Patent | Date |
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Methods For Modeling Of A Design In Reticle Enhancement Technology App 20220180036 - Ungar; P. Jeffrey ;   et al. | 2022-06-09 |
Methods for modeling of a design in reticle enhancement technology Grant 11,301,610 - Ungar , et al. April 12, 2 | 2022-04-12 |
Methods For Modeling Of A Design In Reticle Enhancement Technology App 20210141988 - Ungar; P. Jeffrey ;   et al. | 2021-05-13 |
Charged particle beam writing apparatus and method for calculating irradiation coefficient Grant 10,381,196 - Matsumoto A | 2019-08-13 |
Wireless module, electronic module, and measuring method Grant 10,234,493 - Matsumoto , et al. | 2019-03-19 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 10,074,516 - Matsumoto September 11, 2 | 2018-09-11 |
Multiple charged particle beam lithography apparatus and multiple charged particle beam lithography method Grant 9,947,509 - Matsumoto April 17, 2 | 2018-04-17 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20170309450 - MATSUMOTO; Hironobu | 2017-10-26 |
Charged particle beam drawing apparatus and drawing data generation method Grant 9,779,913 - Hara , et al. October 3, 2 | 2017-10-03 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 9,721,756 - Matsumoto August 1, 2 | 2017-08-01 |
Multiple Charged Particle Beam Lithography Apparatus And Multiple Charged Particle Beam Lithography Method App 20160349626 - MATSUMOTO; Hironobu | 2016-12-01 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 9,478,391 - Matsumoto October 25, 2 | 2016-10-25 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20160284509 - MATSUMOTO; Hironobu | 2016-09-29 |
Charged Particle Beam Drawing Apparatus And Drawing Data Generation Method App 20160284510 - HARA; Shigehiro ;   et al. | 2016-09-29 |
Multi charged particle beam writing apparatus, and multi charged particle beam writing method Grant 9,437,396 - Matsumoto September 6, 2 | 2016-09-06 |
Wireless Module, Electronic Module, And Measuring Method App 20160069943 - Matsumoto; Hironobu ;   et al. | 2016-03-10 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20160005569 - MATSUMOTO; Hironobu | 2016-01-07 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 9,218,942 - Matsumoto December 22, 2 | 2015-12-22 |
Multi charged particle beam writing apparatus, and multi charged particle beam writing method Grant 9,190,246 - Matsumoto November 17, 2 | 2015-11-17 |
Multi Charged Particle Beam Writing Apparatus, And Multi Charged Particle Beam Writing Method App 20150303029 - MATSUMOTO; Hironobu | 2015-10-22 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20150279611 - Matsumoto; Hironobu | 2015-10-01 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 9,018,602 - Matsumoto April 28, 2 | 2015-04-28 |
Multi Charged Particle Beam Writing Apparatus, And Multi Charged Particle Beam Writing Method App 20140346369 - MATSUMOTO; Hironobu | 2014-11-27 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,791,432 - Matsumoto July 29, 2 | 2014-07-29 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,759,799 - Matsumoto June 24, 2 | 2014-06-24 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20140077103 - MATSUMOTO; Hironobu | 2014-03-20 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20130134329 - MATSUMOTO; Hironobu | 2013-05-30 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20120085940 - Matsumoto; Hironobu | 2012-04-12 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20110253912 - MATSUMOTO; Hironobu | 2011-10-20 |