Marumo; Mitsuji
Patent Applications and Registrations
Patent applications and USPTO patent grants for Marumo; Mitsuji.The latest application filed is for "processing apparatus and device manufacturing method".
- Marumo; Mitsuji - Utsunomiya JP
- Marumo; Mitsuji - Utsunomiya-shi JP
- Marumo; Mitsuji - Sagamihara JP
- Marumo; Mitsuji - Atsugi JP
| Patent | Date |
|---|---|
| Processing apparatus and device manufacturing method Grant 9,123,760 - Hirano , et al. September 1, 2 | 2015-09-01 |
| Processing Apparatus And Device Manufacturing Method App 20130230371 - Hirano; Shinichi ; et al. | 2013-09-05 |
| Processing apparatus and device manufacturing method Grant 8,441,614 - Hirano , et al. May 14, 2 | 2013-05-14 |
| Processing Apparatus And Device Manufacturing Method App 20100026980 - Hirano; Shinichi ; et al. | 2010-02-04 |
| Mini-environment Pod Device, An Exposure Apparatus And A Device Manufacturing Method Using The Same App 20070175838 - MARUMO; Mitsuji | 2007-08-02 |
| Semiconductor manufacturing method and apparatus Grant 6,800,803 - Marumo October 5, 2 | 2004-10-05 |
| Substrate holding device and exposing apparatus using the same Grant 5,883,932 - Chiba , et al. March 16, 1 | 1999-03-16 |
| Substrate conveying system Grant 5,640,440 - Kuno , et al. June 17, 1 | 1997-06-17 |
| Substrate holding system and exposure apparatus having the same Grant 5,586,159 - Kitaoka , et al. December 17, 1 | 1996-12-17 |
| Substrate holding apparatus and a system using the same Grant 5,436,693 - Marumo July 25, 1 | 1995-07-25 |
| Vacuum chuck Grant 5,374,829 - Sakamoto , et al. December 20, 1 | 1994-12-20 |
| Wafer table and exposure apparatus with the same Grant 5,231,291 - Amemiya , et al. July 27, 1 | 1993-07-27 |
| Vacuum attraction type substrate holding device Grant 5,203,547 - Marumo April 20, 1 | 1993-04-20 |
| Vacuum chuck Grant 5,191,218 - Mori , et al. March 2, 1 | 1993-03-02 |
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