; Adlai H. ;   et al. | 2006-05-25 |
Method and apparatus for registration with integral alignment optics App 20060042106 - Smith; Adlai H. ;   et al. | 2006-03-02 |
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion App 20060007431 - Smith; Adlai H. ;   et al. | 2006-01-12 |
In-situ source metrology instrument and method of use Grant 6,741,338 - McArthur , et al. May 25, 2 | 2004-05-25 |
In-situ source metrology instrument and method of use App 20030007143 - McArthur, Bruce B. ;   et al. | 2003-01-09 |
In-situ source metrology instrument and method of use Grant 6,356,345 - McArthur , et al. March 12, 2 | 2002-03-12 |
Apparatus and process for nozzle production utilizing computer generated holograms Grant 6,130,009 - Smith , et al. October 10, 2 | 2000-10-10 |
Apparatus method of measurement and method of data analysis for correction of optical system Grant 5,978,085 - Smith , et al. November 2, 1 | 1999-11-02 |
Apparatus, method of measurement, and method of data analysis for correction of optical system Grant 5,828,455 - Smith , et al. October 27, 1 | 1998-10-27 |
Plate correction technique for imaging systems Grant 5,640,233 - McArthur , et al. June 17, 1 | 1997-06-17 |
Gray level imaging masks and methods for encoding same Grant 5,538,817 - Smith , et al. July 23, 1 | 1996-07-23 |
Laser ablation control system and method Grant 5,523,543 - Hunter, Jr. , et al. June 4, 1 | 1996-06-04 |
Direct etch processes for the manufacture of high density multichip modules Grant 5,509,553 - Hunter, Jr. , et al. April 23, 1 | 1996-04-23 |
High power masks and methods for manufacturing same Grant 5,501,925 - Smith , et al. March 26, 1 | 1996-03-26 |
Apparatus and process for using Fresnel zone plate array for processing materials Grant 5,481,407 - Smith , et al. January 2, 1 | 1996-01-02 |
Plate correction of imaging systems Grant 5,392,119 - McArthur , et al. February 21, 1 | 1995-02-21 |
Apparatus and process for the production of fine line metal traces Grant 5,364,493 - Hunter, Jr. , et al. November 15, 1 | 1994-11-15 |