| Patent | Date |
|---|
Polishing head and polishing apparatus
Grant 9,266,216 - Masumura February 23, 2 | 2016-02-23 |
Polishing Head And Polishing Apparatus
App 20150017890 - Masumura; Hisashi | 2015-01-15 |
Polishing Head And Polishing Apparatus
App 20140113531 - Masumura; Hisashi | 2014-04-24 |
Polishing Head, Polishing Apparatus, And Method For Polishing Workpiece
App 20140101925 - Masumura; Hisashi | 2014-04-17 |
Polishing head and polishing apparatus
Grant 8,636,561 - Masumura , et al. January 28, 2 | 2014-01-28 |
Vapor-phase Growth Semiconductor Substrate Support Susceptor, Epitaxial Wafer Manufacturing Apparatus, And Epitaxial Wafer Manufacturing Method
App 20120309175 - Masumura; Hisashi | 2012-12-06 |
Polishing head, polishing apparatus and method for demounting workpiece
Grant 8,323,075 - Masumura , et al. December 4, 2 | 2012-12-04 |
Workpiece holder for polishing, workpiece polishing apparatus and polishing method
Grant 8,268,114 - Masumura , et al. September 18, 2 | 2012-09-18 |
Polishing head and polishing apparatus
Grant 8,092,281 - Masumura , et al. January 10, 2 | 2012-01-10 |
Polishing head and polishing apparatus having the same
Grant 8,021,210 - Masumura , et al. September 20, 2 | 2011-09-20 |
Polishing Head And Polishing Apparatus
App 20110136414 - Masumura; Hisashi ; et al. | 2011-06-09 |
Method For Manufacturing Polishing Head And Polishing Apparatus
App 20110070813 - Masumura; Hisashi ; et al. | 2011-03-24 |
Polishing Head And Polishing Apparatus Having The Same
App 20100291838 - Masumura; Hisashi ; et al. | 2010-11-18 |
Polishing Head, Polishing Apparatus And Method For Demounting Workpiece
App 20100233945 - Masumura; Hisashi ; et al. | 2010-09-16 |
Polishing Head And Polishing Apparatus
App 20100210192 - Masumura; Hisashi ; et al. | 2010-08-19 |
Polishing head, polishing apparatus and polishing method for semiconductor wafer
Grant 7,740,521 - Hashimoto , et al. June 22, 2 | 2010-06-22 |
Method and pad for polishing wafer
Grant 7,695,347 - Masumura , et al. April 13, 2 | 2010-04-13 |
Polishing head and polishing apparatus
App 20090291623 - Masumura; Hisashi ; et al. | 2009-11-26 |
Wafer manufacturing method, polishing apparatus, and wafer
Grant 7,582,221 - Netsu , et al. September 1, 2 | 2009-09-01 |
Wafer Manufacturing Method, Polishing Apparatus, And Wafer
App 20090057840 - Netsu; Shigeyoshi ; et al. | 2009-03-05 |
Polishing Head, Polishing Apparatus and Polishing Method for Semiconductor Wafer
App 20080254720 - Hashimoto; Hiromasa ; et al. | 2008-10-16 |
Method and pad for polishing wafer
App 20050014455 - Masumura, Hisashi ; et al. | 2005-01-20 |
Grinding work holding disk, work grinding device and grinding method
App 20040238121 - Masumura, Hisashi ; et al. | 2004-12-02 |
Process for manufacturing semiconductor wafer and semiconductor wafer
App 20040224519 - Ueno, Junichi ; et al. | 2004-11-11 |
Workpiece holder for polishing, polishing apparatus and polishing method
Grant 6,769,966 - Okamura , et al. August 3, 2 | 2004-08-03 |
Process for manufacturing semiconductor wafer and semiconductor wafer
Grant 6,729,941 - Ueno , et al. May 4, 2 | 2004-05-04 |
Wafer manufacturing method, polishing apparatus , and wafer
App 20030022495 - Netsu, Shigeyoshi ; et al. | 2003-01-30 |
Workpiece holder for polishing, polishing apparatus and polishing method
App 20020160697 - Okamura, Kouichi ; et al. | 2002-10-31 |
Method for producing semiconductor wafer and semiconductor wafer
App 20020137313 - Ueno, Junichi ; et al. | 2002-09-26 |
Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece
Grant 6,422,922 - Okamura , et al. July 23, 2 | 2002-07-23 |
Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers
App 20020031990 - Masumura, Hisashi ; et al. | 2002-03-14 |
Polishing method and polishing device
Grant 6,332,830 - Okamura , et al. December 25, 2 | 2001-12-25 |
Automatic workpiece transport apparatus for double-side polishing machine
Grant 6,135,854 - Masumura , et al. October 24, 2 | 2000-10-24 |
Polishing method for semiconductor wafer and polishing pad used therein
Grant 6,120,353 - Suzuki , et al. September 19, 2 | 2000-09-19 |
Carrier for double-side polishing
Grant 6,042,688 - Masumura , et al. March 28, 2 | 2000-03-28 |
Method of polishing semiconductor wafers
Grant 5,951,374 - Kato , et al. September 14, 1 | 1999-09-14 |
Method of manufacturing semiconductor wafers
Grant 5,942,445 - Kato , et al. August 24, 1 | 1999-08-24 |
Apparatus and method for double-sided polishing semiconductor wafers
Grant 5,914,053 - Masumura , et al. June 22, 1 | 1999-06-22 |
Polishing pad used for polishing silicon wafers and polishing method using the same
Grant 5,827,395 - Masumura , et al. October 27, 1 | 1998-10-27 |
Method of manufacturing semiconductor mirror wafers
Grant 5,821,167 - Fukami , et al. October 13, 1 | 1998-10-13 |
Method of manufacturing semiconductor wafers
Grant 5,800,725 - Kato , et al. September 1, 1 | 1998-09-01 |
Epitaxial wafer
Grant 5,705,423 - Sakata , et al. January 6, 1 | 1998-01-06 |
Method of making semiconductor wafers
Grant 5,494,862 - Kato , et al. February 27, 1 | 1996-02-27 |
Method for production of wafer
Grant 5,447,890 - Kato , et al. September 5, 1 | 1995-09-05 |
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