| Patent | Date |
|---|
Semiconductor device and manufacturing method thereof
Grant 9,991,162 - Matsuura June 5, 2 | 2018-06-05 |
Semiconductor Device And Manufacturing Method Thereof
App 20170294352 - MATSUURA; Masazumi | 2017-10-12 |
Semiconductor device and manufacturing method thereof
Grant 9,721,873 - Matsuura August 1, 2 | 2017-08-01 |
Semiconductor chip with seal ring and sacrificial corner pattern
Grant 9,368,459 - Furusawa , et al. June 14, 2 | 2016-06-14 |
Method of manufacturing a semiconductor device
Grant 9,245,800 - Matsuura January 26, 2 | 2016-01-26 |
Method Of Manufacturing A Semiconductor Device
App 20150311116 - MATSUURA; Masazumi | 2015-10-29 |
Semiconductor device and method of manufacturing the same
Grant 9,035,460 - Matsuura May 19, 2 | 2015-05-19 |
Semiconductor Chip With Seal Ring And Sacrificial Corner Pattern
App 20150108613 - FURUSAWA; Takeshi ; et al. | 2015-04-23 |
Semiconductor chip with seal ring and sacrificial corner pattern
Grant 8,963,291 - Furusawa , et al. February 24, 2 | 2015-02-24 |
Semiconductor Device And Manufacturing Method Thereof
App 20140138848 - MATSUURA; Masazumi | 2014-05-22 |
Semiconductor Device And Method Of Manufacturing The Same
App 20130140709 - MATSUURA; Masazumi | 2013-06-06 |
Semiconductor chip with seal ring and sacrificial corner pattern
Grant 8,018,030 - Furusawa , et al. September 13, 2 | 2011-09-13 |
Semiconductor Chip With Seal Ring And Sacrificial Corner Pattern
App 20110215447 - Furusawa; Takeshi ; et al. | 2011-09-08 |
Semiconductor device and method of fabricating the same
Grant 7,981,790 - Kumada , et al. July 19, 2 | 2011-07-19 |
Semiconductor device and manufacturing method therefor
Grant 7,960,279 - Furusawa , et al. June 14, 2 | 2011-06-14 |
Semiconductor Device And Method Of Fabricating The Same
App 20100112805 - Kumada; Teruhiko ; et al. | 2010-05-06 |
Semiconductor device and method of fabricating the same
Grant 7,671,473 - Kumada , et al. March 2, 2 | 2010-03-02 |
Semiconductor Device And Manufacturing Method Therefor
App 20090263963 - FURUSAWA; Takeshi ; et al. | 2009-10-22 |
Semiconductor device with seal ring
Grant 7,605,448 - Furusawa , et al. October 20, 2 | 2009-10-20 |
Semiconductor device and manufacturing method therefor
Grant 7,602,063 - Furusawa , et al. October 13, 2 | 2009-10-13 |
Semiconductor Device With Seal Ring
App 20090189245 - FURUSAWA; Takeshi ; et al. | 2009-07-30 |
Manufacturing method of semiconductor device and semiconductor device
App 20080093709 - Matsuura; Masazumi ; et al. | 2008-04-24 |
Semiconductor device and method of manufacturing the same
App 20070145583 - Matsuura; Masazumi ; et al. | 2007-06-28 |
Semiconductor Device
App 20070114668 - Goto; Kinya ; et al. | 2007-05-24 |
Method for fabricating a dual damascene contact in an insulating film having density gradually varying in the thickness direction
Grant 7,208,408 - Yuasa , et al. April 24, 2 | 2007-04-24 |
Semiconductor device which employs an interlayer insulating film of a low mechanical strength and a highly reliable metal pad, and a method of manufacturing the same
Grant 7,202,565 - Matsuura , et al. April 10, 2 | 2007-04-10 |
Semiconductor device including sealing ring
App 20060103025 - Furusawa; Takeshi ; et al. | 2006-05-18 |
Semiconductor device
App 20060055005 - Furusawa; Takeshi ; et al. | 2006-03-16 |
Semiconductor device and manufacturing method therefor
App 20060006530 - Furusawa; Takeshi ; et al. | 2006-01-12 |
Electronic device and method for fabricating the same
App 20050263857 - Yuasa, Hiroshi ; et al. | 2005-12-01 |
Electronic device includes an insulating film having density or carbon concentration varying gradually in the direction of the thickness and a conductive film formed therein
Grant 6,930,394 - Yuasa , et al. August 16, 2 | 2005-08-16 |
Method of forming dielectric film and dielectric film
Grant 6,903,027 - Matsuura June 7, 2 | 2005-06-07 |
Semiconductor device and method of manufacturing the same
App 20050054188 - Matsuura, Masazumi ; et al. | 2005-03-10 |
Method of manufacturing semiconductor device and semiconductor device
Grant 6,737,319 - Morimoto , et al. May 18, 2 | 2004-05-18 |
Semiconductor device containing copper diffusion preventive film of silicon carbide
Grant 6,737,746 - Matsuura May 18, 2 | 2004-05-18 |
Electronic device and method for fabricating the same
App 20040089924 - Yuasa, Hiroshi ; et al. | 2004-05-13 |
Semiconductor device and method of manufacturing the same
App 20030089988 - Matsuura, Masazumi | 2003-05-15 |
Method of manufacturing semiconductor device and semiconductor device
App 20030068880 - Morimoto, Noboru ; et al. | 2003-04-10 |
Semiconductor device and method of fabricating the semiconductor device
App 20030015798 - Haruhana, Hideyo ; et al. | 2003-01-23 |
Method of forming dielectric film and dielectric film
App 20020182891 - Matsuura, Masazumi | 2002-12-05 |
Method of forming dielectric film and dielectric film
App 20020090833 - Matsuura, Masazumi | 2002-07-11 |
Semiconductor device and method of manufacturing the same
App 20010021557 - Matsuura, Masazumi ; et al. | 2001-09-13 |
Semiconductor device organic insulator film
Grant 6,124,641 - Matsuura September 26, 2 | 2000-09-26 |
Method of making a semiconductor device
Grant 5,926,732 - Matsuura July 20, 1 | 1999-07-20 |
Semiconductor device and manufacturing process thereof
Grant 5,811,849 - Matsuura September 22, 1 | 1998-09-22 |
Semiconductor device comprising an SiOF insulative film
Grant 5,703,404 - Matsuura December 30, 1 | 1997-12-30 |
Semiconductor device and method of fabricating the same
Grant 5,598,027 - Matsuura January 28, 1 | 1997-01-28 |
Method of manufacturing a semiconductor device having multilayer insulating films
Grant 5,459,105 - Matsuura October 17, 1 | 1995-10-17 |
Semiconductor device having an interlayer insulating film of high crack resistance
Grant 5,319,247 - Matsuura June 7, 1 | 1994-06-07 |
Method of manufacturing semiconductor device including interlaying insulating film
Grant 5,250,468 - Matsuura , et al. October 5, 1 | 1993-10-05 |
Semiconductor device including nitride layer
Grant 5,177,588 - Ii , et al. January 5, 1 | 1993-01-05 |
Semiconductor device including interlayer insulating film
Grant 5,132,774 - Matsuura , et al. July 21, 1 | 1992-07-21 |
Ozone generating method
Grant 5,047,127 - Tottori , et al. September 10, 1 | 1991-09-10 |
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