Matsushita; Kiyohiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Matsushita; Kiyohiro.The latest application filed is for "method for hydrophobization of surface of silicon-containing film by ald".

Company Profile

0.15.22

Matsushita; Kiyohiro - Fuchu JP
Matsushita; Kiyohiro - Tokyo JP
Matsushita; Kiyohiro - Hachioji JP
Matsushita; Kiyohiro - Tama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for hydrophobization of surface of silicon-containing film by ALD Grant 9,478,414 - Kobayashi , et al. October 25, 2	2016-10-25
Method for Hydrophobization of Surface of Silicon-Containing Film by ALD App 20160093485 - Kobayashi; Akiko ; et al.	2016-03-31
Method for forming SiOCH film using organoaminosilane annealing Grant 9,190,263 - Ishikawa , et al. November 17, 2	2015-11-17
Method for restoring porous surface of dielectric layer by UV light-assisted ALD Grant 9,136,108 - Matsushita , et al. September 15, 2	2015-09-15
Method for treating SiOCH film with hydrogen plasma Grant 9,029,272 - Nakano , et al. May 12, 2	2015-05-12
Method for Treating SiOCH Film With Hydrogen Plasma App 20150118864 - Nakano; Akinori ; et al.	2015-04-30
Method For Restoring Porous Surface Of Dielectric Layer By UV Light-Assisted ALD App 20150064932 - Matsushita; Kiyohiro ; et al.	2015-03-05
Method for Forming SiOCH Film Using Organoaminosilane Annealing App 20150056821 - Ishikawa; Dai ; et al.	2015-02-26
Method for repairing damage of dielectric film by cyclic processes Grant 8,785,215 - Kobayashi , et al. July 22, 2	2014-07-22
Method for supplying gas with flow rate gradient over substrate Grant 8,664,627 - Ishikawa , et al. March 4, 2	2014-03-04
Method for Supplying Gas With Flow Rate Gradient Over Substrate App 20140041588 - Ishikawa; Dai ; et al.	2014-02-13
Method For Repairing Damage Of Dielectric Film By Cyclic Processes App 20130337583 - Kobayashi; Akiko ; et al.	2013-12-19
UV Irradiation Apparatus Having UV Lamp-Shared Multiple Process Stations App 20130068970 - Matsushita; Kiyohiro	2013-03-21
Method for forming interconnect structure having airgap Grant 8,241,991 - Hsieh , et al. August 14, 2	2012-08-14
Method For Forming Interconnect Structure Having Airgap App 20110217838 - Hsieh; Julian J. ; et al.	2011-09-08
Method for Sealing Pores at Surface of Dielectric Layer by UV Light-Assisted CVD App 20110159202 - Matsushita; Kiyohiro ; et al.	2011-06-30
Method for forming dielectric SiOCH film having chemical stability Grant 7,807,566 - Tsuji , et al. October 5, 2	2010-10-05
Method of cleaning UV irradiation chamber Grant 7,789,965 - Matsushita , et al. September 7, 2	2010-09-07
UV light irradiating apparatus with liquid filter Grant 7,763,869 - Matsushita , et al. July 27, 2	2010-07-27
Method Of Forming Low-k Film Having Chemical Resistance App 20100151151 - Matsushita; Kiyohiro ; et al.	2010-06-17
Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient Grant 7,718,544 - Tsuji , et al. May 18, 2	2010-05-18
METHOD FOR FORMING DIELECTRIC SiOCH FILM HAVING CHEMICAL STABILITY App 20090148964 - Tsuji; Naoto ; et al.	2009-06-11
Semiconductor Manufacturing Apparatus And Method For Curing Materials With Uv Light App 20090093134 - Matsushita; Kiyohiro ; et al.	2009-04-09
Semiconductor Manufacturing Apparatus And Method For Curing Material With Uv Light App 20090093135 - Matsushita; Kiyohiro ; et al.	2009-04-09
Method for managing UV irradiation for curing semiconductor substrate Grant 7,501,292 - Matsushita , et al. March 10, 2	2009-03-10
Method For Managing Uv Irradiation For Curing Semiconductor Substrate App 20090023229 - MATSUSHITA; Kiyohiro ; et al.	2009-01-22
Uv Light Irradiating Apparatus With Liquid Filter App 20080230721 - MATSUSHITA; Kiyohiro ; et al.	2008-09-25
Method For Increasing Mechanical Strength Of Dielectric Film By Using Sequential Combination Of Two Types Of Uv Irradiation App 20080220619 - MATSUSHITA; Kiyohiro ; et al.	2008-09-11
Method of forming interconnection in semiconductor device Grant 7,354,852 - Matsushita , et al. April 8, 2	2008-04-08
Method Of Cleaning Uv Irradiation Chamber App 20080066778 - Matsushita; Kiyohiro ; et al.	2008-03-20
Method Of Forming Silicon-containing Insulation Film Having Low Dielectric Constant And Low Diffusion Coefficient App 20060183341 - Tsuji; Naoto ; et al.	2006-08-17
Method of forming interconnection in semiconductor device App 20060160352 - Matsushita; Kiyohiro ; et al.	2006-07-20
Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength Grant 6,818,570 - Tsuji , et al. November 16, 2	2004-11-16
Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength App 20030176030 - Tsuji, Naoto ; et al.	2003-09-18

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