Matsui; Shougo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Matsui; Shougo.The latest application filed is for "dimension checking method".
- Matsui; Shougo - Sagamihara JP
| Patent | Date |
|---|---|
| Dimension checking method Grant 5,012,523 - Kobayashi , et al. April 30, 1 | 1991-04-30 |
| Test method and apparatus for a reticle or mask pattern used in semiconductor device fabrication Grant 4,809,341 - Matsui , et al. February 28, 1 | 1989-02-28 |
| Method for measuring dimensions of fine pattern Grant 4,790,023 - Matsui , et al. December 6, 1 | 1988-12-06 |
| Reticle used in semiconductor device fabrication and a method for inspecting a reticle pattern thereon Grant 4,603,974 - Matsui August 5, 1 | 1986-08-05 |
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