Masuyuki, Takashi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Masuyuki, Takashi.The latest application filed is for "exposure method, exposure apparatus, and process of production of device".
- Masuyuki, Takashi - Frankfurt DE
- Masuyuki, Takashi - Kawasaki-shi JP
- Masuyuki; Takashi - Tokyo JP
- Masuyuki; Takashi - Kawasaki JP
| Patent | Date |
|---|---|
| Exposure method, exposure apparatus, and process of production of device App 20020054231 - Masuyuki, Takashi | 2002-05-09 |
| Photomask and exposure method App 20010031406 - Masuyuki, Takashi | 2001-10-18 |
| Substrate adjuster, substrate holder and substrate holding method Grant 6,137,562 - Masuyuki , et al. October 24, 2 | 2000-10-24 |
| Method of measuring the bent shape of a movable mirror of an exposure apparatus Grant 5,473,435 - Masuyuki , et al. December 5, 1 | 1995-12-05 |
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