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Manufacture Method For Semiconductor Device Capable Of Preventing Reduction Of Ferroelectric Film App 20100068829 - Matsuura; Katsuyoshi | 2010-03-18 |
Method for forming ferroelectric capacitor and method for fabricating semiconductor device Grant 7,622,346 - Fujiki , et al. November 24, 2 | 2009-11-24 |
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Semiconductor device with ferroelectric capacitor and fabrication method thereof Grant 7,459,361 - Matsuura December 2, 2 | 2008-12-02 |
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Semiconductor device with ferroelectric capacitor and fabrication method thereof App 20070120165 - Matsuura; Katsuyoshi | 2007-05-31 |
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Manufacturing method of semiconductor device Grant 7,176,132 - Sashida , et al. February 13, 2 | 2007-02-13 |
Antenna circuit, IC inlet, IC tag, and IC card, as well as manufacturing method of IC tag and manufacturing method of IC card App 20060237544 - Matsuura; Katsuyoshi ;   et al. | 2006-10-26 |
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Method for fabricating semiconductor device App 20060199342 - Matsuura; Katsuyoshi ;   et al. | 2006-09-07 |
Manufacturing method of semiconducter device Grant 7,078,242 - Matsuura , et al. July 18, 2 | 2006-07-18 |
Semiconductor device and method for manufacturing the same Grant 7,038,264 - Matsuura , et al. May 2, 2 | 2006-05-02 |
Semiconductor device having a ferroelectric capacitor and a fabrication process thereof Grant 6,964,873 - Matsuura , et al. November 15, 2 | 2005-11-15 |
Semiconductor device and method for manufacturing the same App 20050161716 - Matsuura, Katsuyoshi ;   et al. | 2005-07-28 |
Manufacturing method of semiconductor device App 20050136556 - Matsuura, Katsuyoshi ;   et al. | 2005-06-23 |
Ferroelectric capacitor, process for manufacturing thereof and ferroelectric memory Grant 6,812,510 - Horii , et al. November 2, 2 | 2004-11-02 |
Manufacturing method of semiconductor device App 20040166596 - Sashida, Naoya ;   et al. | 2004-08-26 |
Ferroelectric semiconductor memory device and a fabrication process thereof Grant 6,777,287 - Ozawa , et al. August 17, 2 | 2004-08-17 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof Grant 6,740,533 - Takamatsu , et al. May 25, 2 | 2004-05-25 |
Process for producing a strontium ruthenium oxide protective layer on a top electrode Grant 6,674,633 - Sun , et al. January 6, 2 | 2004-01-06 |
Ferroelectric capacitor, process for manufacturing thereof and ferroelectric memory App 20030230773 - Horii, Yoshimasa ;   et al. | 2003-12-18 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof App 20030213986 - Takamatsu, Tomohiro ;   et al. | 2003-11-20 |
Ferroelectric semiconductor memory device and a fabrication process thereof App 20030205743 - Ozawa, Soichiro ;   et al. | 2003-11-06 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof Grant 6,624,458 - Takamatsu , et al. September 23, 2 | 2003-09-23 |
Ferroelectric semiconductor memory device and a fabrication process thereof Grant 6,617,626 - Ozawa , et al. September 9, 2 | 2003-09-09 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof App 20020185668 - Takamatsu, Tomohiro ;   et al. | 2002-12-12 |
Semiconductor device having a ferroelectric capacitor and a fabrication process thereof App 20020177243 - Matsuura, Katsuyoshi ;   et al. | 2002-11-28 |
Ferroelectric semiconductor memory device and a fabrication process thereof App 20020158278 - Ozawa, Soichiro ;   et al. | 2002-10-31 |
Process for producing a strontium ruthenium oxide protective layer on a top electrode App 20020149040 - Sun, Shan ;   et al. | 2002-10-17 |
Semiconductor device having a ferroelectric capacitor and a fabrication process thereof App 20020142489 - Matsuura, Katsuyoshi ;   et al. | 2002-10-03 |
Semiconductor device manufacturing apparatus and its cleaning method Grant 5,609,721 - Tsukune , et al. March 11, 1 | 1997-03-11 |