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Welding Method Of Diffusion Bonded Structure App 20190337078 - MASAKI; Kunitaka ;   et al. | 2019-11-07 |
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Etching Method, Substrate Processing Method, Pattern Forming Method, Method For Manufacturing Semiconductor Element, And Semiconductor Element App 20150325448 - MATSUOKA; Takaaki ;   et al. | 2015-11-12 |
Etching method, substrate processing method, pattern forming method, method for manufacturing semiconductor element, and semiconductor element Grant 9,117,764 - Matsuoka , et al. August 25, 2 | 2015-08-25 |
Shower Plate Sintered Integrally With Gas Release Hole Member And Method For Manufacturing The Same App 20150069674 - OKESAKU; Masahiro ;   et al. | 2015-03-12 |
Shower plate sintered integrally with gas release hole member and method for manufacturing the same Grant 8,915,999 - Okesaku , et al. December 23, 2 | 2014-12-23 |
Pattern-forming method and method for manufacturing semiconductor device Grant 8,809,207 - Ishikawa , et al. August 19, 2 | 2014-08-19 |
Surface treatment for a fluorocarbon film Grant 8,765,605 - Horigome , et al. July 1, 2 | 2014-07-01 |
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Pattern-forming Method And Method For Manufacturing Semiconductor Device App 20140080307 - Ishikawa; Hiraku ;   et al. | 2014-03-20 |
Magnetron Sputtering Apparatus App 20140027278 - Ohmi; Tadahiro ;   et al. | 2014-01-30 |
Film Forming Device, Substrate Processing System And Semiconductor Device Manufacturing Method App 20130330928 - Ishikawa; Hiraku ;   et al. | 2013-12-12 |
Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window Grant 8,573,151 - Ohmi , et al. November 5, 2 | 2013-11-05 |
Magnetron sputtering apparatus Grant 8,568,577 - Ohmi , et al. October 29, 2 | 2013-10-29 |
Rotary magnet sputtering apparatus Grant 8,535,494 - Ohmi , et al. September 17, 2 | 2013-09-17 |
Semiconductor device manufacturing method Grant 8,497,214 - Ueda , et al. July 30, 2 | 2013-07-30 |
Rotary magnet sputtering apparatus Grant 8,496,792 - Ohmi , et al. July 30, 2 | 2013-07-30 |
Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device Grant 8,486,792 - Ueda , et al. July 16, 2 | 2013-07-16 |
Etching Method, Substrate Processing Method, Pattern Forming Method, Method For Manufacturing Semiconductor Element, And Semiconductor Element App 20130157468 - Matsuoka; Takaaki ;   et al. | 2013-06-20 |
Semiconductor Device Manufacturing Method And Semiconductor Device App 20130154059 - Ohmi; Tadahiro ;   et al. | 2013-06-20 |
Method for processing amorphous carbon film, and semiconductor device manufacturing method using the method Grant 8,461,047 - Ishikawa , et al. June 11, 2 | 2013-06-11 |
Film forming method for a semiconductor Grant 8,435,882 - Matsuoka , et al. May 7, 2 | 2013-05-07 |
Ion implanting apparatus and ion implanting method Grant 8,399,862 - Ohmi , et al. March 19, 2 | 2013-03-19 |
Plasma Processing Method App 20130065399 - UDEA; Hirokazu ;   et al. | 2013-03-14 |
Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element Grant 8,383,194 - Ohmi , et al. February 26, 2 | 2013-02-26 |
Semiconductor device and manufacturing method therefor Grant 8,334,204 - Matsuoka , et al. December 18, 2 | 2012-12-18 |
Semiconductor device and method for manufacturing the same Grant 8,278,205 - Matsuoka October 2, 2 | 2012-10-02 |
Film forming method for a semiconductor Grant 8,197,913 - Matsuoka , et al. June 12, 2 | 2012-06-12 |
Wet Processing Apparatus And Wet Processing Method App 20120125376 - Ohmi; Tadahiro ;   et al. | 2012-05-24 |
Plasma Processing Apparatus And Printed Wiring Board Manufacturing Method App 20120125765 - Ohmi; Tadahiro ;   et al. | 2012-05-24 |
Rotary Magnet Sputtering Apparatus App 20120064259 - Ohmi; Tadahiro ;   et al. | 2012-03-15 |
Fabrication method of a semiconductor device and a semiconductor device Grant 8,124,523 - Kawamura , et al. February 28, 2 | 2012-02-28 |
Surface Treatment For A Fluorocarbon Film App 20110318919 - Horigome; Masahiro ;   et al. | 2011-12-29 |
Film Forming Apparatus And Film Forming Method App 20110268870 - OHMI; Tadahiro ;   et al. | 2011-11-03 |
Plasma processing method for forming a film and an electronic component manufactured by the method Grant 8,021,975 - Miyatani , et al. September 20, 2 | 2011-09-20 |
Semiconductor Device And Method Of Manufacturing The Same App 20110215384 - Ohmi; Tadahiro ;   et al. | 2011-09-08 |
Magnetron Sputtering Method, And Magnetron Sputtering Apparatus App 20110186425 - Ohmi; Tadahiro ;   et al. | 2011-08-04 |
Chemical Mechanical Polishing Apparatus, Chemical Mechanical Polishing Method, And Control Program App 20110189857 - Matsuoka; Takaaki ;   et al. | 2011-08-04 |
Interlayer Insulating Film, Wiring Structure, And Methods Of Manufacturing The Same App 20110127075 - Ohmi; Tadahiro ;   et al. | 2011-06-02 |
Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same Grant 7,923,819 - Ohmi , et al. April 12, 2 | 2011-04-12 |
Film Forming Method Of Silicon Oxide Film, Silicon Oxide Film, Semiconductor Device, And Manufacturing Method Of Semiconductor Device App 20110074013 - Ueda; Hirokazu ;   et al. | 2011-03-31 |
Method For Processing Amorphous Carbon Film, And Semiconductor Device Manufacturing Method Using The Method App 20110053375 - Ishikawa; Hiraku ;   et al. | 2011-03-03 |
Substrate processing apparatus Grant 7,874,781 - Nozawa , et al. January 25, 2 | 2011-01-25 |
Rotary Magnet Sputtering Apparatus App 20110000783 - Ohmi; Tadahiro ;   et al. | 2011-01-06 |
Plasma Processing Apparatus And Method For Plasma-processing Semiconductor Substrate App 20100279512 - Udea; Hirokazu ;   et al. | 2010-11-04 |
Plasma Processing System And Plasma Processing Method App 20100264117 - Ohmi; Tadahiro ;   et al. | 2010-10-21 |
Film Forming Method, Film Forming Apparatus, Storage Medium And Semiconductor Device App 20100244204 - Matsuoka; Takaaki ;   et al. | 2010-09-30 |
Manufacturing method of semiconductor device and film deposition system Grant 7,803,705 - Kobayashi , et al. September 28, 2 | 2010-09-28 |
Semiconductor Device Manufacturing Method App 20100216300 - Ueda; Hirokazu ;   et al. | 2010-08-26 |
Substrate processing device Grant 7,780,391 - Matsuoka , et al. August 24, 2 | 2010-08-24 |
Shower Plate Sintered Integrally With Gas Release Hole Member And Method For Manufacturing The Same App 20100178775 - Okesaku; Masahiro ;   et al. | 2010-07-15 |
Welded Joint, Steel Deck, and Process for Producing The Steel Deck App 20100170050 - Inose; Kotaro ;   et al. | 2010-07-08 |
Rotary Magnet Sputtering Apparatus App 20100126852 - Ohmi; Tadahiro ;   et al. | 2010-05-27 |
Magnetron Sputtering Apparatus App 20100126848 - Ohmi; Tadahiro ;   et al. | 2010-05-27 |
Film Forming Method For A Semiconductor App 20100117204 - Matsuoka; Takaaki ;   et al. | 2010-05-13 |
Magnetron Sputtering Apparatus App 20100101945 - Ohmi; Tadahiro ;   et al. | 2010-04-29 |
Interlayer Insulation Film, Interconnect Structure, And Methods Of Manufacturing Them App 20100101834 - Ohmi; Tadahiro ;   et al. | 2010-04-29 |
Magnetron Sputtering Apparatus App 20100059368 - Ohmi; Tadahiro ;   et al. | 2010-03-11 |
Interlayer Insulating Film, Wiring Structure And Electronic Device And Methods Of Manufacturing The Same App 20100032844 - Ohmi; Tadahiro ;   et al. | 2010-02-11 |
Ion Implanting Apparatus And Ion Implanting Method App 20100025821 - Ohmi; Tadahiro ;   et al. | 2010-02-04 |
Fabrication Method Of A Semiconductor Device And A Semiconductor Device App 20100025856 - Kawamura; Kohei ;   et al. | 2010-02-04 |
Semiconductor device and manufacturing method therefor App 20100022048 - Matsuoka; Takaaki ;   et al. | 2010-01-28 |
Film coating apparatus App 20090277379 - Ohmi; Tadahiro ;   et al. | 2009-11-12 |
Semiconductor device and method for manufacturing the same App 20090230558 - Matsuoka; Takaaki | 2009-09-17 |
Film Forming Apparatus, Film Forming System, Film Forming Method, and Method of Manufacturing Electronic Device or Organic Electroluminescence Element App 20090226604 - Ohmi; Tadahiro ;   et al. | 2009-09-10 |
Microwave Plasma Processing Apparatus, Dielectric Window For Use In The Microwave Plasma Processing Apparatus, And Method For Manufacturing The Dielectric Window App 20090218044 - OHMI; Tadahiro ;   et al. | 2009-09-03 |
Organic El Element, Organic El Display Device, And Methods Of Manufacturing The Same App 20090135109 - Ohmi; Tadahiro ;   et al. | 2009-05-28 |
Chemical Solution Or Pure Water Feeder, Substrate Processing System, Substrate Processing Apparatus, Or Substrate Processing Method App 20090107521 - Ohmi; Tadahiro ;   et al. | 2009-04-30 |
Film Forming Apparatus, Evaporating Jig, and Measurement Method App 20090087545 - Ohmi; Tadahiro ;   et al. | 2009-04-02 |
Film Forming Apparatus and Film Forming Method App 20090041929 - Ohmi; Tadahiro ;   et al. | 2009-02-12 |
Film forming method for a semiconductor App 20090029066 - Matsuoka; Takaaki ;   et al. | 2009-01-29 |
Plasma processing method for forming a film and an electronic component manufactured by the method App 20090026588 - Miyatani; Kotaro ;   et al. | 2009-01-29 |
Shower Plate and Plasma Treatment Apparatus Using Shower Plate App 20080318431 - Ohmi; Tadahiro ;   et al. | 2008-12-25 |
Manufacturing Method Of Semiconductor Device And Film Deposition System App 20080254641 - Kobayashi; Yasuo ;   et al. | 2008-10-16 |
Film-Forming Apparatus And Film-Forming Method App 20080241587 - Ohmi; Tadahiro ;   et al. | 2008-10-02 |
Method and device for heat treatment Grant 7,313,931 - Matsuoka January 1, 2 | 2008-01-01 |
Substrate processing device App 20070000612 - Nozawa; Toshihisa ;   et al. | 2007-01-04 |
Method and device for heat treatment App 20050279138 - Matsuoka, Takaaki | 2005-12-22 |
Substrate processing device App 20050238464 - Matsuoka, Takaaki ;   et al. | 2005-10-27 |
Method and device for heat treatment Grant 6,951,815 - Matsuoka October 4, 2 | 2005-10-04 |
Processing device and processing method App 20050145333 - Kannan, Hiroshi ;   et al. | 2005-07-07 |
Process for reforming surface of substrate, reformed substrate and apparatus for the same Grant 6,858,115 - Azuma , et al. February 22, 2 | 2005-02-22 |
Plasma processing equipment and plasma processing method App 20040168769 - Matsuoka, Takaaki ;   et al. | 2004-09-02 |
Method and device for heat treatment App 20040048493 - Matsuoka, Takaaki | 2004-03-11 |
Process for reforming surface of substrate, reformed substrate and apparatus for the same App 20030196891 - Azuma, Hirozumi ;   et al. | 2003-10-23 |
Drive mechanism having a gas bearing operable under a negative pressure environment Grant 6,285,102 - Matsuoka , et al. September 4, 2 | 2001-09-04 |