Matejka; Ulrich

Patent Applications and Registrations

Patent applications and USPTO patent grants for Matejka; Ulrich.The latest application filed is for "device and method for measuring substrates for semiconductor lithography".

Company Profile

10.20.18

Matejka; Ulrich - Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Device And Method For Measuring Substrates For Semiconductor Lithography App 20220276571 - Seidel; Dirk ; et al.	2022-09-01
Apparatus And Method For A Scanning Probe Microscope App 20220146548 - Matejka; Ulrich ; et al.	2022-05-12
Method And Apparatus For Characterizing A Microlithographic Mask App 20220075272 - Matejka; Ulrich ; et al.	2022-03-10
Apparatus and method for a scanning probe microscope Grant 11,237,185 - Matejka , et al. February 1, 2	2022-02-01
Apparatus And Method For Characterizing A Microlithographic Mask App 20210397099 - Ruoff; Johannes ; et al.	2021-12-23
Device and method for characterizing a microlithographic mask Grant 11,112,702 - Martin , et al. September 7, 2	2021-09-07
Method for detecting a structure of a lithography mask and device for carrying out the method Grant 11,079,338 - Matejka , et al. August 3, 2	2021-08-03
Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type Grant 11,029,259 - Matejka , et al. June 8, 2	2021-06-08
Method For Detecting An Object Structure And Apparatus For Carrying Out The Method App 20210081693 - Mout; Beat Marco ; et al.	2021-03-18
Device And Method For Characterizing A Microlithographic Mask App 20210063892 - Martin; Sven ; et al.	2021-03-04
Method and device for characterizing a mask for microlithography Grant 10,698,318 - Seitz , et al.	2020-06-30
Detection Device For Detecting A Structure On An Area Portion Of A Lithography Mask, And Apparatus Comprising A Detection Device App 20200191728 - Matejka; Ulrich ; et al.	2020-06-18
Method for three-dimensionally measuring a 3D aerial image of a lithography mask Grant 10,634,886 - Matejka , et al.	2020-04-28
Imaging optical unit for a metrology system for examining a lithography mask Grant 10,606,048 - Ruoff , et al.	2020-03-31
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit Grant 10,578,881 - Frank , et al.	2020-03-03
Apparatus And Method For A Scanning Probe Microscope App 20200025796 - Matejka; Ulrich ; et al.	2020-01-23
Method For Detecting A Structure Of A Lithography Mask And Device For Carrying Out The Method App 20190391087 - Matejka; Ulrich ; et al.	2019-12-26
Illumination Optical Unit For A Metrology System And Metrology System Comprising Such An Illumination Optical Unit App 20190121145 - Frank; Thomas ; et al.	2019-04-25
Method And Device For Characterizing A Mask For Microlithography App 20190011839 - Seitz; Holger ; et al.	2019-01-10
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit Grant 10,168,539 - Frank , et al. J	2019-01-01
Method For Three-dimensionally Measuring A 3d Aerial Image Of A Lithography Mask App 20180357758 - Matejka; Ulrich ; et al.	2018-12-13
Method for three-dimensionally measuring a 3D aerial image of a lithography mask Grant 10,068,325 - Matejka , et al. September 4, 2	2018-09-04
Illumination Optical Unit For A Metrology System And Metrology System Comprising Such An Illumination Optical Unit App 20180173001 - Frank; Thomas ; et al.	2018-06-21
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit Grant 9,904,060 - Frank , et al. February 27, 2	2018-02-27
Method For Three-dimensionally Measuring A 3d Aerial Image Of A Lithography Mask App 20170132782 - Matejka; Ulrich ; et al.	2017-05-11
Imaging Optical Unit For A Metrology System For Examining A Lithography Mask App 20170131528 - Ruoff; Johannes ; et al.	2017-05-11
Emulation of reproduction of masks corrected by local density variations Grant 9,535,244 - Seitz , et al. January 3, 2	2017-01-03
Method for simulating an aerial image Grant 9,207,544 - Matejka December 8, 2	2015-12-08
Emulation Of Reproduction Of Masks Corrected By Local Density Variations App 20150198798 - Seitz; Holger ; et al.	2015-07-16
Mask inspection microscope with variable illumination setting Grant 8,970,951 - Matejka , et al. March 3, 2	2015-03-03
Illumination Optical Unit For A Metrology System And Metrology System Comprising Such An Illumination Optical Unit App 20150001408 - Frank; Thomas ; et al.	2015-01-01
Method and apparatus for measuring of masks for the photo-lithography Grant 8,730,474 - Scheruebl , et al. May 20, 2	2014-05-20
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant RE44,216 - Totzeck , et al. May 14, 2	2013-05-14
Method For Simulating An Aerial Image App 20120320183 - Matejka; Ulrich	2012-12-20

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.