Mattson Technology, Inc. Beijing E-Town Semiconductor Technology, Co., LTD

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mattson Technology, Inc. Beijing E-Town Semiconductor Technology, Co., LTD.The latest application filed is for "gas supply with angled injectors in plasma processing apparatus".

Company Profile

0.0.15

Mattson Technology, Inc. Beijing E-Town Semiconductor Technology, Co., LTD - Fremont Beijing CA US CN
Mattson Technology, Inc. Beijing E-Town Semiconductor Technology, Co., LTD. - Fremont Beijing CA US CN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Gas Supply With Angled Injectors In Plasma Processing Apparatus App 20200258718 - A1	2020-08-13
Post Plasma Gas Injection In A Separation Grid App 20200243305 - Zeng; Weimin ; et al.	2020-07-30
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process App 20200234983 - Yang; Michael X. ; et al.	2020-07-23
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon App 20200234969 - Wang; Shanyu ; et al.	2020-07-23
Strip Process for High Aspect Ratio Structure App 20200218158 - Vaniapura; Vijay M. ; et al.	2020-07-09
Surface Smoothing of Workpieces App 20200203173 - Zhang; Qi ; et al.	2020-06-25
Silicon Mandrel Etch After Native Oxide Punch-through App 20200203182 - Yan; Chun ; et al.	2020-06-25
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process App 20200203175 - Ma; Shawming	2020-06-25
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas App 20200194277 - Dai; Fen ; et al.	2020-06-18
Integration Of Materials Removal And Surface Treatment In Semiconductor Device Fabrication App 20200185216 - Yang; Michael X. ; et al.	2020-06-11
Systems and Methods for Workpiece Processing App 20200176288 - Yang; Michael ; et al.	2020-06-04
Systems And Methods For Workpiece Processing App 20200161162 - Yang; Michael X. ; et al.	2020-05-21
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry App 20200161094 - Zhang; Qi ; et al.	2020-05-21
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask App 20200135554 - Hou; Li ; et al.	2020-04-30
Ozone for Selective Hydrophilic Surface Treatment App 20200118813 - Xie; Ting ; et al.	2020-04-16

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.