Mattson; Brad S.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mattson; Brad S..The latest application filed is for "system and method for thermal processing of a semiconductor substrate".
- Mattson; Brad S. - Los Gatos CA
| Patent | Date |
|---|---|
| Inductive plasma reactor Grant 6,551,447 - Savas , et al. April 22, 2 | 2003-04-22 |
| System and method for thermal processing of a semiconductor substrate Grant 6,403,925 - Johnsgard , et al. June 11, 2 | 2002-06-11 |
| System and method for thermal processing of a semiconductor substrate Grant 6,399,921 - Johnsgard , et al. June 4, 2 | 2002-06-04 |
| System And Method For Thermal Processing Of A Semiconductor Substrate App 20020047004 - Johnsgard, Kristian E. ; et al. | 2002-04-25 |
| Method and apparatus for thermal processing of semiconductor substrates Grant 6,355,909 - Griffiths , et al. March 12, 2 | 2002-03-12 |
| Apparatus and method for thermal processing of semiconductor substrates Grant 6,342,691 - Johnsgard , et al. January 29, 2 | 2002-01-29 |
| System and method for thermal processing of a semiconductor substrate Grant 6,172,337 - Johnsgard , et al. January 9, 2 | 2001-01-09 |
| Inductive plasma reactor Grant 6,143,129 - Savas , et al. November 7, 2 | 2000-11-07 |
| Method and apparatus for thermal processing of semiconductor substrates Grant 6,133,550 - Griffiths , et al. October 17, 2 | 2000-10-17 |
| System and method for thermal processing of a semiconductor substrate Grant 6,046,439 - Johnsgard , et al. April 4, 2 | 2000-04-04 |
| System and method for thermal processing of a semiconductor substrate Grant 6,002,109 - Johnsgard , et al. December 14, 1 | 1999-12-14 |
| Inductive plasma reactor Grant 5,811,022 - Savas , et al. September 22, 1 | 1998-09-22 |
| Plasma contamination removal process Grant 5,198,634 - Mattson , et al. March 30, 1 | 1993-03-30 |
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