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Resist Composition And Method Of Forming Resist Pattern App 20210003918 - FUKUMURA; Yuki ;   et al. | 2021-01-07 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure Grant 10,179,866 - Kawaue , et al. Ja | 2019-01-15 |
Method of producing structure containing phase-separated structure, block copolymer composition, and organic solvent used for block copolymer composition Grant 10,100,221 - Yamano , et al. October 16, 2 | 2018-10-16 |
Methods of forming patterns of semiconductor devices Grant 10,101,660 - Park , et al. October 16, 2 | 2018-10-16 |
Method of producing structure containing phase-separated structure and resin composition for forming phase-separated structure Grant 10,066,096 - Kurosawa , et al. September 4, 2 | 2018-09-04 |
Resin Composition For Forming Phase-separated Structure And Method Of Producing Structure Including Phase-separated Structure App 20180171172 - YAMANO; Hitoshi ;   et al. | 2018-06-21 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure Grant 9,914,847 - Kawaue , et al. March 13, 2 | 2018-03-13 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure App 20170362460 - KAWAUE; Akiya ;   et al. | 2017-12-21 |
Undercoat agent and method of forming pattern of layer containing block copolymer Grant 9,834,696 - Senzaki , et al. December 5, 2 | 2017-12-05 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure Grant 9,828,519 - Kawaue , et al. November 28, 2 | 2017-11-28 |
Method of producing structure containing phase-separated structure utilizing a brush composition comprising PS-PMMA Grant 9,821,338 - Yamano , et al. November 21, 2 | 2017-11-21 |
Method of producing structure containing phase-separated structure Grant 9,816,003 - Kurosawa , et al. November 14, 2 | 2017-11-14 |
Brush composition, and method of producing structure containing phase-separated structure Grant 9,776,208 - Yahagi , et al. October 3, 2 | 2017-10-03 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure App 20170240766 - KAWAUE; Akiya ;   et al. | 2017-08-24 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure App 20170240767 - KAWAUE; Akiya ;   et al. | 2017-08-24 |
Methods Of Forming Patterns Of Semiconductor Devices App 20170129972 - PARK; Jeong-Ju ;   et al. | 2017-05-11 |
Undercoat agent and method of producing structure containing phase-separated structure Grant 9,567,477 - Seshimo , et al. February 14, 2 | 2017-02-14 |
Method Of Producing Structure Containing Phase-separated Structure, Block Copolymer Composition, And Organic Solvent Used For Block Copolymer Composition App 20160333217 - YAMANO; Hitoshi ;   et al. | 2016-11-17 |
Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition Grant 9,475,088 - Kurosawa , et al. October 25, 2 | 2016-10-25 |
Method Of Producing Structure Containing Phase-separated Structure And Resin Composition For Forming Phase-separated Structure App 20160280906 - KUROSAWA; Tsuyoshi ;   et al. | 2016-09-29 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern Grant 9,442,371 - Seshimo , et al. September 13, 2 | 2016-09-13 |
Undercoat Agent And Method Of Forming Pattern Of Layer Containing Block Copolymer App 20160257838 - SENZAKI; Takahiro ;   et al. | 2016-09-08 |
Brush Composition And Method Of Producing Structure Containing Phase-separated Structure App 20160194524 - YAMANO; Hitoshi ;   et al. | 2016-07-07 |
Brush Composition, And Method Of Producing Structure Containing Phase-separated Structure App 20160194751 - YAHAGI; Masahito ;   et al. | 2016-07-07 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern Grant 9,206,307 - Matsumiya , et al. December 8, 2 | 2015-12-08 |
Method of producing structure containing phase-separated structure, method of forming pattern, and top coat material Grant 9,169,421 - Matsumiya , et al. October 27, 2 | 2015-10-27 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern App 20150205207 - Seshimo; Takehiro ;   et al. | 2015-07-23 |
Method Of Producing Structure Containing Phase-separated Structure App 20150118397 - Kurosawa; Tsuyoshi ;   et al. | 2015-04-30 |
Method Of Producing Structure Containing Phase-separated Structure, And Block Copolymer Composition App 20150093507 - Kurosawa; Tsuyoshi ;   et al. | 2015-04-02 |
Method Of Producing Structure Containing Phase-separated Structure, Phase Separated Structure, And Block Copolymer Composition App 20150044371 - Kurosawa; Tsuyoshi ;   et al. | 2015-02-12 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern App 20150034593 - Matsumiya; Tasuku ;   et al. | 2015-02-05 |
Undercoat Agent And Method Of Producing Structure Containing Phase-separated Structure App 20150030773 - Seshimo; Takehiro ;   et al. | 2015-01-29 |
Fluorine-containing block copolymeric compound Grant 8,846,838 - Matsumiya , et al. September 30, 2 | 2014-09-30 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern, And Top Coat Material App 20140238954 - Matsumiya; Tasuku ;   et al. | 2014-08-28 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,541,529 - Dazai , et al. September 24, 2 | 2013-09-24 |
Undercoat Agent And Method Of Forming Pattern Of Layer Containing Block Copolymer App 20130243958 - Senzaki; Takahiro ;   et al. | 2013-09-19 |
Positive resist composition and method of forming resist pattern Grant 8,487,056 - Matsumiya , et al. July 16, 2 | 2013-07-16 |
Positive resist composition, method of forming resist pattern using the same, and fluorine-containing polymeric compound Grant 8,404,428 - Matsumiya , et al. March 26, 2 | 2013-03-26 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Fluorine-containing Polymeric Compound App 20130053518 - Matsumiya; Tasuku ;   et al. | 2013-02-28 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,367,296 - Hirano , et al. February 5, 2 | 2013-02-05 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20120329969 - MATSUMIYA; Tasuku ;   et al. | 2012-12-27 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,329,378 - Hirano , et al. December 11, 2 | 2012-12-11 |
Positive resist composition, method of forming resist pattern using the same, and polymeric compound Grant 8,268,529 - Dazai , et al. September 18, 2 | 2012-09-18 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20120202151 - Dazai; Takahiro ;   et al. | 2012-08-09 |
Positive resist composition and method of forming resist pattern Grant 8,236,477 - Matsumiya , et al. August 7, 2 | 2012-08-07 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,232,041 - Dazai , et al. July 31, 2 | 2012-07-31 |
Resist composition, method of forming resist pattern, polymeric compound, and compound Grant 8,227,170 - Dazai , et al. July 24, 2 | 2012-07-24 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,192,915 - Dazai , et al. June 5, 2 | 2012-06-05 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,182,976 - Dazai , et al. May 22, 2 | 2012-05-22 |
Method of forming fine patterns Grant 8,043,798 - Nakamura , et al. October 25, 2 | 2011-10-25 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Fluorine-containing Polymeric Compound App 20110117499 - MATSUMIYA; Tasuku ;   et al. | 2011-05-19 |
Base material for pattern-forming material, positive resist composition and method of resist pattern formation Grant 7,923,192 - Hirayama , et al. April 12, 2 | 2011-04-12 |
Positive resist composition and method of forming resist pattern Grant 7,871,753 - Matsumiya , et al. January 18, 2 | 2011-01-18 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20100233625 - Hirano; Tomoyuki ;   et al. | 2010-09-16 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20100209848 - Dazai; Takahiro ;   et al. | 2010-08-19 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Polymeric Compound App 20100196821 - Dazai; Takahiro ;   et al. | 2010-08-05 |
Positive resist composition and method of forming resist pattern App 20100183981 - Matsumiya; Tasuku ;   et al. | 2010-07-22 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound App 20100178609 - Dazai; Takahiro ;   et al. | 2010-07-15 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20100081086 - HIRANO; Tomoyuki ;   et al. | 2010-04-01 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090162786 - Matsumiya; Tasuku ;   et al. | 2009-06-25 |
Positive photoresist composition and method for forming resist pattern Grant 7,449,276 - Hojo , et al. November 11, 2 | 2008-11-11 |
Positive photoresist composition and method for forming resist pattern App 20070042288 - Hojo; Takuma ;   et al. | 2007-02-22 |
Method for forming resist pattern and resist pattern App 20060127799 - Kubota; Naotaka ;   et al. | 2006-06-15 |
Positive resist composition App 20060063102 - Kubota; Naotaka ;   et al. | 2006-03-23 |
Method of forming fine patterns App 20040104196 - Nakamura, Tsuyoshi ;   et al. | 2004-06-03 |