MATSUSHITA; Michiaki
Patent Applications and Registrations
Patent applications and USPTO patent grants for MATSUSHITA; Michiaki.The latest application filed is for "substrate transfer apparatus and substrate transfer method".
- MATSUSHITA; Michiaki - Kumamoto JP
- Matsushita; Michiaki - Koshi JP
- MATSUSHITA; Michiaki - Koshi City JP
- Matsushita; Michiaki - Koshi-Shi JP
- Matsushita; Michiaki - Koshi-Machi JP
- Matsushita, Michiaki - Kikuchi-Gun JP
- Matsushita; Michiaki - Yatsushiro JP
| Patent | Date |
|---|---|
| Substrate Transfer Apparatus And Substrate Transfer Method App 20210347584 - HASHIMA; Hitoshi ; et al. | 2021-11-11 |
| Substrate Storage Apparatus, Substrate Storage Method, And Recording Medium App 20200058531 - MATSUMOTO; Akihiro ; et al. | 2020-02-20 |
| Apparatus, method and non-transitory storage medium for accommodating and processing a substrate Grant 10,424,499 - Matsumoto , et al. Sept | 2019-09-24 |
| Apparatus, Method And Non-transitory Storage Medium For Accomodating And Processing A Substrate App 20170178941 - MATSUMOTO; Akihiro ; et al. | 2017-06-22 |
| Apparatus, method and non-transitory storage medium for accommodating and processing a substrate Grant 9,627,237 - Matsumoto , et al. April 18, 2 | 2017-04-18 |
| Apparatus, Method And Non-transitory Storage Medium For Accommodating And Processing A Substrate App 20140199140 - MATSUMOTO; Akihiro ; et al. | 2014-07-17 |
| Device and method for supporting a substrate Grant 8,528,889 - Nakano , et al. September 10, 2 | 2013-09-10 |
| Substrate processing system Grant 8,206,076 - Ueda , et al. June 26, 2 | 2012-06-26 |
| Device And Method For Supporting A Substrate App 20100243168 - Nakano; Seiji ; et al. | 2010-09-30 |
| Substrate Processing System App 20090003825 - Ueda; Issei ; et al. | 2009-01-01 |
| Substrate dual-side processing apparatus Grant 6,874,515 - Ishihara , et al. April 5, 2 | 2005-04-05 |
| Coating and developing apparatus and pattern forming method App 20050042555 - Matsushita, Michiaki ; et al. | 2005-02-24 |
| Coating and developing apparatus and pattern forming method Grant 6,814,809 - Matsushita , et al. November 9, 2 | 2004-11-09 |
| Substrate dual-side processing apparatus App 20020157692 - Ishihara, Akira ; et al. | 2002-10-31 |
| Coating and developing apparatus and pattern forming method App 20020076658 - Matsushita, Michiaki ; et al. | 2002-06-20 |
| Substrate processing apparatus App 20010055522 - Kaneda, Masatoshi ; et al. | 2001-12-27 |
| Double-sided substrate cleaning apparatus and cleaning method using the same Grant 5,964,954 - Matsukawa , et al. October 12, 1 | 1999-10-12 |
| Resist treating method Grant 5,686,143 - Matsukawa , et al. November 11, 1 | 1997-11-11 |
| Double-sided substrate cleaning apparatus Grant 5,518,542 - Matsukawa , et al. May 21, 1 | 1996-05-21 |
| Apparatus and method for washing substrates Grant 5,498,294 - Matsushita , et al. March 12, 1 | 1996-03-12 |
| Spin chuck and treatment apparatus using same Grant 5,421,056 - Tateyama , et al. June 6, 1 | 1995-06-06 |
| Device having brush for scrubbing substrate Grant 5,375,291 - Tateyama , et al. December 27, 1 | 1994-12-27 |
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