Marubayashi; Tetsuya
Patent Applications and Registrations
Patent applications and USPTO patent grants for Marubayashi; Tetsuya.The latest application filed is for "reaction tube and method of manufacturing semiconductor device".
- Marubayashi; Tetsuya - Toyama JP
- MARUBAYASHI; Tetsuya - Toyama-shi JP
- Marubayashi; Tetsuya - Tokyo JP
| Patent | Date |
|---|---|
| Reaction tube structure and substrate processing apparatus Grant 11,359,283 - Marubayashi , et al. June 14, 2 | 2022-06-14 |
| Reaction Tube And Method Of Manufacturing Semiconductor Device App 20200312631 - MARUBAYASHI; Tetsuya ; et al. | 2020-10-01 |
| Reaction Tube Structure And Substrate Processing Apparatus App 20180142353 - MARUBAYASHI; Tetsuya ; et al. | 2018-05-24 |
| Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,071,477 - Moriya , et al. December 6, 2 | 2011-12-06 |
| Substrate processing apparatus Grant 8,070,880 - Marubayashi , et al. December 6, 2 | 2011-12-06 |
| Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20100151682 - MORIYA; Atsushi ; et al. | 2010-06-17 |
| Substrate Processing Apparatus App 20100058984 - Marubayashi; Tetsuya ; et al. | 2010-03-11 |
| Substrate Processing Apparatus App 20090116936 - MARUBAYASHI; Tetsuya ; et al. | 2009-05-07 |
| Substrate processing apparatus and maintenance method therefor Grant 6,332,898 - Tometsuka , et al. December 25, 2 | 2001-12-25 |
| Substrate processing apparatus and maintenance method therefor Grant 6,143,040 - Tometsuka , et al. November 7, 2 | 2000-11-07 |
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