| Patent | Date |
|---|
Method and apparatus for measuring photoelectric conversion device, and process and apparatus for producing photoelectric conversion device
Grant 6,946,858 - Matsuyama September 20, 2 | 2005-09-20 |
Method and apparatus for measuring photoelectric conversion characteristics
Grant 6,876,187 - Matsuyama April 5, 2 | 2005-04-05 |
Method and apparatus for measuring photoelectric conversion characteristics of solar cell element
App 20040261832 - Haga, Shunichi ; et al. | 2004-12-30 |
Method and apparatus for measuring photoelectric conversion device, and process and apparatus for producing photoelectric conversion device
App 20040056648 - Matsuyama, Jinsho | 2004-03-25 |
Method of producing a microcrystal semiconductor thin film
Grant 6,383,576 - Matsuyama May 7, 2 | 2002-05-07 |
Method and apparatus for measuring photoelectric conversion characteristics of photoelectric conversion device
App 20020030153 - Matsuyama, Jinsho | 2002-03-14 |
Method and apparatus for measuring photoelectric conversion characteristics
App 20020014886 - Matsuyama, Jinsho | 2002-02-07 |
Photovoltaic cell and method for manufacturing the same
Grant 6,331,672 - Matsuda , et al. December 18, 2 | 2001-12-18 |
Multi-junction photovoltaic device with microcrystalline I-layer
Grant 6,166,319 - Matsuyama December 26, 2 | 2000-12-26 |
Photovoltaic element having a specific doped layer
Grant 5,913,986 - Matsuyama June 22, 1 | 1999-06-22 |
Method for forming crystal and crystal article obtained by said method
Grant 5,846,320 - Matsuyama , et al. December 8, 1 | 1998-12-08 |
Photovoltaic element and fabrication process thereof
Grant 5,720,826 - Hayashi , et al. February 24, 1 | 1998-02-24 |
Process for continuously forming a large area functional deposited film by a microwave PCVD method and an apparatus suitable for practicing the same
Grant 5,714,010 - Matsuyama , et al. February 3, 1 | 1998-02-03 |
Photovoltaic conversion device and method for producing same
Grant 5,656,098 - Ishikawa , et al. August 12, 1 | 1997-08-12 |
Method for forming a deposited film
Grant 5,593,497 - Matsuyama , et al. January 14, 1 | 1997-01-14 |
Process for forming and etching a film to effect specific crystal growth from activated species
Grant 5,591,492 - Hirai , et al. January 7, 1 | 1997-01-07 |
Deposited film forming apparatus
Grant 5,527,396 - Saitoh , et al. June 18, 1 | 1996-06-18 |
Method and apparatus for continuously forming functional deposited films with a large area by a microwave plasma CVD method
Grant 5,527,391 - Echizen , et al. June 18, 1 | 1996-06-18 |
Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space
Grant 5,510,151 - Matsuyama , et al. April 23, 1 | 1996-04-23 |
Photovoltaic device, method of producing the same and generating system using the same
Grant 5,439,533 - Saito , et al. August 8, 1 | 1995-08-08 |
Photovoltaic conversion device
Grant 5,421,909 - Ishikawa , et al. June 6, 1 | 1995-06-06 |
Photovoltaic device and a forming method thereof
Grant 5,417,770 - Saitoh , et al. May 23, 1 | 1995-05-23 |
Apparatus for continuously forming a large area functional deposit film including microwave transmissive member transfer mean
Grant 5,296,036 - Matsuyama , et al. March 22, 1 | 1994-03-22 |
Solar cell provided with a light reflection layer
Grant 5,282,902 - Matsuyama February 1, 1 | 1994-02-01 |
Photovoltaic device with layer region containing germanium therin
Grant 5,279,681 - Matsuda , et al. January 18, 1 | 1994-01-18 |
Integrated type solar battery
Grant 5,259,891 - Matsuyama , et al. November 9, 1 | 1993-11-09 |
Pin junction photovoltaic element having an I-type semiconductor layer with a plurality of regions having different graded band gaps
Grant 5,252,142 - Matsuyama , et al. October 12, 1 | 1993-10-12 |
Microwave PCVD method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation
Grant 5,130,170 - Kanai , et al. July 14, 1 | 1992-07-14 |
Method for continuously forming functional deposited films with a large area by a microwave plasma CVD method
Grant 5,114,770 - Echizen , et al. May 19, 1 | 1992-05-19 |
Microwave plasma CVD apparatus for the formation of a large-area functional deposited film
Grant 4,995,341 - Matsuyama February 26, 1 | 1991-02-26 |
Method for forming deposited film
Grant 4,873,125 - Matsuyama , et al. October 10, 1 | 1989-10-10 |
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