Patent | Date |
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Semiconductor measurement apparatus and computer program Grant 10,643,326 - Toyoda , et al. | 2020-05-05 |
Image evaluation apparatus and pattern shape evaluation apparatus Grant 9,830,705 - Shinoda , et al. November 28, 2 | 2017-11-28 |
Overlay error measuring device and computer program Grant 9,696,150 - Matsuoka July 4, 2 | 2017-07-04 |
Scanning electron microscope device and pattern dimension measuring method using same Grant 9,343,264 - Kotaki , et al. May 17, 2 | 2016-05-17 |
Image processing apparatus Grant 9,183,622 - Toyoda , et al. November 10, 2 | 2015-11-10 |
Image Evaluation Apparatus And Pattern Shape Evaluation Apparatus App 20150287201 - Shinoda; Shinichi ;   et al. | 2015-10-08 |
Overlay Error Measuring Device And Computer Program App 20150136976 - Matsuoka; Ryoichi | 2015-05-21 |
Method of extracting contour lines of image data obtained by means of charged particle beam device, and contour line extraction device Grant 8,994,815 - Mito , et al. March 31, 2 | 2015-03-31 |
Pattern shape evaluation method and pattern shape evaluation apparatus Grant 8,977,034 - Toyoda , et al. March 10, 2 | 2015-03-10 |
Image processing device and computer program for performing image processing Grant 8,972,911 - Matsuoka , et al. March 3, 2 | 2015-03-03 |
Semiconductor Measurement Apparatus and Computer Program App 20150009319 - Toyoda; Yasutaka ;   et al. | 2015-01-08 |
Method and apparatus for creating imaging recipe Grant RE45,224 - Miyamoto , et al. October 28, 2 | 2014-10-28 |
Method and apparatus for creating imaging recipe Grant RE45,204 - Miyamoto , et al. October 21, 2 | 2014-10-21 |
Method of creating template for matching, as well as device for creating template Grant 8,867,818 - Matsuoka , et al. October 21, 2 | 2014-10-21 |
Scanning electron microscope and a method for imaging a specimen using the same Grant 8,853,630 - Miyamoto , et al. October 7, 2 | 2014-10-07 |
Pattern measurement apparatus Grant 8,788,242 - Matsuoka , et al. July 22, 2 | 2014-07-22 |
Method and device for synthesizing panorama image using scanning charged-particle microscope Grant 8,767,038 - Miyamoto , et al. July 1, 2 | 2014-07-01 |
Scanning Electron Microscope And A Method For Imaging A Specimen Using The Same App 20140145078 - Miyamoto; Atsushi ;   et al. | 2014-05-29 |
Pattern inspection method, pattern inspection apparatus and pattern processing apparatus Grant 8,705,841 - Shinoda , et al. April 22, 2 | 2014-04-22 |
Image processing apparatus, image processing method, and image processing program Grant 8,687,921 - Shinoda , et al. April 1, 2 | 2014-04-01 |
Pattern generating apparatus and pattern shape evaluating apparatus Grant 8,655,050 - Toyoda , et al. February 18, 2 | 2014-02-18 |
Scanning electron microscope and a method for imaging a specimen using the same Grant 8,642,957 - Miyamoto , et al. February 4, 2 | 2014-02-04 |
Image Processing Device And Computer Program For Performing Image Processing App 20130326439 - Matsuoka; Ryoichi ;   et al. | 2013-12-05 |
Pattern Generating Apparatus And Pattern Shape Evaluating Apparatus App 20130315468 - TOYODA; Yasutaka ;   et al. | 2013-11-28 |
Method for measuring sample and measurement device Grant 8,581,187 - Kijima , et al. November 12, 2 | 2013-11-12 |
Method and apparatus for image generation Grant 8,577,125 - Shinoda , et al. November 5, 2 | 2013-11-05 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 8,577,124 - Toyoda , et al. November 5, 2 | 2013-11-05 |
Image Processing Apparatus And Computer Program App 20130279793 - Toyoda; Yasutaka ;   et al. | 2013-10-24 |
Pattern generating apparatus and pattern shape evaluating apparatus Grant 8,515,155 - Toyoda , et al. August 20, 2 | 2013-08-20 |
Pattern measuring method and pattern measuring device Grant 8,507,856 - Sutani , et al. August 13, 2 | 2013-08-13 |
Managing Apparatus Of Semiconductor Manufacturing Apparatus And Computer Program App 20130150998 - Matsuoka; Ryoichi ;   et al. | 2013-06-13 |
Pattern Generating Apparatus And Pattern Shape Evaluating Apparatus App 20130136335 - Toyoda; Yasutaka ;   et al. | 2013-05-30 |
Pattern measurement apparatus Grant 8,445,871 - Matsuoka , et al. May 21, 2 | 2013-05-21 |
Pattern Shape Evaluation Method, Pattern Shape Evaluation Device, Pattern Shape Evaluating Data Generation Device And Semiconductor Shape Evaluation System Using The Same App 20130117723 - TOYODA; Yasutaka ;   et al. | 2013-05-09 |
Pattern generating apparatus and pattern shape evaluating apparatus Grant 8,363,923 - Toyoda , et al. January 29, 2 | 2013-01-29 |
Pattern shape evaluation method Grant 8,355,562 - Toyoda , et al. January 15, 2 | 2013-01-15 |
Image Processing Apparatus, Image Processing Method, and Image Processing Program App 20130011080 - Shinoda; Shinichi ;   et al. | 2013-01-10 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 8,338,804 - Morokuma , et al. December 25, 2 | 2012-12-25 |
Method of Extracting Contour Lines of Image Data Obtained By Means of Charged Particle Beam Device, and Contour Line Extraction Device App 20120300054 - Mito; Hiroaki ;   et al. | 2012-11-29 |
Pattern Measuring Condition Setting Device App 20120290990 - Toyoda; Yasutaka ;   et al. | 2012-11-15 |
Pattern measuring method and pattern measuring device Grant 8,311,314 - Matsuoka , et al. November 13, 2 | 2012-11-13 |
Pattern measurement methods and pattern measurement equipment Grant 8,295,584 - Sato , et al. October 23, 2 | 2012-10-23 |
Pattern Measuring Method And Pattern Measuring Device App 20120211653 - SUTANI; Takumichi ;   et al. | 2012-08-23 |
Scanning Electron Microscope and a Method for Imaging a Specimen Using the Same App 20120181426 - Miyamoto; Atsushi ;   et al. | 2012-07-19 |
Method Of Creating Template For Matching, As Well As Device For Creating Template App 20120121160 - Matsuoka; Ryoichi ;   et al. | 2012-05-17 |
Pattern displacement measuring method and pattern measuring device Grant 8,173,962 - Sutani , et al. May 8, 2 | 2012-05-08 |
Pattern Shape Evaluation Method And Pattern Shape Evaluation Apparatus App 20120106826 - Toyoda; Yasutaka ;   et al. | 2012-05-03 |
Scanning Electron Microscope Device And Pattern Dimension Measuring Method Using Same App 20120098953 - Kotaki; Go ;   et al. | 2012-04-26 |
Method And Apparatus Of Pattern Inspection And Semiconductor Inspection System Using The Same App 20120099781 - TOYODA; Yasutaka ;   et al. | 2012-04-26 |
Method And Device For Creating Composite Image App 20120092482 - Shinoda; Shinichi ;   et al. | 2012-04-19 |
Scanning electron microscope and a method for imaging a specimen using the same Grant 8,158,938 - Miyamoto , et al. April 17, 2 | 2012-04-17 |
Pattern Generating Apparatus And Pattern Shape Evaluating Apparatus App 20120057774 - TOYODA; Yasutaka ;   et al. | 2012-03-08 |
Pattern Measurement Apparatus App 20120053892 - Matsuoka; Ryoichi ;   et al. | 2012-03-01 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 8,115,169 - Toyoda , et al. February 14, 2 | 2012-02-14 |
Pattern generating apparatus and pattern shape evaluating apparatus Grant 8,077,962 - Toyoda , et al. December 13, 2 | 2011-12-13 |
SEM system and a method for producing a recipe Grant 8,073,242 - Miyamoto , et al. December 6, 2 | 2011-12-06 |
Method, device and computer program of length measurement Grant 8,019,161 - Morokuma , et al. September 13, 2 | 2011-09-13 |
Pattern matching apparatus and semiconductor inspection system using the same Grant 7,991,218 - Toyoda , et al. August 2, 2 | 2011-08-02 |
Method And Device For Synthesizing Panorama Image Using Scanning Charged-particle Microscope App 20110181688 - Miyamoto; Atsushi ;   et al. | 2011-07-28 |
Pattern inspection apparatus and semiconductor inspection system Grant 7,978,904 - Toyoda , et al. July 12, 2 | 2011-07-12 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20110158543 - Morokuma; Hidetoshi ;   et al. | 2011-06-30 |
Pattern Inspection Method, Pattern Inspection Apparatus And Pattern Processing Apparatus App 20110142326 - Shinoda; Shinichi ;   et al. | 2011-06-16 |
Method For Measuring Sample And Measurement Device App 20110139982 - Kijima; Mihoko ;   et al. | 2011-06-16 |
Method and System for Wafer Inspection App 20110096309 - Paul Wiaux; Vincent Jean-Marie Pierre ;   et al. | 2011-04-28 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 7,923,703 - Morokuma , et al. April 12, 2 | 2011-04-12 |
Composite Picture Forming Method And Picture Forming Apparatus App 20110074817 - Shinoda; Shinichi ;   et al. | 2011-03-31 |
Pattern measurement method and pattern measurement system Grant 7,800,060 - Sato , et al. September 21, 2 | 2010-09-21 |
Pattern Measurement Apparatus App 20100202654 - MATSUOKA; Ryoichi ;   et al. | 2010-08-12 |
Pattern Displacement Measuring Method And Pattern Measuring Device App 20100140472 - SUTANI; Takumichi ;   et al. | 2010-06-10 |
Pattern measurement apparatus Grant 7,732,792 - Matsuoka , et al. June 8, 2 | 2010-06-08 |
System and Method for Detecting a Defect App 20100138801 - MATSUOKA; Ryoichi ;   et al. | 2010-06-03 |
System and method for detecting defects in a semiconductor during manufacturing thereof Grant 7,681,159 - Matsuoka , et al. March 16, 2 | 2010-03-16 |
Pattern displacement measuring method and pattern measuring device Grant 7,679,055 - Sutani , et al. March 16, 2 | 2010-03-16 |
Method and apparatus for evaluating pattern shape of a semiconductor device Grant 7,615,746 - Nagatomo , et al. November 10, 2 | 2009-11-10 |
Pattern Measurement Methods And Pattern Measurement Equipment App 20090238443 - Sato; Hidetoshi ;   et al. | 2009-09-24 |
Pattern Measuring Method And Pattern Measuring Device App 20090232385 - MATSUOKA; Ryoichi ;   et al. | 2009-09-17 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20090218491 - Morokuma; Hidetoshi ;   et al. | 2009-09-03 |
Pattern Generating Apparatus And Pattern Shape Evaluating Apparatus App 20090202139 - TOYODA; Yasutaka ;   et al. | 2009-08-13 |
Method And Apparatus For Image Generation App 20090202137 - Shinoda; Shinichi ;   et al. | 2009-08-13 |
Pattern Measuring Method And Pattern Measuring Device App 20090200465 - SUTANI; Takumichi ;   et al. | 2009-08-13 |
Method and apparatus for creating imaging recipe Grant 7,559,047 - Miyamoto , et al. July 7, 2 | 2009-07-07 |
Method And Apparatus Of Pattern Inspection And Semiconductor Inspection System Using The Same App 20090152463 - TOYODA; Yasutaka ;   et al. | 2009-06-18 |
Pattern measuring method and pattern measuring device Grant 7,518,110 - Sutani , et al. April 14, 2 | 2009-04-14 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 7,507,961 - Toyoda , et al. March 24, 2 | 2009-03-24 |
Pattern Shape Evaluation Method, Pattern Shape Evaluation Device, Pattern Shape Evaluating Data Generation Device And Semiconductor Shape Evaluation System Using The Same App 20090052765 - TOYODA; Yasutaka ;   et al. | 2009-02-26 |
Pattern Measurement Apparatus App 20090039263 - MATSUOKA; Ryoichi ;   et al. | 2009-02-12 |
Pattern Measurement Method And Pattern Measurement System App 20090032707 - SATO; Hidetoshi ;   et al. | 2009-02-05 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method Grant 7,449,689 - Nagatomo , et al. November 11, 2 | 2008-11-11 |
Pattern displacement measuring method and pattern measuring device App 20080224035 - Sutani; Takumichi ;   et al. | 2008-09-18 |
Pattern Inspection Apparatus and Semiconductor Inspection System App 20080175469 - TOYODA; Yasutaka ;   et al. | 2008-07-24 |
Sem System And A Method For Producing A Recipe For Imaging Or Measuring A Specimen By Using The Sem System App 20080159609 - Miyamoto; Atsushi ;   et al. | 2008-07-03 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern Grant 7,365,322 - Miyamoto , et al. April 29, 2 | 2008-04-29 |
System and method for detecting a defect App 20080016481 - Matsuoka; Ryoichi ;   et al. | 2008-01-17 |
Workpiece size measurement method and apparatus App 20070221842 - Morokuma; Hidetoshi ;   et al. | 2007-09-27 |
Scanning Electron Microscope And A Method For Imaging A Specimen Using The Same App 20070210252 - MIYAMOTO; Atsushi ;   et al. | 2007-09-13 |
Method and apparatus of evaluating layer matching deviation based on CAD information Grant 7,257,785 - Matsuoka August 14, 2 | 2007-08-14 |
Method and apparatus for evaluating pattern shape of a semiconductor device App 20070120056 - Nagatomo; Wataru ;   et al. | 2007-05-31 |
Pattern matching apparatus and semiconductor inspection system using the same App 20070098248 - Toyoda; Yasutaka ;   et al. | 2007-05-03 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same App 20070023653 - Toyoda; Yasutaka ;   et al. | 2007-02-01 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern App 20060284081 - Miyamoto; Atsushi ;   et al. | 2006-12-21 |
Method and apparatus for measuring dimension of a pattern formed on a semiconductor wafer App 20060288325 - Miyamoto; Atsushi ;   et al. | 2006-12-21 |
Pattern measuring method and pattern measuring device App 20060193508 - Sutani; Takumichi ;   et al. | 2006-08-31 |
Artificial lawn and method of manufacturing the same App 20060154016 - Matsuoka; Ryoichi | 2006-07-13 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method App 20060108524 - Nagatomo; Wataru ;   et al. | 2006-05-25 |
Method and apparatus of evaluating layer matching deviation based on CAD information App 20040194042 - Matsuoka, Ryoichi | 2004-09-30 |
Method and apparatus of evaluating layer matching deviation based on CAD information Grant 6,757,875 - Matsuoka June 29, 2 | 2004-06-29 |
Wafer inspecting apparatus Grant 6,724,929 - Matsuoka April 20, 2 | 2004-04-20 |
Waferless metrology recipe generator and generating method App 20040030430 - Matsuoka, Ryoichi | 2004-02-12 |
Method and apparatus of evaluating layer matching deviation based on CAD information App 20020184605 - Matsuoka, Ryoichi | 2002-12-05 |
Navigation method and device for pattern observation of semiconductor device App 20020035717 - Matsuoka, Ryoichi | 2002-03-21 |
Mask defect checking method and device for electron beam exposure App 20020024019 - Matsuoka, Ryoichi | 2002-02-28 |
Pattern defect checking method and device App 20020026628 - Matsuoka, Ryoichi | 2002-02-28 |
Semiconductor wafer pattern shape evaluation method and device App 20020015518 - Matsuoka, Ryoichi | 2002-02-07 |
Wafer pattern observation method and device App 20020009219 - Matsuoka, Ryoichi | 2002-01-24 |