Patent | Date |
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Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications Grant 11,315,757 - Martinez , et al. April 26, 2 | 2022-04-26 |
Method And Apparatus To Enhance Sheath Formation, Evolution And Pulse To Pulse Stability In RF Powered Plasma Applications App 20210050185 - MARTINEZ; Linnell ;   et al. | 2021-02-18 |
Ion Filter Using Aperture Plate With Plurality Of Zones App 20200319356 - Lea; Leslie Michael ;   et al. | 2020-10-08 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 10,741,447 - Martinez , et al. A | 2020-08-11 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 10,707,060 - Johnson , et al. | 2020-07-07 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 10,573,557 - Pays-Volard , et al. Feb | 2020-02-25 |
Method for dicing a substrate with back metal Grant 10,497,621 - Falvo , et al. De | 2019-12-03 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20190244859 - Martinez; Linnell ;   et al. | 2019-08-08 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 10,297,427 - Martinez , et al. | 2019-05-21 |
Method And Apparatus For Plasma Dicing A Semi-conductor Wafer App 20190013243 - Johnson; Chris ;   et al. | 2019-01-10 |
Method for Dicing a Substrate with Back Metal App 20180254215 - Falvo; Peter ;   et al. | 2018-09-06 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20180190542 - Martinez; Linnell ;   et al. | 2018-07-05 |
Ion Filter App 20180143332 - Lea; Leslie Michael ;   et al. | 2018-05-24 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,911,654 - Martinez , et al. March 6, 2 | 2018-03-06 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,711,406 - Martinez , et al. July 18, 2 | 2017-07-18 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant RE46,339 - Gauldin , et al. March 14, 2 | 2017-03-14 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,564,366 - Martinez , et al. February 7, 2 | 2017-02-07 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20170033008 - Martinez; Linnell ;   et al. | 2017-02-02 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20170025311 - Martinez; Linnell ;   et al. | 2017-01-26 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,496,177 - Martinez , et al. November 15, 2 | 2016-11-15 |
Method for Dicing a Substrate with Back Metal App 20160254189 - Falvo; Peter ;   et al. | 2016-09-01 |
Method for dicing a substrate with back metal Grant 9,368,404 - Falvo , et al. June 14, 2 | 2016-06-14 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,343,365 - Lazerand , et al. May 17, 2 | 2016-05-17 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20160111332 - Martinez; Linnell ;   et al. | 2016-04-21 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20150371878 - Martinez; Linnell ;   et al. | 2015-12-24 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,202,721 - Geerpuram , et al. December 1, 2 | 2015-12-01 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,202,720 - Martinez , et al. December 1, 2 | 2015-12-01 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,202,737 - Gauldin , et al. December 1, 2 | 2015-12-01 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20150270154 - Gauldin; Rich ;   et al. | 2015-09-24 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20150270121 - Pays-Volard; David ;   et al. | 2015-09-24 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20150255297 - Martinez; Linnell ;   et al. | 2015-09-10 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20150255347 - Martinez; Linnell ;   et al. | 2015-09-10 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,105,705 - Pays-Volard , et al. August 11, 2 | 2015-08-11 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,082,839 - Gauldin , et al. July 14, 2 | 2015-07-14 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 9,070,760 - Martinez , et al. June 30, 2 | 2015-06-30 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,980,764 - Martinez , et al. March 17, 2 | 2015-03-17 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,946,058 - Gauldin , et al. February 3, 2 | 2015-02-03 |
Method and Apparatus for Plasma Dicing a Semi-Conductor Wafer App 20140242780 - Gauldin; Rich ;   et al. | 2014-08-28 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20140235034 - Pays-Volard; David ;   et al. | 2014-08-21 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,802,545 - Johnson , et al. August 12, 2 | 2014-08-12 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,796,154 - Johnson , et al. August 5, 2 | 2014-08-05 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,785,332 - Johnson , et al. July 22, 2 | 2014-07-22 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,778,806 - Johnson , et al. July 15, 2 | 2014-07-15 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20140154869 - Geerpuram; Dwarakanath ;   et al. | 2014-06-05 |
Method and apparatus for plasma dicing a semi-conductor wafer Grant 8,691,702 - Geerpuram , et al. April 8, 2 | 2014-04-08 |
Method for Dicing a Substrate with Back Metal App 20140094018 - Falvo; Peter ;   et al. | 2014-04-03 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130344683 - Lazerand; Thierry ;   et al. | 2013-12-26 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230974 - Martinez; Linnell ;   et al. | 2013-09-05 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230972 - Johnson; Chris ;   et al. | 2013-09-05 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230969 - Martinez; Linnell ;   et al. | 2013-09-05 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230971 - Geerpuram; Dwarakanath ;   et al. | 2013-09-05 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230973 - Gauldin; Rich ;   et al. | 2013-09-05 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230968 - Johnson; Chris ;   et al. | 2013-09-05 |
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer App 20130230970 - Martinez; Linnell ;   et al. | 2013-09-05 |