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Semiconductor device having contacts in drawing area and the contacts connected to word lines extending from element formation area Grant 9,917,049 - Nakajima , et al. March 13, 2 | 2018-03-13 |
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Pattern generating method, pattern forming method, and pattern generating program Grant 9,268,208 - Aburada , et al. February 23, 2 | 2016-02-23 |
Integrated circuit device, method for producing mask layout, and program for producing mask layout Grant 9,257,367 - Okada , et al. February 9, 2 | 2016-02-09 |
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Method of manufacturing semiconductor device using sidewall films for pitch multiplication in forming interconnects Grant 9,177,854 - Nakajima , et al. November 3, 2 | 2015-11-03 |
Semiconductor memory device and method for manufacturing same Grant 9,159,726 - Yamane , et al. October 13, 2 | 2015-10-13 |
Nonvolatile Semiconductor Memory Device And Method For Manufacturing Same App 20150262932 - YAMANE; Osamu ;   et al. | 2015-09-17 |
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Pattern Data Generation Method, Pattern Verification Method, And Optical Image Calculation Method App 20150113485 - MIYOSHI; Seiro ;   et al. | 2015-04-23 |
Pattern data generation method, pattern verification method, and optical image calculation method Grant 8,984,454 - Miyoshi , et al. March 17, 2 | 2015-03-17 |
Semiconductor Memory Device And Method For Manufacturing Same App 20150069568 - Yamane; Osamu ;   et al. | 2015-03-12 |
Integrated Circuit Device, Method For Producing Mask Layout, And Program For Producing Mask Layout App 20140252639 - OKADA; Motohiro ;   et al. | 2014-09-11 |
Pattern Data Generation Method, Pattern Verification Method, And Optical Image Calculation Method App 20140059502 - MIYOSHI; Seiro ;   et al. | 2014-02-27 |
Semiconductor Device And Method Of Manufacturing The Same App 20140017887 - NAKAJIMA; Fumiharu ;   et al. | 2014-01-16 |
Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program Grant 8,617,999 - Mashita , et al. December 31, 2 | 2013-12-31 |
Method of correcting mask pattern, computer program product, and method of manufacturing semiconductor device Grant 8,617,773 - Uno , et al. December 31, 2 | 2013-12-31 |
Pattern correcting method, mask forming method, and method of manufacturing semiconductor device Grant 8,443,310 - Kajiwara , et al. May 14, 2 | 2013-05-14 |
Pattern Generating Method, Pattern Forming Method, And Pattern Generating Program App 20130063707 - ABURADA; Ryota ;   et al. | 2013-03-14 |
Pattern generation method, computer-readable recording medium, and semiconductor device manufacturing method Grant 8,347,241 - Nakajima , et al. January 1, 2 | 2013-01-01 |
Pattern dimension calculation method and computer program product Grant 8,336,005 - Taguchi , et al. December 18, 2 | 2012-12-18 |
Pattern generating method, method of manufacturing semiconductor device, computer program product, and pattern-shape-determination-parameter generating method Grant 8,307,310 - Kotani , et al. November 6, 2 | 2012-11-06 |
Semiconductor device and method for manufacturing same Grant 8,283,791 - Toba , et al. October 9, 2 | 2012-10-09 |
Semiconductor Device And Method Of Manufacturing The Same App 20120241834 - Nakajima; Fumiharu ;   et al. | 2012-09-27 |
Pattern Correcting Method, Mask Forming Method, And Method Of Manufacturing Semiconductor Device App 20120246601 - KAJIWARA; Masanari ;   et al. | 2012-09-27 |
Method Of Correcting Mask Pattern, Computer Program Product, Mask Pattern Correcting Apparatus, And Method Of Manufacturing Semiconductor Device App 20120244707 - Uno; Taiga ;   et al. | 2012-09-27 |
Pattern generating method, method of manufacturing semiconductor device, and recording medium Grant 8,266,552 - Taguchi , et al. September 11, 2 | 2012-09-11 |
Semiconductor integrated circuit including semiconductor memory Grant 8,243,491 - Hisada , et al. August 14, 2 | 2012-08-14 |
Method Of Manufacturing Semiconductor Device And Computer Readable Medium For Storing Pattern Size Setting Program App 20120184109 - MASHITA; Hiromitsu ;   et al. | 2012-07-19 |
Creating mask data of integrated circuit patterns using calculated etching conversion difference Grant 8,196,071 - Mashita , et al. June 5, 2 | 2012-06-05 |
Method of fabricating semiconductor device and semiconductor device Grant 8,183,148 - Aburada , et al. May 22, 2 | 2012-05-22 |
Mask pattern data generation method, mask manufacturing method, semiconductor device manufacturing method, and pattern data generation program Grant 8,146,022 - Mashita , et al. March 27, 2 | 2012-03-27 |
Method for manufacturing semiconductor device and computer readable medium for storing pattern size setting program Grant 8,143,171 - Mashita , et al. March 27, 2 | 2012-03-27 |
Pattern verification method, method of manufacturing semiconductor device, and recording media Grant 8,108,824 - Kotani , et al. January 31, 2 | 2012-01-31 |
Semiconductor Memory Device And Manufacturing Method Thereof App 20120020158 - OZAKI; Tohru ;   et al. | 2012-01-26 |
Semiconductor Device And Method For Manufacturing Same App 20120001331 - Toba; Takayuki ;   et al. | 2012-01-05 |
Pattern Dimension Calculation Method And Computer Program Product App 20110307845 - TAGUCHI; Takafumi ;   et al. | 2011-12-15 |
Semiconductor Integrated Circuit Including Semiconductor Memory App 20110176347 - HISADA; Toshiki ;   et al. | 2011-07-21 |
Pattern layout of integrated circuit Grant 7,941,782 - Kai , et al. May 10, 2 | 2011-05-10 |
Mask Pattern Determining Method, Mask Manufacturing Method, And Device Manufacturing Method App 20110065030 - KOTANI; Toshiya ;   et al. | 2011-03-17 |
Pattern Determining Method App 20110047518 - Aiba; Issui ;   et al. | 2011-02-24 |
Lithography simulation method, program and semiconductor device manufacturing method Grant 7,831,953 - Satake , et al. November 9, 2 | 2010-11-09 |
Method Of Manufacturing Semiconductor Device And Exposure Device App 20100266960 - MASHITA; Hiromitsu ;   et al. | 2010-10-21 |
Pattern Generating Method, Method Of Manufacturing Semiconductor Device, And Computer Program Product App 20100241261 - TAGUCHI; Takafumi ;   et al. | 2010-09-23 |
Semiconductor-device Manufacturing Method, Computer Program Product, And Exposure-parameter Creating Method App 20100216064 - Takimoto; Michiya ;   et al. | 2010-08-26 |
Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device App 20100193960 - Mashita; Hiromitsu ;   et al. | 2010-08-05 |
Pattern Generating Method, Method Of Manufacturing Semiconductor Device, Computer Program Product, And Pattern-shape-determination-parameter Generating Method App 20100190342 - Kotani; Toshiya ;   et al. | 2010-07-29 |
Pattern Data Creating Method, Computer Program Product, And Semiconductor Device Manufacturing Method App 20100185313 - MASHITA; Hiromitsu ;   et al. | 2010-07-22 |
Mask Verification Method, Method Of Manufacturing Semiconductor Device, And Computer Readable Medium App 20100168895 - MASHITA; Hiromitsu ;   et al. | 2010-07-01 |
Method for manufacturing semiconductor device Grant 7,713,833 - Mashita , et al. May 11, 2 | 2010-05-11 |
Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device Grant 7,716,617 - Mashita , et al. May 11, 2 | 2010-05-11 |
Semiconductor memory device Grant 7,700,997 - Futatsuyama , et al. April 20, 2 | 2010-04-20 |
Method For Manufacturing Semiconductor Device App 20100081265 - Mashita; Hiromitsu ;   et al. | 2010-04-01 |
Pattern layout for forming integrated circuit Grant 7,682,757 - Mashita , et al. March 23, 2 | 2010-03-23 |
Method Of Fabricating Semiconductor Device And Semiconductor Device App 20100038795 - Aburada; Ryota ;   et al. | 2010-02-18 |
Pattern Predicting Method, Recording Media And Method Of Fabricating Semiconductor Device App 20100035168 - NAKAJIMA; Fumiharu ;   et al. | 2010-02-11 |
Design Layout Data Creating Method, Computer Program Product, And Method Of Manufacturing Semiconductor Device App 20100003819 - TAGUCHI; Takafumi ;   et al. | 2010-01-07 |
Pattern Verification Method, Method Of Manufacturing Semiconductor Device, And Recording Media App 20090258446 - Kotani; Toshiya ;   et al. | 2009-10-15 |
Method For Manufacturing Semiconductor Device And Computer Readable Medium For Storing Pattern Size Setting Program App 20090258503 - Mashita; Hiromitsu ;   et al. | 2009-10-15 |
Mask Pattern Data Generation Method, Mask Manufacturing Method, Semiconductor Device Manufacturing Method, And Pattern Data Generation Program App 20090239177 - MASHITA; Hiromitsu ;   et al. | 2009-09-24 |
Pattern Generation Method, Computer-readable Recording Medium, And Semiconductor Device Manufacturing Method App 20090186424 - Nakajima; Fumiharu ;   et al. | 2009-07-23 |
Pattern Layout Of Integrated Circuit App 20080137421 - KAI; Yasunobu ;   et al. | 2008-06-12 |
Lithography simulation method, program and semiconductor device manufacturing method App 20070277146 - Satake; Masaki ;   et al. | 2007-11-29 |
Pattern layout for forming integrated circuit App 20060228636 - Mashita; Hiromitsu ;   et al. | 2006-10-12 |
Semiconductor memory device App 20060197136 - Futatsuyama; Takuya ;   et al. | 2006-09-07 |
Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device App 20060157833 - Mashita; Hiromitsu ;   et al. | 2006-07-20 |