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Patent applications and USPTO patent grants for MATSUNAGA; Masanobu.The latest application filed is for "vertical heat treatment apparatus and method of operating vertical heat treatment apparatus".
Patent | Date |
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Vertical Heat Treatment Apparatus And Method Of Operating Vertical Heat Treatment Apparatus App 20150376789 - MOTOYAMA; Yutaka ;   et al. | 2015-12-31 |
Film Forming Apparatus Using Gas Nozzles App 20150275368 - MOTOYAMA; Yutaka ;   et al. | 2015-10-01 |
Vertical Heat Treatment Apparatus, Method Of Operating Vertical Heat Treatment Apparatus, And Storage Medium App 20150259799 - MOTOYAMA; Yutaka ;   et al. | 2015-09-17 |
Vertical film formation apparatus and method for using same Grant 8,563,096 - Matsunaga , et al. October 22, 2 | 2013-10-22 |
Low Temperature Deposition of Silicon-Containing Films App 20130189853 - Yang; Liu ;   et al. | 2013-07-25 |
Low temperature deposition of silicon-containing films Grant 8,298,628 - Yang , et al. October 30, 2 | 2012-10-30 |
Film formation method in vertical batch CVD apparatus Grant 8,257,789 - Matsunaga , et al. September 4, 2 | 2012-09-04 |
Film formation method and apparatus Grant 8,216,648 - Matsunaga , et al. July 10, 2 | 2012-07-10 |
Method For Forming Nitride Film App 20120164848 - FUJII; Motoki ;   et al. | 2012-06-28 |
Film formation method and apparatus for semiconductor process Grant 8,178,448 - Nodera , et al. May 15, 2 | 2012-05-15 |
Film formation apparatus and method for using same Grant 8,080,477 - Nodera , et al. December 20, 2 | 2011-12-20 |
Film formation method and apparatus for semiconductor process Grant 8,080,290 - Hasebe , et al. December 20, 2 | 2011-12-20 |
Vertical Film Formation Apparatus And Method For Using Same App 20110129618 - MATSUNAGA; Masanobu ;   et al. | 2011-06-02 |
Film Formation Method And Apparatus App 20110129619 - Matsunaga; Masanobu ;   et al. | 2011-06-02 |
Film Formation Method And Apparatus For Semiconductor Process App 20100304574 - NODERA; Nobutake ;   et al. | 2010-12-02 |
Low Temperature Deposition of Silicon-Containing Films App 20100304047 - Yang; Liu ;   et al. | 2010-12-02 |
Film Formation Method In Vertical Batch Cvd Apparatus App 20100136260 - Matsunaga; Masanobu ;   et al. | 2010-06-03 |
Film formation method and apparatus for semiconductor process App 20090191722 - Hasebe; Kazuhide ;   et al. | 2009-07-30 |
Vertical plasma processing apparatus and method for using same App 20090124087 - Nodera; Nobutake ;   et al. | 2009-05-14 |
Film formation apparatus and method for using same App 20090117743 - Nodera; Nobutake ;   et al. | 2009-05-07 |
Film formation method and apparatus for semiconductor process App 20080311760 - Nodera; Nobutake ;   et al. | 2008-12-18 |
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