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Plating solution, semiconductor device and method for manufacturing the same Grant 7,344,986 - Inoue , et al. March 18, 2 | 2008-03-18 |
Semiconductor device, method for manufacturing the same, and plating solution App 20080011228 - Inoue; Hiroaki ;   et al. | 2008-01-17 |
Semiconductor device, method for manufacturing the same, and plating solution Grant 7,279,408 - Inoue , et al. October 9, 2 | 2007-10-09 |
Substrate processing apparatus and substrate plating apparatus Grant 7,208,074 - Mishima , et al. April 24, 2 | 2007-04-24 |
Semiconductor device, method for manufacturing the same, and plating solution Grant 7,060,618 - Inoue , et al. June 13, 2 | 2006-06-13 |
Semiconductor device, method for manufacturing the same, and plating solution App 20060040487 - Inoue; Hiroaki ;   et al. | 2006-02-23 |
Substrate processing apparatus and substrate plating apparatus App 20060027452 - Mishima; Koji ;   et al. | 2006-02-09 |
Method for forming protective film and electroless plating bath App 20050282384 - Nawafune, Hidemi ;   et al. | 2005-12-22 |
Electroless Ni-B plating liquid, electronic device and method for manufacturing the same Grant 6,936,302 - Inoue , et al. August 30, 2 | 2005-08-30 |
Plating apparatus and method App 20050074559 - Inoue, Hiroaki ;   et al. | 2005-04-07 |
Plating apparatus and method Grant 6,858,084 - Inoue , et al. February 22, 2 | 2005-02-22 |
Plating solution, semiconductor device and method for manufacturing the same App 20040235298 - Inoue, Hiroaki ;   et al. | 2004-11-25 |
Semiconductor device and method for manufacturing the same App 20040235237 - Inoue, Hiroaki ;   et al. | 2004-11-25 |
Electroless plating liquid and semiconductor device Grant 6,821,902 - Inoue , et al. November 23, 2 | 2004-11-23 |
Catalyst-imparting treatment solution and electroless plating method App 20040186008 - Inoue, Hiroaki ;   et al. | 2004-09-23 |
Electroless Ni-B plating liquid, electronic device and method for manufacturing the same App 20040182277 - Inoue, Hiroaki ;   et al. | 2004-09-23 |
Electroless plating method and device, and substrate processing method and apparatus App 20040170766 - Inoue, Hiroaki ;   et al. | 2004-09-02 |
Electroless plating liquid and semiconductor device App 20040157441 - Inoue, Hiroaki ;   et al. | 2004-08-12 |
Substrate processing apparatus and substrate plating apparatus App 20040134789 - Mishima, Koji ;   et al. | 2004-07-15 |
Electroless plating liquid and semiconductor device Grant 6,717,189 - Inoue , et al. April 6, 2 | 2004-04-06 |
Electroless Ni--B plating liquid, electronic device and method for manufacturing the same Grant 6,706,422 - Inoue , et al. March 16, 2 | 2004-03-16 |
Substrate processing apparatus and substrate plating apparatus Grant 6,689,257 - Mishima , et al. February 10, 2 | 2004-02-10 |
Semiconductor device, method for manufacturing the same, and plating solution App 20030075808 - Inoue, Hiroaki ;   et al. | 2003-04-24 |
Plating apparatus and method App 20030019426 - Inoue, Hiroaki ;   et al. | 2003-01-30 |
Electroless plating liquid and semiconductor device App 20020185658 - Inoue, Hiroaki ;   et al. | 2002-12-12 |
Electroless Ni-B plating liquid, electronic device and method for manufacturing the same App 20020100391 - Inoue, Hiroaki ;   et al. | 2002-08-01 |
Method for forming interconnects and semiconductor device App 20020090814 - Inoue, Hiroaki ;   et al. | 2002-07-11 |
Substrate processing apparatus and substrate plating apparatus App 20020000371 - Mishima, Koji ;   et al. | 2002-01-03 |
Semiconductor substrate processing apparatus and method App 20010024691 - Kimura, Norio ;   et al. | 2001-09-27 |