Mayama; Takehiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mayama; Takehiko.The latest application filed is for "vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method".

Company Profile

0.8.8

Mayama; Takehiko - Utsunomiya JP
Mayama; Takehiko - Utsunomiya-shi JP
Mayama; Takehiko - Tochigi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method Grant 7,686,144 - Shibayama , et al. March 30, 2	2010-03-30
Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatus, and Device Manufacturing Method App 20100004869 - Shibayama; Takashi ; et al.	2010-01-07
Vibration Suppression Apparatus, Exposure Apparatus, And Method Of Manufacturing Device App 20090224444 - Mayama; Takehiko ; et al.	2009-09-10
Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20080246201 - Shibayama; Takashi ; et al.	2008-10-09
Exposure Apparatus And Method Of Manufacturing Device App 20080218720 - Mayama; Takehiko	2008-09-11
Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus Grant 7,275,627 - Mayama October 2, 2	2007-10-02
Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method Grant 7,072,777 - Wakui , et al. July 4, 2	2006-07-04
Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus Grant 7,063,192 - Mayama June 20, 2	2006-06-20
Exposure apparatus and semiconductor device manufacturing method App 20060017908 - Mayama; Takehiko	2006-01-26
Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus App 20020104950 - Mayama, Takehiko	2002-08-08
Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method Grant 6,322,060 - Mayama , et al. November 27, 2	2001-11-27
Anti-vibration Apparatus, Exposure Apparatus Using The Same, Device Manufacturing Method, And Anti-vibration Method App 20010040324 - MAYAMA, TAKEHIKO ; et al.	2001-11-15
Oscillation isolator App 20010024403 - Mayama, Takehiko	2001-09-27
Anti-vibration apparatus and method Grant 6,128,552 - Iwai , et al. October 3, 2	2000-10-03
Active anti-vibration apparatus Grant 6,021,991 - Mayama , et al. February 8, 2	2000-02-08
Anti-vibration system Grant 5,812,958 - Mayama September 22, 1	1998-09-22

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