Matrix Integrated Systems, Inc.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Matrix Integrated Systems, Inc..The latest application filed is for "apparatus for increased workpiece throughput".
- Matrix Integrated Systems, Inc. - Richmond CA
| Patent | Date |
|---|---|
| Apparatus for increased workpiece throughput Grant 6,736,927 - Wang , et al. May 18, 2 | 2004-05-18 |
| Method for producing flat wafer chucks Grant 6,660,975 - Wang , et al. December 9, 2 | 2003-12-09 |
| Method for increased workpiece throughput Grant 6,605,226 - Wang , et al. August 12, 2 | 2003-08-12 |
| End-effector with integrated cooling mechanism Grant 6,499,777 - Wang December 31, 2 | 2002-12-31 |
| Rapid heating and cooling of workpiece chucks Grant 6,461,801 - Wang October 8, 2 | 2002-10-08 |
| Remote plasma mixer Grant 6,352,050 - Kamarehi , et al. March 5, 2 | 2002-03-05 |
| Microwave choke for remote plasma generator Grant 6,263,830 - Kamarehi , et al. July 24, 2 | 2001-07-24 |
| Synchronous multiplexed near zero overhead architecture for vacuum processes Grant 6,228,773 - Cox May 8, 2 | 2001-05-08 |
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