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Patent applications and USPTO patent grants for Mays; Brad.The latest application filed is for "method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system".
Patent | Date |
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Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system Grant 6,898,065 - Mays , et al. May 24, 2 | 2005-05-24 |
Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system App 20040016405 - Mays, Brad ;   et al. | 2004-01-29 |
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe Grant 6,575,622 - Norrbakhsh , et al. June 10, 2 | 2003-06-10 |
Electrostatic chuck with dielectric coating App 20030010292 - Kholodenko, Arnold V. ;   et al. | 2003-01-16 |
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe App 20020048311 - Norrbakhsh, Hamid ;   et al. | 2002-04-25 |
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