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Apparatus And Method For Real-time Sensing Of Properties In Industrial Manufacturing Equipment App 20210343560 - Ballandras; Sylvain ;   et al. | 2021-11-04 |
Apparatus and method for real-time sensing of properties in industrial manufacturing equipment Grant 11,114,321 - Ballandras , et al. September 7, 2 | 2021-09-07 |
Apparatus And Method For Real-time Sensing Of Properties In Industrial Manufacturing Equipment App 20190057887 - Ballandras; Sylvain ;   et al. | 2019-02-21 |
Method of forming a metal film for electrode Grant 7,829,144 - Matsuse , et al. November 9, 2 | 2010-11-09 |
TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system Grant 7,153,773 - Otsuki , et al. December 26, 2 | 2006-12-26 |
Method of forming a metal film for electrode App 20050191803 - Matsuse, Kimihiro ;   et al. | 2005-09-01 |
Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film Grant 6,919,273 - Otsuki , et al. July 19, 2 | 2005-07-19 |
Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film Grant 6,861,356 - Matsuse , et al. March 1, 2 | 2005-03-01 |
Method of forming semiconductor wiring structures Grant 6,838,376 - Matsuse , et al. January 4, 2 | 2005-01-04 |
TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system App 20040232467 - Otsuki, Hayashi ;   et al. | 2004-11-25 |
Film forming apparatus and film forming method Grant 6,576,062 - Matsuse June 10, 2 | 2003-06-10 |
Wiring Structure Of Semiconductor Device, Electrode, And Method For Forming Them App 20030034560 - MATSUSE, KIMIHIRO ;   et al. | 2003-02-20 |
Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film App 20020197856 - Matsuse, Kimihiro ;   et al. | 2002-12-26 |
Method and apparatus for forming a film on an object to be processed Grant 6,454,909 - Matsuse , et al. September 24, 2 | 2002-09-24 |
Laminated structure and a method of forming the same App 20020058384 - Koizumi, Masato ;   et al. | 2002-05-16 |
Film forming apparatus and film forming method App 20010007244 - Matsuse, Kimihiro | 2001-07-12 |
Apparatus for forming laminated thin films or layers Grant 6,251,188 - Hashimoto , et al. June 26, 2 | 2001-06-26 |
Method of forming tungsten silicide film Grant 6,245,673 - Okubo , et al. June 12, 2 | 2001-06-12 |
Method and apparatus for forming laminated thin films or layers Grant 6,022,586 - Hashimoto , et al. February 8, 2 | 2000-02-08 |
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