Matsui; Shin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Matsui; Shin.The latest application filed is for "processing apparatus and method of manufacturing electron emission element and organic el display".

Company Profile

0.14.17

Matsui; Shin - Kawasaki-shi JP
Matsui; Shin - Fujisawa-shi JP
Matsui; Shin - Urawa JP
Matsui; Shin - Fujisawa JP
Matsui; Shin - Saitama JP
Matsui, Shin - Urawa-shi JP
Matsui; Shin - Atsugi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Processing Apparatus and Method of Manufacturing Electron Emission Element and Organic EL Display App 20100273387 - Inoue; Masato ; et al.	2010-10-28
Mask Fixing Device In Vacuum Processing Apparatus App 20100112194 - Inoue; Masato ; et al.	2010-05-06
Processing Apparatus And Image Display Device App 20100079054 - INOUE; Masato ; et al.	2010-04-01
Holding Mechanism, Processing Apparatus Including Holding Mechanism, Deposition Method Using Processing Apparatus, And Method Of Manufacturing Image Display Device App 20100080891 - YOSHIMURA; Masanao ; et al.	2010-04-01
Substrate Holding Apparatus, Carrier, Substrate Processing Apparatus, And Image Display Device Manufacturing Method App 20100081355 - INOUE; Masato ; et al.	2010-04-01
Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus Grant 7,566,422 - Hara , et al. July 28, 2	2009-07-28
Display Substrate Manufacturing Method And Vacuum Processing Apparatus App 20090088041 - Inoue; Masato ; et al.	2009-04-02
Holding system, exposure apparatus, and device manufacturing method Grant 7,218,383 - Matsui May 15, 2	2007-05-15
Holding System, Exposure Apparatus, And Device Manufacturing Method App 20070061609 - MATSUI; Shin	2007-03-15
Holding system, exposure apparatus, and device manufacturing method Grant 7,187,432 - Matsui March 6, 2	2007-03-06
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method Grant 7,102,735 - Matsui September 5, 2	2006-09-05
Method of manufacturing hermetically sealed container and image display apparatus App 20060042316 - Hasegawa; Mitsutoshi ; et al.	2006-03-02
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method App 20060033904 - Matsui; Shin	2006-02-16
Processing apparatus, measuring apparatus, and device manufacturing method Grant 6,984,362 - Hara , et al. January 10, 2	2006-01-10
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method Grant 6,982,784 - Matsui January 3, 2	2006-01-03
Processing apparatus, measuring apparatus, and device manufacturing method App 20050271558 - Hara, Shinichi ; et al.	2005-12-08
Electron beam exposure apparatus and semiconductor device manufacturing method Grant 6,930,756 - Akutsu , et al. August 16, 2	2005-08-16
Holding system, exposure apparatus, and device manufacturing method App 20050128462 - Matsui, Shin	2005-06-16
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method Grant 6,862,080 - Matsui March 1, 2	2005-03-01
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method App 20050018169 - Matsui, Shin	2005-01-27
Processing apparatus, measuring apparatus, and device manufacturing method App 20040022694 - Hara, Shinichi ; et al.	2004-02-05
Electron beam exposure apparatus and semiconductor device manufacturing method App 20040012765 - Akutsu, Kotaro ; et al.	2004-01-22
Processing apparatus with pressure control and gas recirculation system Grant 6,616,898 - Hara , et al. September 9, 2	2003-09-09
Processing Apparatus, Measuring Apparatus, And Device Manufacturing Method App 20020094306 - HARA, SHINICHI ; et al.	2002-07-18
Positioning stage system and position measuring method Grant 6,404,505 - Matsui June 11, 2	2002-06-11
Positioning Stage System And Position Measuring Method App 20020003629 - MATSUI, SHIN	2002-01-10
Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method App 20010033369 - Matsui, Shin	2001-10-25
Electron beam exposure apparatus Grant 6,225,637 - Terashima , et al. May 1, 2	2001-05-01
Electron beam exposure apparatus Grant 6,054,713 - Miyake , et al. April 25, 2	2000-04-25
Substrate holding device and exposing apparatus using the same Grant 5,883,932 - Chiba , et al. March 16, 1	1999-03-16
Substrate conveying apparatus Grant 5,277,539 - Matsui , et al. January 11, 1	1994-01-11

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