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Signal-processing method, signal-processing system, and semiconductor device configured to detect physical-quantity distribution Grant 8,159,564 - Matsumoto , et al. April 17, 2 | 2012-04-17 |
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Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method Grant 7,147,166 - Matsumoto December 12, 2 | 2006-12-12 |
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Transport apparatus App 20040168765 - Matsumoto, Ken | 2004-09-02 |
Force-applying input device App 20040167642 - Matsumoto, Ken ;   et al. | 2004-08-26 |
Semiconductor manufacturing apparatus and method Grant 6,759,334 - Matsumoto July 6, 2 | 2004-07-06 |
Substrate managing system and substrate storing system Grant 6,598,789 - Matsumoto , et al. July 29, 2 | 2003-07-29 |
Semiconductor manufacturing apparatus and method App 20030077912 - Matsumoto, Ken | 2003-04-24 |
Method for transporting substrates and a semiconductor manufacturing apparatus using the method App 20030053894 - Matsumoto, Ken | 2003-03-20 |
Semiconductor manufacturing apparatus and method Grant 6,471,037 - Matsumoto October 29, 2 | 2002-10-29 |
Code reading device and method with light passing through the code twice, an exposure apparatus and a device manufacturing method using the code reading Grant 6,445,450 - Matsumoto September 3, 2 | 2002-09-03 |
A Code Reading Device And Method With Light Passing Through The Code Twice, An Exposure Apparatus And A Device Manufacturing Method Using The Code Reading App 20020030817 - MATSUMOTO, KEN | 2002-03-14 |
Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method App 20020020751 - Matsumoto, Ken | 2002-02-21 |
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