Matthews; Robert T.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Matthews; Robert T..The latest application filed is for "structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber".
- Matthews; Robert T. - Plano TX
| Patent | Date |
|---|---|
| Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber Grant 5,580,385 - Paranjpe , et al. December 3, 1 | 1996-12-03 |
| Multi-electrode plasma processing apparatus Grant 5,464,499 - Moslehi , et al. * November 7, 1 | 1995-11-07 |
| Programmable multizone gas injector for single-wafer semiconductor processing equipment Grant 5,453,124 - Moslehi , et al. September 26, 1 | 1995-09-26 |
| High performance multi-zone illuminator module for semiconductor wafer processing Grant 5,446,825 - Moslehi , et al. August 29, 1 | 1995-08-29 |
| Semiconductor wafer heater with infrared lamp module with light blocking means Grant 5,345,534 - Najm , et al. September 6, 1 | 1994-09-06 |
| Multi-electrode plasma processing apparatus Grant 5,286,297 - Moslehi , et al. February 15, 1 | 1994-02-15 |
| Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation Grant 5,248,636 - Davis , et al. September 28, 1 | 1993-09-28 |
| Wafer processing apparatus having independently controllable energy sources Grant 5,138,973 - Davis , et al. August 18, 1 | 1992-08-18 |
| Processing apparatus and method Grant 4,949,671 - Davis , et al. August 21, 1 | 1990-08-21 |
| Processing apparatus and method Grant 4,911,103 - Davis , et al. March 27, 1 | 1990-03-27 |
| Processing apparatus and method Grant 4,886,570 - Davis , et al. December 12, 1 | 1989-12-12 |
| Wafer processing apparatus Grant 4,875,989 - Davis , et al. October 24, 1 | 1989-10-24 |
| Processing apparatus Grant 4,872,938 - Davis , et al. October 10, 1 | 1989-10-10 |
| Wafer processing apparatus and method Grant 4,842,686 - Davis , et al. June 27, 1 | 1989-06-27 |
| Processing apparatus Grant 4,836,905 - Davis , et al. June 6, 1 | 1989-06-06 |
| Processing apparatus Grant 4,832,779 - Fisher , et al. May 23, 1 | 1989-05-23 |
| Processing apparatus and method Grant 4,832,777 - Davis , et al. May 23, 1 | 1989-05-23 |
| Processing apparatus and method Grant 4,830,700 - Davis , et al. May 16, 1 | 1989-05-16 |
| Processing apparatus and method Grant 4,822,450 - Davis , et al. April 18, 1 | 1989-04-18 |
| Method for cleanup processing chamber and vacuum process module Grant 4,820,377 - Davis , et al. April 11, 1 | 1989-04-11 |
| Wafer processing apparatus Grant 4,818,327 - Davis , et al. April 4, 1 | 1989-04-04 |
| Apparatus for transferring workpieces Grant 4,816,098 - Davis , et al. March 28, 1 | 1989-03-28 |
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