loadpatents
Patent applications and USPTO patent grants for Maruyama; Tamotsu.The latest application filed is for "photomask blank, photomask and fabrication method thereof".
Patent | Date |
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Photomask blank, photomask and fabrication method thereof Grant 7,771,893 - Yoshikawa , et al. August 10, 2 | 2010-08-10 |
Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof Grant 7,622,227 - Inazuki , et al. November 24, 2 | 2009-11-24 |
Photomask blank, photomask and fabrication method thereof App 20070020534 - Yoshikawa; Hiroki ;   et al. | 2007-01-25 |
Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof App 20060257755 - Inazuki; Yukio ;   et al. | 2006-11-16 |
Photomask blank, photomask and method of manufacture Grant 6,733,930 - Shinagawa , et al. May 11, 2 | 2004-05-11 |
Photomask blank and photomask Grant 6,727,027 - Tsukamoto , et al. April 27, 2 | 2004-04-27 |
Phase shift mask blank, phase shift mask, and methods of manufacture Grant 6,641,958 - Inazuki , et al. November 4, 2 | 2003-11-04 |
Phase shift mask blank, phase shift mask and method of manufacture Grant 6,511,778 - Okazaki , et al. January 28, 2 | 2003-01-28 |
Photomask blank, photomask and method of manufacture Grant 6,503,669 - Kaneko , et al. January 7, 2 | 2003-01-07 |
Photomask blank, photomask and method of manufacture App 20020136966 - Shinagawa, Tsutomu ;   et al. | 2002-09-26 |
Photomask blank and photomask App 20020115003 - Tsukamoto, Tetsushi ;   et al. | 2002-08-22 |
Phase shift mask blank, phase shift mask, and methods of manufacture App 20020025478 - Inazuki, Yukio ;   et al. | 2002-02-28 |
Phase shift mask and method of manufacture App 20010028982 - Okazaki, Satoshi ;   et al. | 2001-10-11 |
Photomask blank, photomask and method of manufacture App 20010019801 - Kaneko, Hideo ;   et al. | 2001-09-06 |
Phase shift mask blank, phase shift mask, and method of manufacture App 20010007731 - Inazuki, Yukio ;   et al. | 2001-07-12 |
Phase shift mask blank, phase shift mask and method of manufacture App 20010006754 - Okazaki, Satoshi ;   et al. | 2001-07-05 |
Semiconductor single crystalline substrate and method for production thereof Grant 5,751,055 - Maruyama , et al. May 12, 1 | 1998-05-12 |
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