loadpatents
Patent applications and USPTO patent grants for Matsumura; Atsuki.The latest application filed is for "semiconductor substrate and method for production thereof".
Patent | Date |
---|---|
Semiconductor substrate and method for production thereof Grant 8,043,929 - Brunner , et al. October 25, 2 | 2011-10-25 |
Semiconductor Substrate And Method For Production Thereof App 20080268613 - Brunner; Josef ;   et al. | 2008-10-30 |
SOI substrate, semiconductor substrate, and method for production thereof Grant 7,320,925 - Sasaki , et al. January 22, 2 | 2008-01-22 |
Wafer holding, wafer support member, wafer boat and heat treatment furnace Grant 7,204,887 - Kawamura , et al. April 17, 2 | 2007-04-17 |
SOI substrate Grant 7,084,459 - Sasaki , et al. August 1, 2 | 2006-08-01 |
Production method for SIMOX substrate and SIMOX substrate Grant 7,067,402 - Matsumura , et al. June 27, 2 | 2006-06-27 |
Semiconductor substrate and method for production thereof App 20050139961 - Brunner, Josef ;   et al. | 2005-06-30 |
SOI substrate, semiconductor substrate, and method for production thereof App 20040253793 - Sasaki, Tsutomu ;   et al. | 2004-12-16 |
Production method for simox substrate and simox substrate App 20040171228 - Matsumura, Atsuki ;   et al. | 2004-09-02 |
Simox substrate and method for production thereof Grant 6,767,801 - Kawamura , et al. July 27, 2 | 2004-07-27 |
Process for fabrication of a SIMOX substrate Grant 6,740,565 - Matsumura , et al. May 25, 2 | 2004-05-25 |
Soi substrate App 20040018363 - Sasaki, Tsutomu ;   et al. | 2004-01-29 |
Simox substrate production process and simox substrate App 20030170940 - Matsumura, Atsuki ;   et al. | 2003-09-11 |
SOI substrate and method for production thereof Grant 6,617,034 - Hamaguchi , et al. September 9, 2 | 2003-09-09 |
Simox substrate and method for production thereof App 20030036289 - Kawamura, Keisuke ;   et al. | 2003-02-20 |
Wafer holder, wafer support member, wafer holding device, and heat treating furnance App 20030029570 - Kawamura, Keisuke ;   et al. | 2003-02-13 |
Superconductive tunnel junction array radiation detector Grant 5,753,935 - Kurakado , et al. May 19, 1 | 1998-05-19 |
Radiation sensing device and Josephson device Grant 5,321,276 - Kurakado , et al. June 14, 1 | 1994-06-14 |
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