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Method of manufacturing semiconductor device Grant 11,387,116 - Yamazaki , et al. July 12, 2 | 2022-07-12 |
Semiconductor Device And Manufacturing Method Of The Same App 20220037532 - TORIUMI; Satoshi ;   et al. | 2022-02-03 |
Semiconductor device and manufacturing method of the same Grant 11,217,703 - Toriumi , et al. January 4, 2 | 2022-01-04 |
Sputtering Target, Method For Manufacturing Sputtering Target, And Method For Forming Thin Film App 20210230740 - YAMAZAKI; Shunpei ;   et al. | 2021-07-29 |
Sputtering target, method for manufacturing sputtering target, and method for forming thin film Grant 11,066,739 - Yamazaki , et al. July 20, 2 | 2021-07-20 |
Semiconductor Device And Method For Manufacturing The Same App 20210036160 - SAKATA; Junichiro ;   et al. | 2021-02-04 |
Sputtering target, method for manufacturing sputtering target, and method for forming thin film Grant 10,889,888 - Yamazaki , et al. January 12, 2 | 2021-01-12 |
Semiconductor Device And Manufacturing Method Of The Same App 20200357925 - TORIUMI; Satoshi ;   et al. | 2020-11-12 |
Semiconductor device and method for manufacturing the same Grant 10,804,409 - Sakata , et al. October 13, 2 | 2020-10-13 |
Method Of Manufacturing Semiconductor Device App 20200203183 - YAMAZAKI; Shunpei ;   et al. | 2020-06-25 |
Semiconductor device and manufacturing method of the same Grant 10,693,013 - Toriumi , et al. | 2020-06-23 |
Method of manufacturing semiconductor device Grant 10,615,052 - Yamazaki , et al. | 2020-04-07 |
Manufacturing method of oxide semiconductor Grant 10,388,520 - Yamazaki , et al. A | 2019-08-20 |
Sputtering Target, Method For Manufacturing Sputtering Target, And Method For Forming Thin Film App 20190185986 - YAMAZAKI; Shunpei ;   et al. | 2019-06-20 |
Semiconductor Device And Method For Manufacturing The Same App 20190051754 - SAKATA; Junichiro ;   et al. | 2019-02-14 |
Semiconductor device and method for manufacturing the same Grant 10,103,272 - Sakata , et al. October 16, 2 | 2018-10-16 |
Method Of Manufacturing Semiconductor Device App 20180277392 - YAMAZAKI; Shunpei ;   et al. | 2018-09-27 |
Semiconductor device and electronic device Grant 10,050,060 - Miyairi , et al. August 14, 2 | 2018-08-14 |
Manufacturing Method Of Semiconductor Device App 20180182894 - SATO; Yuhei ;   et al. | 2018-06-28 |
Method of manufacturing semiconductor device Grant 10,002,775 - Yamazaki , et al. June 19, 2 | 2018-06-19 |
Manufacturing method of semiconductor device Grant 9,960,278 - Sato , et al. May 1, 2 | 2018-05-01 |
Driver circuit with oxide semiconductor layers having varying hydrogen concentrations Grant 9,941,310 - Koyama , et al. April 10, 2 | 2018-04-10 |
Semiconductor Device And Electronic Device App 20170243899 - MIYAIRI; Hidekazu ;   et al. | 2017-08-24 |
Semiconductor device and electronic device Grant 9,653,479 - Miyairi , et al. May 16, 2 | 2017-05-16 |
Semiconductor device and method for manufacturing semiconductor device Grant 9,634,082 - Yamazaki , et al. April 25, 2 | 2017-04-25 |
Driver Circuit And Semiconductor Device App 20170025448 - KOYAMA; Jun ;   et al. | 2017-01-26 |
Sputtering Target, Method For Manufacturing Sputtering Target, And Method For Forming Thin Film App 20170016108 - YAMAZAKI; Shunpei ;   et al. | 2017-01-19 |
Semiconductor element and method for manufacturing the same Grant 9,530,872 - Yamazaki , et al. December 27, 2 | 2016-12-27 |
Driver Circuit And Semiconductor Device App 20160358950 - KOYAMA; Jun ;   et al. | 2016-12-08 |
Semiconductor device and manufacturing method thereof Grant 9,472,676 - Imoto , et al. October 18, 2 | 2016-10-18 |
Semiconductor Device And Manufacturing Method Of The Same App 20160300952 - TORIUMI; Satoshi ;   et al. | 2016-10-13 |
Method Of Manufacturing Semiconductor Device App 20160284564 - YAMAZAKI; Shunpei ;   et al. | 2016-09-29 |
Semiconductor Device And Electronic Device App 20160276370 - MIYAIRI; Hidekazu ;   et al. | 2016-09-22 |
Method of manufacturing semiconductor device including transistor and resistor incorporating hydrogen in oxide semiconductor Grant 9,443,888 - Koyama , et al. September 13, 2 | 2016-09-13 |
Semiconductor device and method for manufacturing the same Grant 9,397,225 - Imoto , et al. July 19, 2 | 2016-07-19 |
Sputtering target, method for manufacturing sputtering target, and method for forming thin film Grant 9,382,611 - Yamazaki , et al. July 5, 2 | 2016-07-05 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20160181434 - YAMAZAKI; Shunpei ;   et al. | 2016-06-23 |
Method of manufacturing semiconductor device Grant 9,362,136 - Yamazaki , et al. June 7, 2 | 2016-06-07 |
Light-transmitting Conductive Film, Display Device, Electronic Device, And Manufacturing Method Of Light-transmitting Conductive Film App 20160125969 - KOEZUKA; Junichi ;   et al. | 2016-05-05 |
Semiconductor device and method for manufacturing semiconductor device Grant 9,281,358 - Yamazaki , et al. March 8, 2 | 2016-03-08 |
Light-transmitting conductive film, display device, electronic device, and manufacturing method of light-transmitting conductive film Grant 9,260,779 - Koezuka , et al. February 16, 2 | 2016-02-16 |
Semiconductor Device And Method For Manufacturing The Same App 20160043230 - SAKATA; Junichiro ;   et al. | 2016-02-11 |
Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device Grant 9,224,838 - Yamazaki , et al. December 29, 2 | 2015-12-29 |
Method for forming oxide semiconductor film and method for manufacturing semiconductor device Grant 9,219,159 - Imoto , et al. December 22, 2 | 2015-12-22 |
Driver circuit and semiconductor device Grant 9,202,827 - Koyama , et al. December 1, 2 | 2015-12-01 |
Semiconductor device and method for manufacturing the same Grant 9,196,738 - Sakata , et al. November 24, 2 | 2015-11-24 |
Semiconductor element and method for manufacturing the same Grant 9,171,938 - Yamazaki , et al. October 27, 2 | 2015-10-27 |
Manufacturing Method Of Oxide Semiconductor App 20150187575 - Yamazaki; Shunpei ;   et al. | 2015-07-02 |
Method for manufacturing sputtering target and method for manufacturing semiconductor device Grant 9,057,126 - Yamazaki , et al. June 16, 2 | 2015-06-16 |
Semiconductor Device And Method For Manufacturing The Same App 20150137123 - IMOTO; Yuki ;   et al. | 2015-05-21 |
Semiconductor device and method for manufacturing the same Grant 9,012,904 - Imoto , et al. April 21, 2 | 2015-04-21 |
Display device and method for manufacturing the same Grant 8,970,106 - Yamazaki , et al. March 3, 2 | 2015-03-03 |
Semiconductor device and method for manufacturing the same Grant 8,956,944 - Imoto , et al. February 17, 2 | 2015-02-17 |
Semiconductor device and manufacturing method thereof Grant 8,936,965 - Imoto , et al. January 20, 2 | 2015-01-20 |
Method Of Manufacturing Semiconductor Device App 20140370657 - YAMAZAKI; Shunpei ;   et al. | 2014-12-18 |
Driver Circuit And Semiconductor Device App 20140357019 - KOYAMA; Jun ;   et al. | 2014-12-04 |
Method for forming thin film utilizing sputtering target Grant 8,889,477 - Yamazaki , et al. November 18, 2 | 2014-11-18 |
Method of manufacturing semiconductor device Grant 8,828,794 - Yamazaki , et al. September 9, 2 | 2014-09-09 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20140239298 - YAMAZAKI; Shunpei ;   et al. | 2014-08-28 |
Method For Manufacturing Oxide Semiconductor Film And Method For Manufacturing Semiconductor Device App 20140235015 - YAMAZAKI; Shunpei ;   et al. | 2014-08-21 |
Semiconductor film, semiconductor element, semiconductor device, and method for manufacturing the same Grant 8,809,852 - Yamazaki , et al. August 19, 2 | 2014-08-19 |
Method of manufacturing semiconductor device Grant 8,753,928 - Yamazaki , et al. June 17, 2 | 2014-06-17 |
Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device Grant 8,748,223 - Yamazaki , et al. June 10, 2 | 2014-06-10 |
Semiconductor device and method for manufacturing semiconductor device Grant 8,728,883 - Yamazaki , et al. May 20, 2 | 2014-05-20 |
Semiconductor device and method for manufacturing the same Grant 8,716,061 - Yamazaki , et al. May 6, 2 | 2014-05-06 |
Semiconductor Element And Method For Manufacturing The Same App 20140113407 - YAMAZAKI; Shunpei ;   et al. | 2014-04-24 |
Semiconductor device and method for manufacturing semiconductor device Grant 8,546,892 - Imoto , et al. October 1, 2 | 2013-10-01 |
Method For Manufacturing Sputtering Target And Method For Manufacturing Semiconductor Device App 20130133808 - YAMAZAKI; Shunpei ;   et al. | 2013-05-30 |
Semiconductor Device And Method For Manufacturing The Same App 20130130438 - YAMAZAKI; Shunpei ;   et al. | 2013-05-23 |
Conductive oxynitride and method for manufacturing conductive oxynitride film Grant 8,378,393 - Sakata , et al. February 19, 2 | 2013-02-19 |
Sputtering Target, Method For Manufacturing Sputtering Target, And Method For Forming Thin Film App 20130011962 - YAMAZAKI; Shunpei ;   et al. | 2013-01-10 |
Sputtering Target, Method For Manufacturing Sputtering Target, And Method For Forming Thin Film App 20120325650 - Yamazaki; Shunpei ;   et al. | 2012-12-27 |
Semiconductor device and method for manufacturing the same Grant 8,338,827 - Yamazaki , et al. December 25, 2 | 2012-12-25 |
Sputtering Target, Method For Manufacturing Sputtering Target, And Method For Forming Thin Film App 20120312681 - Yamazaki; Shunpei ;   et al. | 2012-12-13 |
Manufacturing Method Of Semiconductor Device App 20120258575 - SATO; Yuhei ;   et al. | 2012-10-11 |
Semiconductor Device And Manufacturing Method Thereof App 20120241738 - IMOTO; Yuki ;   et al. | 2012-09-27 |
Semiconductor Device And Method For Manufacturing The Same App 20120241737 - IMOTO; Yuki ;   et al. | 2012-09-27 |
Semiconductor Device And Method For Manufacturing The Same App 20120241736 - IMOTO; Yuki ;   et al. | 2012-09-27 |
Method For Forming Oxide Semiconductor Film And Method For Manufacturing Semiconductor Device App 20120244659 - IMOTO; Yuki ;   et al. | 2012-09-27 |
Method Of Manufacturing Semiconductor Device App 20120231580 - YAMAZAKI; Shunpei ;   et al. | 2012-09-13 |
Method Of Manufacturing Semiconductor Device App 20120231581 - YAMAZAKI; Shunpei ;   et al. | 2012-09-13 |
Semiconductor Film, Semiconductor Element, Semiconductor Device, And Method For Manufacturing The Same App 20120132907 - Yamazaki; Shunpei ;   et al. | 2012-05-31 |
Semiconductor Device And Manufacturing Method Thereof App 20120132902 - IMOTO; Yuki ;   et al. | 2012-05-31 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20120132903 - YAMAZAKI; Shunpei ;   et al. | 2012-05-31 |
Display Device And Method For Manufacturing The Same App 20120129287 - Yamazaki; Shunpei ;   et al. | 2012-05-24 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20120097942 - Imoto; Yuki ;   et al. | 2012-04-26 |
Display device and method for manufacturing the same Grant 8,129,900 - Yamazaki , et al. March 6, 2 | 2012-03-06 |
Semiconductor Device And Method For Manufacturing The Same App 20110140205 - SAKATA; Junichiro ;   et al. | 2011-06-16 |
Semiconductor Element And Method For Manufacturing The Same App 20110068336 - YAMAZAKI; Shunpei ;   et al. | 2011-03-24 |
Method For Manufacturing Oxide Semiconductor Film And Method For Manufacturing Semiconductor Device App 20110070693 - YAMAZAKI; Shunpei ;   et al. | 2011-03-24 |
Light-transmitting Conductive Film, Display Device, Electronic Device, And Manufacturing Method Of Light-transmitting Conductive Film App 20100294535 - KOEZUKA; Junichi ;   et al. | 2010-11-25 |
Driver Circuit And Semiconductor Device App 20100163874 - KOYAMA; Jun ;   et al. | 2010-07-01 |
Semiconductor Device And Method For Manufacturing The Same App 20100117073 - YAMAZAKI; Shunpei ;   et al. | 2010-05-13 |
Conductive Oxynitride And Method For Manufacturing Conductive Oxynitride Film App 20100109058 - SAKATA; Junichiro ;   et al. | 2010-05-06 |
Display device and method for manufacturing the same Grant 7,492,090 - Yamazaki , et al. February 17, 2 | 2009-02-17 |
Display Device And Method For Manufacturing The Same App 20090042326 - Yamazaki; Shunpei ;   et al. | 2009-02-12 |
Sputtering system and manufacturing method of thin film App 20060151314 - Fukuchi; Kunihiko ;   et al. | 2006-07-13 |
Display device and method for manufacturing the same App 20050093432 - Yamazaki, Shunpei ;   et al. | 2005-05-05 |
Sputtering system and manufacturing method of thin film App 20040084305 - Fukuchi, Kunihiko ;   et al. | 2004-05-06 |