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Patent applications and USPTO patent grants for Martens; Simon Bernardus Cornelis Maria.The latest application filed is for "actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator".
Patent | Date |
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Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator Grant 10,191,392 - Dams , et al. Ja | 2019-01-29 |
Actuator, Positioning Device, Lithographic Apparatus, And Method For Manufacturing An Actuator App 20170199469 - DAMS; Johannes Adrianus Antonius Theodorus ;   et al. | 2017-07-13 |
Electromagnetic actuator, stage apparatus and lithographic apparatus Grant 8,687,171 - Hol , et al. April 1, 2 | 2014-04-01 |
Electromagnetic Actuator, Stage Apparatus And Lithographic Apparatus App 20120212723 - Hol; Sven Antoin Johan ;   et al. | 2012-08-23 |
Lithographic apparatus and device manufacturing method App 20070281149 - Martens; Simon Bernardus Cornelis Maria ;   et al. | 2007-12-06 |
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