Matsushima; Daisuke
Patent Applications and Registrations
Patent applications and USPTO patent grants for Matsushima; Daisuke.The latest application filed is for "substrate processing apparatus".
- Matsushima; Daisuke - Kanagawa JP
- MATSUSHIMA; Daisuke - Yokohama-shi JP
- Matsushima; Daisuke - Yokohama JP
- Matsushima; Daisuke - Kanagawa-ken JP
| Patent | Date |
|---|---|
| Substrate treatment device and substrate treatment method Grant 11,355,337 - Kamiya , et al. June 7, 2 | 2022-06-07 |
| Substrate Processing Apparatus App 20220080468 - DEMURA; Kensuke ; et al. | 2022-03-17 |
| Substrate Processing Apparatus And Substrate Processing Method App 20220068671 - DEMURA; Kensuke ; et al. | 2022-03-03 |
| Substrate Treatment Device App 20210323036 - MATSUSHIMA; Daisuke ; et al. | 2021-10-21 |
| Substrate Treatment Device App 20210299713 - DEMURA; Kensuke ; et al. | 2021-09-30 |
| Substrate Treatment Device App 20210276055 - NAKAMURA; Minami ; et al. | 2021-09-09 |
| Substrate Treatment Device App 20210265159 - DEMURA; Kensuke ; et al. | 2021-08-26 |
| Substrate Treatment Device And Substrate Treatment Method App 20200335324 - Kamiya; Masaya ; et al. | 2020-10-22 |
| Imprint template manufacturing apparatus and imprint template manufacturing method Grant 10,773,425 - Demura , et al. Sept | 2020-09-15 |
| Substrate treatment device and substrate treatment method Grant 10,734,217 - Kamiya , et al. | 2020-08-04 |
| Imprint template treatment apparatus Grant 10,668,496 - Nakamura , et al. | 2020-06-02 |
| Reflective Mask Cleaning Apparatus And Reflective Mask Cleaning Method App 20200124960 - Matsushima; Daisuke ; et al. | 2020-04-23 |
| Imprint Template Manufacturing Apparatus And Imprint Template Manufacturing Method App 20180117795 - DEMURA; Kensuke ; et al. | 2018-05-03 |
| Imprint Template Manufacturing Apparatus And Imprint Template Manufacturing Method App 20180117796 - DEMURA; Kensuke ; et al. | 2018-05-03 |
| Substrate Treatment Device And Substrate Treatment Method App 20180047559 - Kamiya; Masaya ; et al. | 2018-02-15 |
| Template For Imprint App 20180022016 - NAKAMURA; Satoshi ; et al. | 2018-01-25 |
| Imprint Template Manufacturing Apparatus App 20180016673 - NAKAMURA; Satoshi ; et al. | 2018-01-18 |
| Imprint Template Manufacturing Apparatus App 20180015497 - Nakamura; Satoshi ; et al. | 2018-01-18 |
| Bonding apparatus and method for manufacturing bonded substrate Grant 9,586,391 - Hayashi , et al. March 7, 2 | 2017-03-07 |
| Reflective Mask Cleaning Apparatus And Reflective Mask Cleaning Method App 20170017151 - Matsushima; Daisuke ; et al. | 2017-01-19 |
| Bonding Apparatus and Method for Manufacturing Bonded Substrate App 20160009070 - Hayashi; Konosuke ; et al. | 2016-01-14 |
| Plasma Processing Apparatus And Plasma Processing Method App 20120192953 - Matsushima; Daisuke | 2012-08-02 |
| Plasma Etching Apparatus And Plasma Etching Method App 20120132617 - MATSUSHIMA; Daisuke | 2012-05-31 |
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