loadpatents
Patent applications and USPTO patent grants for Matsuyama; Yuji.The latest application filed is for "light source device".
Patent | Date |
---|---|
Light source device Grant 10,215,996 - Matsuyama , et al. Feb | 2019-02-26 |
Light Source Device App 20170211776 - MATSUYAMA; Yuji ;   et al. | 2017-07-27 |
Information processing apparatus, information processing method, and program Grant 9,420,615 - Matsuyama , et al. August 16, 2 | 2016-08-16 |
Information Processing Apparatus, Information Processing Method, And Program App 20150245391 - MATSUYAMA; Yuji ;   et al. | 2015-08-27 |
Apparatus, method and program for processing information Grant 8,768,684 - Mitsuzawa , et al. July 1, 2 | 2014-07-01 |
Projection display device Grant 8,641,202 - Okada , et al. February 4, 2 | 2014-02-04 |
Lcd Projector App 20120113334 - Minami; Kazuya ;   et al. | 2012-05-10 |
Information Processing Apparatus, Information Processing Method, And Program App 20110209217 - MIYAMA; Seiji ;   et al. | 2011-08-25 |
Apparatus, method and program for processing information App 20100299130 - Mitsuzawa; Atsushi ;   et al. | 2010-11-25 |
Nitride semiconductor laser device Grant 7,813,397 - Matsuyama , et al. October 12, 2 | 2010-10-12 |
Projection Display Device App 20100053568 - Okada; Hisashi ;   et al. | 2010-03-04 |
Method and apparatus for heat processing of substrate Grant 7,517,217 - Deguchi , et al. April 14, 2 | 2009-04-14 |
Nitride Semiconductor Laser Device And Nitride Semiconductor Device App 20080192788 - MATSUYAMA; Yuji ;   et al. | 2008-08-14 |
Nitride semiconductor laser device and nitride semiconductor device Grant 7,408,199 - Matsuyama , et al. August 5, 2 | 2008-08-05 |
Substrate Processing Apparatus And Substrate Processing Method App 20070127916 - Kitano; Junichi ;   et al. | 2007-06-07 |
Substrate Processing Apparatus And Substrate Processing Method App 20070128356 - Matsuyama; Yuji ;   et al. | 2007-06-07 |
Substrate processing apparatus and substrate processing method Grant 7,208,066 - Kitano , et al. April 24, 2 | 2007-04-24 |
Substrate coating unit and substrate coating method App 20060127575 - Matsuyama; Yuji | 2006-06-15 |
Semiconductor laser apparatus App 20060088072 - Hayakawa; Toshiro ;   et al. | 2006-04-27 |
Substrate coating unit and substrate coating method Grant 7,022,190 - Matsuyama April 4, 2 | 2006-04-04 |
Method and apparatus for heat processing of substrate App 20060005420 - Deguchi; Masatoshi ;   et al. | 2006-01-12 |
Heat treatment method, heat treatment apparatus and treatment system Grant 6,979,474 - Matsuyama , et al. December 27, 2 | 2005-12-27 |
Method for heat processing of substrate Grant 6,969,538 - Deguchi , et al. November 29, 2 | 2005-11-29 |
Nitride semiconductor laser device and nitride semiconductor device App 20050224783 - Matsuyama, Yuji ;   et al. | 2005-10-13 |
Method and system for coating and developing Grant 6,884,298 - Kitano , et al. April 26, 2 | 2005-04-26 |
Method and system for coating and developing Grant 6,875,281 - Kitano , et al. April 5, 2 | 2005-04-05 |
Method and system for coating and developing App 20050048421 - Kitano, Junichi ;   et al. | 2005-03-03 |
Substrate processing apparatus and substrate processing method App 20040050321 - Kitano, Junichi ;   et al. | 2004-03-18 |
Substrate processing apparatus and substrate processing method Grant 6,672,779 - Ueda , et al. January 6, 2 | 2004-01-06 |
Substrate treatment system, substrate transfer system, and substrate transfer method Grant 6,655,891 - Ueda , et al. December 2, 2 | 2003-12-02 |
Substrate processing apparatus and substrate processing method App 20030205196 - Kitano, Takahiro ;   et al. | 2003-11-06 |
Substrate processing apparatus and substrate processing method Grant 6,632,281 - Kitano , et al. October 14, 2 | 2003-10-14 |
Substrate processing apparatus and substrate processing method Grant 6,633,022 - Kitano , et al. October 14, 2 | 2003-10-14 |
Coating apparatus and mixing apparatus Grant 6,620,248 - Kitano , et al. September 16, 2 | 2003-09-16 |
Solution processing apparatus Grant 6,602,382 - Matsuyama , et al. August 5, 2 | 2003-08-05 |
System and method for coating and developing Grant 6,585,430 - Matsuyama , et al. July 1, 2 | 2003-07-01 |
Method and system for coating and developing App 20030119333 - Kitano, Junichi ;   et al. | 2003-06-26 |
Method and system for coating and developing App 20030079687 - Kitano, Junichi ;   et al. | 2003-05-01 |
Solution processing apparatus and method Grant 6,533,864 - Matsuyama , et al. March 18, 2 | 2003-03-18 |
Method and system for coating and developing Grant 6,518,199 - Kitano , et al. February 11, 2 | 2003-02-11 |
Solution processing apparatus and method Grant 6,514,570 - Matsuyama , et al. February 4, 2 | 2003-02-04 |
Substrate processing apparatus and substrate processing method App 20030012575 - Ueda, Issei ;   et al. | 2003-01-16 |
Substrate coating unit and substrate coating method App 20020176936 - Matsuyama, Yuji | 2002-11-28 |
Resist pattern forming method and film forming method Grant 6,485,893 - Matsuyama November 26, 2 | 2002-11-26 |
Substrate processing apparatus and substrate processing method Grant 6,471,422 - Ueda , et al. October 29, 2 | 2002-10-29 |
Coating and developing system Grant 6,467,976 - Matsuyama , et al. October 22, 2 | 2002-10-22 |
Method and system for coating and developing App 20020127340 - Kitano, Junichi ;   et al. | 2002-09-12 |
Coating And Developing System App 20020127879 - Matsuyama, Yuji ;   et al. | 2002-09-12 |
Substrate processing apparatus and substrate processing method App 20020118973 - Ueda, Issei ;   et al. | 2002-08-29 |
Substrate treatment system, substrate transfer system, and substrate transfer method App 20020106268 - Ueda, Issei ;   et al. | 2002-08-08 |
Substrate treatment system, substrate transfer system, and substrate transfer method Grant 6,425,722 - Ueda , et al. July 30, 2 | 2002-07-30 |
Solution processing apparatus Grant 6,364,547 - Matsuyama , et al. April 2, 2 | 2002-04-02 |
Method and apparatus for heat processing of substrate App 20020034714 - Deguchi, Masatoshi ;   et al. | 2002-03-21 |
Method and system for coating and developing App 20020006737 - Kitano, Junichi ;   et al. | 2002-01-17 |
Coating apparatus and mixing apparatus App 20020000193 - Kitano, Takahiro ;   et al. | 2002-01-03 |
System and method for coating and developing App 20020001679 - Matsuyama, Yuji ;   et al. | 2002-01-03 |
Substrate processing apparatus and method Grant 6,332,723 - Matsuyama , et al. December 25, 2 | 2001-12-25 |
Developing apparatus and method thereof Grant 6,312,171 - Matsuyama , et al. November 6, 2 | 2001-11-06 |
Film forming method and film forming apparatus App 20010033895 - Minami, Tomohide ;   et al. | 2001-10-25 |
Heat treatment method, heat treatment apparatus and treatment system App 20010029890 - Matsuyama, Yuji ;   et al. | 2001-10-18 |
Substrate processing apparatus and substrate processing method App 20010025431 - Kitano, Takahiro ;   et al. | 2001-10-04 |
Substrate process apparatus Grant 6,292,250 - Matsuyama September 18, 2 | 2001-09-18 |
Substrate processing apparatus Grant 6,287,025 - Matsuyama September 11, 2 | 2001-09-11 |
Substrate processing apparatus and substrate processing method App 20010013161 - Kitano, Junichi ;   et al. | 2001-08-16 |
Developing method and developing unit App 20010009452 - Matsuyama, Yuji ;   et al. | 2001-07-26 |
Heat treatment method, heat treatment apparatus and treatment system Grant 6,261,365 - Matsuyama , et al. July 17, 2 | 2001-07-17 |
Heat processing method and apparatus Grant 6,246,030 - Matsuyama June 12, 2 | 2001-06-12 |
Substrate treatment system, substrate transfer system, and substrate transfer method Grant 6,074,154 - Ueda , et al. June 13, 2 | 2000-06-13 |
Liquid supplying device Grant 6,015,066 - Kimura , et al. January 18, 2 | 2000-01-18 |
Processing liquid supply unit Grant 5,035,200 - Moriyama , et al. July 30, 1 | 1991-07-30 |
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