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Compound and method of producing same, acid generator, resist composition, and method of forming resist pattern Grant 8,252,505 - Kawaue , et al. August 28, 2 | 2012-08-28 |
Resist composition, method of forming resist pattern, and novel compound and acid generator Grant 8,247,160 - Utsumi , et al. August 21, 2 | 2012-08-21 |
Positive resist composition and method of forming resist pattern Grant 8,211,616 - Shimizu , et al. July 3, 2 | 2012-07-03 |
Novel Compound And Method Of Producing The Same, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20120164580 - Hada; Hideo ;   et al. | 2012-06-28 |
Resist composition, method of forming resist pattern, compound and acid generator Grant 8,206,890 - Kawaue , et al. June 26, 2 | 2012-06-26 |
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Novel Compound And Method Of Producing Same, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern App 20090208871 - Kawaue; Akiya ;   et al. | 2009-08-20 |
Novel Compound And Method Of Producing The Same, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20090162788 - Hada; Hideo ;   et al. | 2009-06-25 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound And Method Of Producing The Same, And Acid Generator App 20090068591 - Kawaue; Akiya ;   et al. | 2009-03-12 |
Resist composition, method of forming resist pattern, compound and acid generator Grant 7,488,568 - Iwai , et al. February 10, 2 | 2009-02-10 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator App 20080248422 - Iwai; Takeshi ;   et al. | 2008-10-09 |