MATSUKI; Kazuto
Patent Applications and Registrations
Patent applications and USPTO patent grants for MATSUKI; Kazuto.The latest application filed is for "template, method of fabricating template, and method of manufacturing semiconductor device".
- MATSUKI; Kazuto - Oota Tokyo JP
- Matsuki; Kazuto - Ota Tokyo JP
- Matsuki; Kazuto - Tokyo JP
| Patent | Date |
|---|---|
| Template, Method Of Fabricating Template, And Method Of Manufacturing Semiconductor Device App 20190287794 - UMEZAWA; Kaori ; et al. | 2019-09-19 |
| Pattern forming method Grant 10,018,915 - Matsuki , et al. July 10, 2 | 2018-07-10 |
| Electron beam irradiation device Grant 9,960,007 - Matsuki , et al. May 1, 2 | 2018-05-01 |
| Pattern Forming Method App 20170178896 - MATSUKI; Kazuto ; et al. | 2017-06-22 |
| Electron Beam Irradiation Device App 20170076907 - MATSUKI; Kazuto ; et al. | 2017-03-16 |
| Substrate holding apparatus, pattern transfer apparatus, and pattern transfer method Grant 9,188,879 - Kasa , et al. November 17, 2 | 2015-11-17 |
| Substrate Holding Apparatus, Pattern Transfer Apparatus, And Pattern Transfer Method App 20130222782 - KASA; Kentaro ; et al. | 2013-08-29 |
| Pattern Inspection Apparatus App 20120081538 - Ogawa; Riki ; et al. | 2012-04-05 |
| Method of operating laser light source Grant 7,539,222 - Matsuki May 26, 2 | 2009-05-26 |
| Pattern inspecting method and pattern inspecting apparatus Grant 7,359,043 - Tsuchiya , et al. April 15, 2 | 2008-04-15 |
| Method Of Operating Laser Light Source App 20070071042 - Matsuki; Kazuto | 2007-03-29 |
| Pattern inspecting method and pattern inspecting apparatus App 20040184652 - Tsuchiya, Hideo ; et al. | 2004-09-23 |
| Charged particle beam exposure system Grant 5,912,468 - Hirano , et al. June 15, 1 | 1999-06-15 |
| Charged beam drawing method Grant 5,894,057 - Yamaguchi , et al. April 13, 1 | 1999-04-13 |
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