| Patent | Date |
|---|
Illumination And Detection Apparatus For A Metrology Apparatus
App 20220276180 - PANDEY; Nitesh ; et al. | 2022-09-01 |
Method And System For Determining Information About A Target Structure
App 20220276569 - DEN BOEF; Arie Jeffrey ; et al. | 2022-09-01 |
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
Grant 11,391,677 - Witte , et al. July 19, 2 | 2022-07-19 |
Metrology sensor for position metrology
Grant 11,360,399 - Goorden , et al. June 14, 2 | 2022-06-14 |
Method to determine a patterning process parameter
Grant 11,300,883 - Jak , et al. April 12, 2 | 2022-04-12 |
Metrology Method
App 20220075276 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2022-03-10 |
Method For Overlay Metrology And Apparatus Thereof
App 20220074875 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2022-03-10 |
Metrology Sensor For Position Metrology
App 20220035257 - GOORDEN; Sebastianus Adrianus ; et al. | 2022-02-03 |
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
Grant 11,022,900 - Mathijssen , et al. June 1, 2 | 2021-06-01 |
Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus
Grant 10,983,361 - Roobol , et al. April 20, 2 | 2021-04-20 |
Mark position determination method
Grant 10,942,460 - Mathijssen , et al. March 9, 2 | 2021-03-09 |
Metrology method and apparatus and computer program
Grant 10,908,513 - Noot , et al. February 2, 2 | 2021-02-02 |
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
App 20200348605 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2020-11-05 |
HHG source, inspection apparatus and method for performing a measurement
Grant 10,816,906 - Lin , et al. October 27, 2 | 2020-10-27 |
Metrology sensor, lithographic apparatus and method for manufacturing devices
Grant 10,788,766 - Goorden , et al. September 29, 2 | 2020-09-29 |
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
Grant 10,761,432 - Mathijssen , et al. Sep | 2020-09-01 |
Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus
App 20200232931 - WITTE; Stefan Michiel ; et al. | 2020-07-23 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,705,437 - Javaheri , et al. | 2020-07-07 |
Metrology in lithographic processes
Grant 10,656,533 - Mathijssen , et al. | 2020-05-19 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method
Grant 10,649,344 - Roobol , et al. | 2020-05-12 |
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
Grant 10,648,919 - Witte , et al. | 2020-05-12 |
Apparatus for delivering gas and illumination source for generating high harmonic radiation
Grant 10,630,037 - Srivastava , et al. | 2020-04-21 |
Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices
App 20200103772 - GOORDEN; Sebastianus Adrianus ; et al. | 2020-04-02 |
Substrate edge detection
Grant 10,607,873 - Janda , et al. | 2020-03-31 |
Metrology apparatus, lithographic system, and method of measuring a structure
Grant 10,599,047 - Ravensbergen , et al. | 2020-03-24 |
Alignment system
Grant 10,585,363 - Mathijssen , et al. | 2020-03-10 |
Position sensor, lithographic apparatus and method for manufacturing devices
Grant 10,527,959 - Huisman , et al. J | 2020-01-07 |
Apparatus for delivering gas and illumination source for generating high harmonic radiation
Grant 10,530,111 - Srivastava , et al. J | 2020-01-07 |
Alignment method
Grant 10,514,620 - Bijnen , et al. Dec | 2019-12-24 |
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
Grant 10,474,039 - Hinnen , et al. Nov | 2019-11-12 |
Alignment sensor for lithographic apparatus
Grant 10,466,601 - Polo , et al. No | 2019-11-05 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method
Grant 10,451,559 - Van Voorst , et al. Oc | 2019-10-22 |
Metrology parameter determination and metrology recipe selection
Grant 10,451,978 - Bhattacharyya , et al. Oc | 2019-10-22 |
Position measuring method of an alignment target
Grant 10,416,577 - Brinkhof , et al. Sept | 2019-09-17 |
Lithographic apparatus alignment sensor and method
Grant 10,386,735 - Mathijssen , et al. A | 2019-08-20 |
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
Grant 10,379,448 - Mathijssen , et al. A | 2019-08-13 |
Alignment Method
App 20190227446 - BIJNEN; Franciscus Godefridus Casper ; et al. | 2019-07-25 |
Apparatus For Delivering Gas and Illumination Source for Generating High Harmonic Radiation
App 20190212657 - SRIVASTAVA; Sudhir ; et al. | 2019-07-11 |
Position Sensor, Lithographic Apparatus And Method For Manufacturing Devices
App 20190212658 - HUISMAN; Simon Reinald ; et al. | 2019-07-11 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method
Grant 10,330,606 - Van Voorst , et al. | 2019-06-25 |
HHG Source, Inspection Apparatus and Method for Performing a Measurement
App 20190155171 - LIN; Nan ; et al. | 2019-05-23 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method
Grant 10,267,744 - Tinnemans , et al. | 2019-04-23 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20190107785 - JAVAHERI; Narjes ; et al. | 2019-04-11 |
Substrate Edge Detection
App 20190101839 - JANDA; Eric Anthony ; et al. | 2019-04-04 |
Method to Determine a Patterning Process Parameter
App 20190094703 - JAK; Martin Jacobus Johan ; et al. | 2019-03-28 |
Mark Position Determination Method
App 20190086824 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2019-03-21 |
HHG source, inspection apparatus and method for performing a measurement
Grant 10,234,771 - Lin , et al. | 2019-03-19 |
Metrology in Lithographic Processes
App 20190079413 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2019-03-14 |
Metrology Method and Apparatus and Computer Program
App 20190033727 - NOOT; Marc Johannes ; et al. | 2019-01-31 |
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method
App 20190003981 - Van Voorst; Peter Danny ; et al. | 2019-01-03 |
Metrology Parameter Determination And Metrology Recipe Selection
App 20190004437 - Bhattacharyya; Kaustuve ; et al. | 2019-01-03 |
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure
App 20180348645 - Ravensbergen; Janneke ; et al. | 2018-12-06 |
Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus
App 20180348145 - WITTE; Stefan Michiel ; et al. | 2018-12-06 |
Method and apparatus for determining the property of a structure, device manufacturing method
Grant 10,133,192 - Tinnemans , et al. November 20, 2 | 2018-11-20 |
Alignment Sensor For Lithographic Apparatus
App 20180329316 - POLO; Alessandro ; et al. | 2018-11-15 |
Position Measuring Method Of An Alignment Target
App 20180329307 - BRINKHOF; Ralph ; et al. | 2018-11-15 |
Metrology apparatus, method of measuring a structure and lithographic apparatus
Grant 10,101,675 - Polo , et al. October 16, 2 | 2018-10-16 |
Apparatus For Delivering Gas and Illumination Source for Generating High Harmonic Radiation
App 20180267411 - SRIVASTAVA; Sudhir ; et al. | 2018-09-20 |
Lithographic apparatus and method for performing a measurement
Grant 10,067,068 - Den Boef , et al. September 4, 2 | 2018-09-04 |
Lithographic Apparatus Alignment Sensor and Method
App 20180246423 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-08-30 |
Methods of Aligning a Diffractive Optical System and Diffracting Beams, Diffractive Optical Element and Apparatus
App 20180239160 - Roobol; Sander Bas ; et al. | 2018-08-23 |
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
App 20180239263 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2018-08-23 |
Method and apparatus for generating illuminating radiation
Grant 10,048,596 - Lin , et al. August 14, 2 | 2018-08-14 |
Methods And Apparatus For Predicting Performance Of A Measurement Method, Measurement Method And Apparatus
App 20180224753 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-08-09 |
Alignment System
App 20180149987 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-05-31 |
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method
App 20180136568 - ROOBOL; Sander Bas ; et al. | 2018-05-17 |
Position measurement with illumination profile having two diametrically opposed off-axis radiation
Grant 9,970,747 - Kreuzer , et al. May 15, 2 | 2018-05-15 |
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
Grant 9,958,791 - Mathijssen , et al. May 1, 2 | 2018-05-01 |
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
Grant 9,939,742 - Tinnemans , et al. April 10, 2 | 2018-04-10 |
Polarization independent interferometer
Grant 9,927,726 - Tinnemans , et al. March 27, 2 | 2018-03-27 |
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method
App 20180073992 - VAN VOORST; Peter Danny ; et al. | 2018-03-15 |
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method
App 20180011029 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2018-01-11 |
Alignment sensor and lithographic apparatus
Grant 9,857,703 - Mathijssen , et al. January 2, 2 | 2018-01-02 |
Inspection method and apparatus, substrates for use therein and device manufacturing method
Grant 9,835,954 - Bogaart , et al. December 5, 2 | 2017-12-05 |
Method and Apparatus for Generating Illuminating Radiation
App 20170322497 - LIN; Nan ; et al. | 2017-11-09 |
Method and Apparatus for Determining the Property of a Structure, Device Manufacturing Method
App 20170315055 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2017-11-02 |
HHG Source, Inspection Apparatus and Method for Performing a Measurement
App 20170315456 - LIN; Nan ; et al. | 2017-11-02 |
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
Grant 9,778,025 - Mathijssen , et al. October 3, 2 | 2017-10-03 |
Metrology Apparatus, Method of Measuring a Structure and Lithographic Apparatus
App 20170255104 - POLO; Alessandro ; et al. | 2017-09-07 |
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
Grant 9,733,572 - Mathijssen August 15, 2 | 2017-08-15 |
Alignment Sensor and Lithographic Apparatus
App 20170212434 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2017-07-27 |
Lithographic Apparatus and Method for Performing a Measurement
App 20170184511 - DEN BOEF; Arie Jeffrey ; et al. | 2017-06-29 |
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method
App 20170176870 - HINNEN; Paul Christiaan ; et al. | 2017-06-22 |
Position Measurement with Illumination Profile having Regions Confined to Peripheral Portion of Pupil
App 20170160075 - KREUZER; Justin Lloyd ; et al. | 2017-06-08 |
Inspection apparatus, inspection method and manufacturing method
Grant 9,632,039 - Den Boef , et al. April 25, 2 | 2017-04-25 |
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
Grant 9,606,442 - Mathijssen , et al. March 28, 2 | 2017-03-28 |
Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method
Grant 9,551,939 - Mathijssen , et al. January 24, 2 | 2017-01-24 |
Alignment sensor, lithographic apparatus and alignment method
Grant 9,547,241 - Den Boef , et al. January 17, 2 | 2017-01-17 |
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
Grant 9,506,743 - Den Boef , et al. November 29, 2 | 2016-11-29 |
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
App 20160274472 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2016-09-22 |
Polarization Independent Interferometer
App 20160223920 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2016-08-04 |
Inspection Method and Apparatus, Substrates for use Therein and Device Manufacturing Method
App 20160097983 - BOGAART; Erik Willem ; et al. | 2016-04-07 |
Alignment Sensor, Lithographic Apparatus And Alignment Method
App 20160077445 - DEN BOEF; Arie Jeffrey ; et al. | 2016-03-17 |
Level sensor arrangement in a lithographic apparatus for measuring multi-layer surfaces
Grant 9,279,657 - Mathijssen , et al. March 8, 2 | 2016-03-08 |
Inspection Apparatus, Inspection Method And Manufacturing Method
App 20160061750 - DEN BOEF; Arie Jeffrey ; et al. | 2016-03-03 |
Method And Apparatus For Measuring Asymmetry Of A Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20150355554 - MATHIJSSEN; Simon Gijsbert Josephus | 2015-12-10 |
Position Measuring Apparatus, Position Measuring Method, Lithographic Apparatus and Device Manufacturing Method
App 20150261097 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2015-09-17 |
Mark Position Measuring Apparatus And Method, Lithographic Apparatus And Device Manufacturing Method
App 20150234290 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2015-08-20 |
Method And Apparatus For Measuring Asymmetry Of A Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20150227061 - Tinnemans; Patricius Aloysius Jacobus ; et al. | 2015-08-13 |
Position Measuring Apparatus, Position Measuring Method, Lithographic Apparatus And Device Manufacturing Method
App 20150219438 - Den Boef; Arie Jeffrey ; et al. | 2015-08-06 |
Method And Apparatus For Measuring Asymmetry Of A Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20150176979 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2015-06-25 |
Level Sensor Arrangement for Lithographic Apparatus, Lithographic Apparatus and Device Manufacturing Method
App 20130201486 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2013-08-08 |
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