loadpatents
Patent applications and USPTO patent grants for MATSUO; Hisanori.The latest application filed is for "polishing apparatus".
Patent | Date |
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Polishing Apparatus App 20220063050 - MATSUO; Hisanori | 2022-03-03 |
Apparatus For Polishing And Method Of Polishing App 20210347010 - ITO; Masayoshi ;   et al. | 2021-11-11 |
Polishing Apparatus, Information Processing System, Polishing Method, And Computer-readable Storage Medium App 20210291312 - Nakamura; Akira ;   et al. | 2021-09-23 |
Apparatus For Polishing, Processing System, And Method Of Polishing App 20210283746 - MORIURA; Takuya ;   et al. | 2021-09-16 |
Polishing Apparatus App 20210114164 - KABASAWA; Masashi ;   et al. | 2021-04-22 |
Polishing method and polishing apparatus Grant 10,710,208 - Maruyama , et al. | 2020-07-14 |
Method and apparatus for measuring surface properties of polishing pad Grant 10,478,936 - Matsuo , et al. Nov | 2019-11-19 |
Apparatus and method for regulating surface temperature of polishing pad Grant 10,414,018 - Maruyama , et al. Sept | 2019-09-17 |
Apparatus for measuring surface properties of polishing pad Grant 10,401,285 - Matsuo , et al. Sep | 2019-09-03 |
CMP apparatus having polishing pad surface property measuring device Grant 10,369,675 - Matsuo | 2019-08-06 |
Heat Exchanger For Regulating Temperature Of Polishing Surface Of Polishing Pad, Polishing Apparatus Having Such Heat Exchanger, Polishing Method For Substrate Using Such Heat Exchanger, And Computer-readable Storage Medium Storing A Program For Regulating Temperature Of Polishing Surface Of Polishi App 20190126428 - MARUYAMA; Toru ;   et al. | 2019-05-02 |
Polishing Method And Polishing Apparatus App 20190118334 - MARUYAMA; Toru ;   et al. | 2019-04-25 |
Method and apparatus for polishing a substrate Grant 10,259,098 - Motoshima , et al. | 2019-04-16 |
Polishing method and polishing apparatus Grant 10,195,712 - Maruyama , et al. Fe | 2019-02-05 |
Method And Apparatus For Polishing A Substrate App 20180222007 - MOTOSHIMA; Yasuyuki ;   et al. | 2018-08-09 |
Polishing method and polishing apparatus Grant 10,035,238 - Maruyama , et al. July 31, 2 | 2018-07-31 |
Method and apparatus for polishing a substrate Grant 9,969,046 - Motoshima , et al. May 15, 2 | 2018-05-15 |
Polishing Method And Polishing Apparatus App 20180021917 - MARUYAMA; Toru ;   et al. | 2018-01-25 |
Cmp Apparatus Having Polishing Pad Surface Property Measuring Device App 20180015590 - MATSUO; Hisanori | 2018-01-18 |
Polishing Method And Polishing Apparatus App 20170361420 - MARUYAMA; Toru ;   et al. | 2017-12-21 |
Polishing method and polishing apparatus Grant 9,782,870 - Maruyama , et al. October 10, 2 | 2017-10-10 |
Apparatus And Method For Regulating Surface Temperature Of Polishing Pad App 20170239778 - MARUYAMA; Toru ;   et al. | 2017-08-24 |
Polishing apparatus Grant 9,669,515 - Matsuo , et al. June 6, 2 | 2017-06-06 |
Method and apparatus for polishing a substrate Grant 9,579,768 - Motoshima , et al. February 28, 2 | 2017-02-28 |
Method And Apparatus For Measuring Surface Properties Of Polishing Pad App 20160184960 - MATSUO; Hisanori ;   et al. | 2016-06-30 |
Polishing apparatus and polishing method Grant 9,242,339 - Matsuo , et al. January 26, 2 | 2016-01-26 |
Method And Apparatus For Judging Polishing Performance Of Polishing Liquid App 20150346088 - TAKATOH; Chikako ;   et al. | 2015-12-03 |
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus Grant 9,156,130 - Shimano , et al. October 13, 2 | 2015-10-13 |
Polishing Apparatus App 20150283669 - MATSUO; Hisanori ;   et al. | 2015-10-08 |
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus Grant 9,108,292 - Shimano , et al. August 18, 2 | 2015-08-18 |
Method And Apparatus For Polishing A Substrate App 20150224621 - MOTOSHIMA; Yasuyuki ;   et al. | 2015-08-13 |
Polishing method Grant 9,067,296 - Ono , et al. June 30, 2 | 2015-06-30 |
Polishing Method And Polishing Apparatus App 20150079881 - MARUYAMA; Toru ;   et al. | 2015-03-19 |
Measuring Method Of Surface Roughness Of Polishing Pad App 20150056891 - MATSUO; Hisanori | 2015-02-26 |
Method of measuring surface properties of polishing pad Grant 8,932,883 - Matsuo , et al. January 13, 2 | 2015-01-13 |
Method Of Obtaining A Sliding Distance Distribution Of A Dresser On A Polishing Member, Method Of Obtaining A Sliding Vector Distribution Of A Dresser On A Polishing Member, And Polishing Apparatus App 20140342642 - SHIMANO; Takahiro ;   et al. | 2014-11-20 |
Method Of Adjusting Profile Of A Polishing Member Used In A Polishing Apparatus, And Polishing Apparatus App 20140287653 - SHIMANO; Takahiro ;   et al. | 2014-09-25 |
Method Of Measuring Surface Properties Of Polishing Pad App 20140273308 - MATSUO; Hisanori ;   et al. | 2014-09-18 |
Polishing Apparatus And Polishing Method App 20140273753 - MATSUO; Hisanori ;   et al. | 2014-09-18 |
Apparatus For Measuring Surface Properties Of Polishing Pad App 20140262027 - MATSUO; Hisanori ;   et al. | 2014-09-18 |
Polishing apparatus and polishing method Grant 8,360,817 - Ishii , et al. January 29, 2 | 2013-01-29 |
Method And Apparatus For Polishing A Substrate App 20130023186 - MOTOSHIMA; Yasuyuki ;   et al. | 2013-01-24 |
CMP Polishing Method, CMP Polishing Apparatus, and Process for Producing Semiconductor Device App 20120315831 - Takada; Syozo ;   et al. | 2012-12-13 |
Polishing Method App 20120276816 - Ono; Katsutoshi ;   et al. | 2012-11-01 |
CMP polishing method, CMP polishing apparatus, and process for producing semiconductor device Grant 8,241,426 - Takada , et al. August 14, 2 | 2012-08-14 |
Polishing Method And Polishing Apparatus App 20120190273 - ONO; Katsutoshi ;   et al. | 2012-07-26 |
Polishing Apparatus And Polishing Method App 20100255756 - ISHII; Yu ;   et al. | 2010-10-07 |
CMP Polishing Method, CMP Polishing Apparatus, and Process for Producing Semiconductor Device App 20090047785 - Takada; Syozo ;   et al. | 2009-02-19 |
Polishing apparatus Grant 7,207,864 - Kamimura , et al. April 24, 2 | 2007-04-24 |
Polishing apparatus App 20060194521 - Kamimura; Kenji ;   et al. | 2006-08-31 |
Polishing apparatus Grant 7,040,968 - Kamimura , et al. May 9, 2 | 2006-05-09 |
Polishing method using an abrading plate Grant 6,942,548 - Wada , et al. September 13, 2 | 2005-09-13 |
Polishing apparatus Grant 6,939,208 - Kamimura , et al. September 6, 2 | 2005-09-06 |
Polishing apparatus App 20050191949 - Kamimura, Kenji ;   et al. | 2005-09-01 |
Polishing apparatus App 20050112998 - Matsuo, Hisanori ;   et al. | 2005-05-26 |
Polishing-product discharging device and polishing device Grant 6,712,678 - Wada , et al. March 30, 2 | 2004-03-30 |
Polishing apparatus and dressing method Grant 6,672,945 - Matsuo , et al. January 6, 2 | 2004-01-06 |
Polishing method and polishing apparatus Grant 6,626,739 - Wada , et al. September 30, 2 | 2003-09-30 |
Polishing apparatus App 20020164932 - Kamimura, Kenji ;   et al. | 2002-11-07 |
Polishing apparatus App 20020151259 - Hirokawa, Kazuto ;   et al. | 2002-10-17 |
Polishing apparatus App 20020137440 - Matsuo, Hisanori ;   et al. | 2002-09-26 |
Abrading plate and polishing method using the same Grant 6,413,149 - Wada , et al. July 2, 2 | 2002-07-02 |
Component development supporting system App 20020073397 - Yoshida, Kazuki ;   et al. | 2002-06-13 |
Polishing apparatus Grant 6,390,901 - Hiyama , et al. May 21, 2 | 2002-05-21 |
Polishing tool and manufacturing method therefor App 20020016139 - Hirokawa, Kazuto ;   et al. | 2002-02-07 |
Polishing method using an abrading plate App 20020006768 - Wada, Yutaka ;   et al. | 2002-01-17 |
Polishing apparatus and method of manufacturing grinding plate App 20010029161 - Hirokawa, Kazuto ;   et al. | 2001-10-11 |
Polishing apparatus App 20010009843 - Hirokawa, Kazuto ;   et al. | 2001-07-26 |
Polishing apparatus App 20010002359 - Matsuo, Hisanori ;   et al. | 2001-05-31 |
Polishing apparatus Grant 6,196,904 - Matsuo , et al. March 6, 2 | 2001-03-06 |
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